IT1151056B - Processo perfeezionato per la fabbricazione di dispositivi non planari - Google Patents
Processo perfeezionato per la fabbricazione di dispositivi non planariInfo
- Publication number
- IT1151056B IT1151056B IT20412/80A IT2041280A IT1151056B IT 1151056 B IT1151056 B IT 1151056B IT 20412/80 A IT20412/80 A IT 20412/80A IT 2041280 A IT2041280 A IT 2041280A IT 1151056 B IT1151056 B IT 1151056B
- Authority
- IT
- Italy
- Prior art keywords
- manufacture
- planar devices
- process perfected
- perfected
- planar
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Processing Of Solid Wastes (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/028,461 US4268952A (en) | 1979-04-09 | 1979-04-09 | Method for fabricating self-aligned high resolution non planar devices employing low resolution registration |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8020412A0 IT8020412A0 (it) | 1980-03-07 |
IT1151056B true IT1151056B (it) | 1986-12-17 |
Family
ID=21843570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT20412/80A IT1151056B (it) | 1979-04-09 | 1980-03-07 | Processo perfeezionato per la fabbricazione di dispositivi non planari |
Country Status (5)
Country | Link |
---|---|
US (1) | US4268952A (it) |
EP (1) | EP0016968A1 (it) |
JP (1) | JPS55134981A (it) |
CA (2) | CA1126876A (it) |
IT (1) | IT1151056B (it) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5667974A (en) * | 1979-10-26 | 1981-06-08 | Ibm | Method of manufacturing semiconductor device |
US4324038A (en) * | 1980-11-24 | 1982-04-13 | Bell Telephone Laboratories, Incorporated | Method of fabricating MOS field effect transistors |
EP0055521B1 (en) * | 1980-11-29 | 1985-05-22 | Kabushiki Kaisha Toshiba | Method of filling a groove in a semiconductor substrate |
JPS5893351A (ja) * | 1981-11-30 | 1983-06-03 | Toshiba Corp | 半導体装置及び製造方法 |
JPS598374A (ja) * | 1982-07-05 | 1984-01-17 | Matsushita Electronics Corp | 縦型構造電界効果トランジスタの製造方法 |
US4586243A (en) * | 1983-01-14 | 1986-05-06 | General Motors Corporation | Method for more uniformly spacing features in a semiconductor monolithic integrated circuit |
US4544940A (en) * | 1983-01-14 | 1985-10-01 | General Motors Corporation | Method for more uniformly spacing features in a lateral bipolar transistor |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3598664A (en) * | 1964-12-29 | 1971-08-10 | Texas Instruments Inc | High frequency transistor and process for fabricating same |
US3518509A (en) * | 1966-06-17 | 1970-06-30 | Int Standard Electric Corp | Complementary field-effect transistors on common substrate by multiple epitaxy techniques |
FR2157740B1 (it) * | 1971-10-29 | 1976-10-29 | Thomson Csf | |
US3968562A (en) * | 1971-11-25 | 1976-07-13 | U.S. Philips Corporation | Method of manufacturing a semiconductor device |
US4027380A (en) * | 1974-06-03 | 1977-06-07 | Fairchild Camera And Instrument Corporation | Complementary insulated gate field effect transistor structure and process for fabricating the structure |
JPS52128078A (en) * | 1976-04-21 | 1977-10-27 | Mitsubishi Electric Corp | Manufacture of field effect transistor |
JPS53125778A (en) * | 1977-04-08 | 1978-11-02 | Nec Corp | Semiconductor device |
JPS5423479A (en) * | 1977-07-25 | 1979-02-22 | Agency Of Ind Science & Technol | Manufacture for field effect transistor of insulation gate type |
DE2738008A1 (de) * | 1977-08-23 | 1979-03-01 | Siemens Ag | Verfahren zum herstellen einer eintransistor-speicherzelle |
US4145459A (en) * | 1978-02-02 | 1979-03-20 | Rca Corporation | Method of making a short gate field effect transistor |
-
1979
- 1979-04-09 US US06/028,461 patent/US4268952A/en not_active Expired - Lifetime
-
1980
- 1980-02-05 JP JP1214080A patent/JPS55134981A/ja active Pending
- 1980-02-06 CA CA345,149A patent/CA1126876A/en not_active Expired
- 1980-02-28 EP EP80100984A patent/EP0016968A1/en not_active Ceased
- 1980-03-07 IT IT20412/80A patent/IT1151056B/it active
- 1980-03-10 CA CA347,322A patent/CA1132146A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CA1126876A (en) | 1982-06-29 |
JPS55134981A (en) | 1980-10-21 |
CA1132146A (en) | 1982-09-21 |
US4268952A (en) | 1981-05-26 |
EP0016968A1 (en) | 1980-10-15 |
IT8020412A0 (it) | 1980-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT1079910B (it) | Processo per la preparazione di etilenglicol | |
IT1165446B (it) | Processo perfezionato per la fabbricazione di dispositivi semiconduttori | |
IT1093902B (it) | Processo per la preparazione di ottafluorofropano | |
BR8000748A (pt) | Processo para preparacao de benzimidazolil-benzo-furanas | |
IT1074698B (it) | Processo per la preparazione di metaarilossi-benzaldeidi | |
IT1123574B (it) | Processo per la produzione di diesterediammidi | |
IT1127296B (it) | Procedimento perfezionato per la produzione di cumene | |
IT1038893B (it) | Processo per la preparazione di alchilbenzoli | |
BR8001693A (pt) | Processo para preparacao de tiazolidino-2-2-tionas | |
IT1064331B (it) | Processo per la preparazione di d-mannite | |
IT1075494B (it) | Processo per la preparazione di composti antistaminici | |
IT1058978B (it) | Processo per la preparazione di acetacetilarilamidi | |
IT1113631B (it) | Processo per la preparazione di composti alchilfenolici | |
IT1151056B (it) | Processo perfeezionato per la fabbricazione di dispositivi non planari | |
IT1089011B (it) | Processo per la preparazione di 2-metil-1-epten-6-one | |
IT1099550B (it) | Processo per la determinazione di ferritina | |
IT1055863B (it) | Processo per la preparazione di cicloesanonossima | |
IT1123187B (it) | Processo per la preparazione di l-alfa-glicerilfosforilcolina | |
IT1094954B (it) | Processo per la preparazione di 1-amino-2-bromo-4-idrossiantrachinone | |
IT1097048B (it) | Processo per la preparazione di clorozincati di azo-coloranti di benzotiazolio | |
IT1100887B (it) | Processo per la preparazione di acetacetilaminobenzeni | |
IT1098397B (it) | Processo per la sintesi di ammoniaca | |
IT1085531B (it) | Processo per la preparazione di 2-alcossi-6-bromo-naftaleni | |
IT1158862B (it) | Processo per la preparazione di auranofina | |
IT1089001B (it) | Processo per la preparazione di alchilfenoli |