IT1149813B - Sostanza resistente agli elettroni comprendente un materiale organico,conduttivo a trasferimento di cariche - Google Patents

Sostanza resistente agli elettroni comprendente un materiale organico,conduttivo a trasferimento di cariche

Info

Publication number
IT1149813B
IT1149813B IT23528/80A IT2352880A IT1149813B IT 1149813 B IT1149813 B IT 1149813B IT 23528/80 A IT23528/80 A IT 23528/80A IT 2352880 A IT2352880 A IT 2352880A IT 1149813 B IT1149813 B IT 1149813B
Authority
IT
Italy
Prior art keywords
organic
electronic
transfer material
substance including
resistant substance
Prior art date
Application number
IT23528/80A
Other languages
English (en)
Italian (it)
Other versions
IT8023528A0 (it
Inventor
Edward Martin Engler
Demosthenes John Kuptsis
Gerard Robert Schad
Yaffa Tomkiewicz
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of IT8023528A0 publication Critical patent/IT8023528A0/it
Application granted granted Critical
Publication of IT1149813B publication Critical patent/IT1149813B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photoreceptors In Electrophotography (AREA)
IT23528/80A 1979-08-09 1980-07-18 Sostanza resistente agli elettroni comprendente un materiale organico,conduttivo a trasferimento di cariche IT1149813B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6529179A 1979-08-09 1979-08-09

Publications (2)

Publication Number Publication Date
IT8023528A0 IT8023528A0 (it) 1980-07-18
IT1149813B true IT1149813B (it) 1986-12-10

Family

ID=22061674

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23528/80A IT1149813B (it) 1979-08-09 1980-07-18 Sostanza resistente agli elettroni comprendente un materiale organico,conduttivo a trasferimento di cariche

Country Status (5)

Country Link
EP (1) EP0023988B1 (enExample)
JP (1) JPS5627139A (enExample)
CA (1) CA1165761A (enExample)
DE (1) DE3066749D1 (enExample)
IT (1) IT1149813B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4522754A (en) * 1982-11-12 1985-06-11 Ciba Geigy Corporation Metallically conducting (2-fluoro-5,6,11,12-tetraselenotetracene)2 -bromide
US4601853A (en) * 1984-02-13 1986-07-22 Ciba-Geigy Corporation (2-fluoro-5,6,11,12-tetraselenotetracene)2 chloride
CH664963A5 (de) * 1985-10-18 1988-04-15 Ciba Geigy Ag Difluorierte (5,6,11,12-tetraselenotetracen)2-halogenide, verfahren zu deren herstellung und deren verwendung.
JPS6435545A (en) * 1987-07-31 1989-02-06 Japan Synthetic Rubber Co Ltd Resist composition used for processing with charged particle beam
JPH01210944A (ja) * 1988-02-18 1989-08-24 Japan Synthetic Rubber Co Ltd 感放射線性樹脂組成物
DE58909497D1 (de) * 1988-09-30 1995-12-21 Ciba Geigy Ag Antistatische und elektrisch leitende Reliefbilder, Verfahren zu deren Herstellung, Beschichtungsmittel und strahlungsempfindliche Polymere.
JP5458267B2 (ja) * 2009-02-24 2014-04-02 国立大学法人東京工業大学 ヘキサメチレンテトラチアフルバレン化合物、有機半導体および有機薄膜トランジスタ
CN113004291B (zh) * 2019-12-20 2022-03-01 中国科学院化学研究所 基于金属卟啉的分子玻璃化学放大光刻胶及其制备方法和应用

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3925076A (en) * 1971-02-16 1975-12-09 Monsanto Co Light sensitive compositions and products
US4312991A (en) * 1979-05-10 1982-01-26 International Business Machines Corporation Dithiobenzoate 4,5-dicyano-1,3-(dithiolidene-2-yl)methylene

Also Published As

Publication number Publication date
DE3066749D1 (en) 1984-04-05
IT8023528A0 (it) 1980-07-18
CA1165761A (en) 1984-04-17
EP0023988B1 (de) 1984-02-29
EP0023988A3 (en) 1982-01-20
JPS5627139A (en) 1981-03-16
EP0023988A2 (de) 1981-02-18
JPS6245969B2 (enExample) 1987-09-30

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