IT1140429B - Fotomaschera e procedimento per il suo impiego e la sua fabbricazione - Google Patents

Fotomaschera e procedimento per il suo impiego e la sua fabbricazione

Info

Publication number
IT1140429B
IT1140429B IT25925/81A IT2592581A IT1140429B IT 1140429 B IT1140429 B IT 1140429B IT 25925/81 A IT25925/81 A IT 25925/81A IT 2592581 A IT2592581 A IT 2592581A IT 1140429 B IT1140429 B IT 1140429B
Authority
IT
Italy
Prior art keywords
photomask
procedure
manufacture
Prior art date
Application number
IT25925/81A
Other languages
English (en)
Other versions
IT8125925A0 (it
Inventor
Edward Lawrence Banks
Bruce Edward Truax
Laurence Shrapnell Watkins
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of IT8125925A0 publication Critical patent/IT8125925A0/it
Application granted granted Critical
Publication of IT1140429B publication Critical patent/IT1140429B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y10T428/24868—Translucent outer layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IT25925/81A 1981-01-05 1981-12-30 Fotomaschera e procedimento per il suo impiego e la sua fabbricazione IT1140429B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22245181A 1981-01-05 1981-01-05
US06/287,970 US4361643A (en) 1981-01-05 1981-07-29 Photomask and method of using same

Publications (2)

Publication Number Publication Date
IT8125925A0 IT8125925A0 (it) 1981-12-30
IT1140429B true IT1140429B (it) 1986-09-24

Family

ID=26916806

Family Applications (1)

Application Number Title Priority Date Filing Date
IT25925/81A IT1140429B (it) 1981-01-05 1981-12-30 Fotomaschera e procedimento per il suo impiego e la sua fabbricazione

Country Status (5)

Country Link
US (1) US4361643A (it)
EP (1) EP0068012B1 (it)
GB (1) GB2092773B (it)
IT (1) IT1140429B (it)
WO (1) WO1982002361A1 (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4537813A (en) * 1982-09-27 1985-08-27 At&T Technologies, Inc. Photomask encapsulation
US4499162A (en) * 1983-06-24 1985-02-12 At&T Technologies, Inc. Photomask and method of using same
US4529299A (en) * 1984-05-03 1985-07-16 At&T Technologies, Inc. Interposer element for photomasks in projection printer
US4537498A (en) * 1984-05-03 1985-08-27 At&T Technologies, Inc. Focal plane adjusted photomask and methods of projecting images onto photosensitized workpiece surfaces
US4915058A (en) * 1988-11-21 1990-04-10 Murray Douglas A Window mask with releasable securing means
US5076654A (en) * 1990-10-29 1991-12-31 At&T Bell Laboratories Packaging of silicon optical components
US5656093A (en) * 1996-03-08 1997-08-12 Applied Materials, Inc. Wafer spacing mask for a substrate support chuck and method of fabricating same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1985074A (en) * 1932-11-02 1934-12-18 Zeiss Carl Illumination system
US2175343A (en) * 1937-09-24 1939-10-10 Radio Keith Orpheum Corp Plate cooler for stereopticon slides
US2317550A (en) * 1941-06-17 1943-04-27 Joseph D Ramsey Projection device
US3193840A (en) * 1961-10-27 1965-07-06 Raymond C Mercer Apparatus for liquid immersion motion picture film projection
US3400995A (en) * 1965-12-09 1968-09-10 Gen Precision Systems Inc Heat dissipating film gate
FR1594635A (it) * 1967-10-17 1970-06-08
NL6814882A (it) * 1967-12-12 1969-06-16
US3906133A (en) * 1974-04-23 1975-09-16 Harris Corp Nitrocellulose protective coating on masks used in IC manufacture
FR2280924A1 (fr) * 1974-08-02 1976-02-27 Silec Semi Conducteurs Procede de protection de masques de photogravure et masques obtenus
US4201581A (en) * 1978-03-13 1980-05-06 Eastman Kodak Company Method of providing close contact for contact printing
US4256787A (en) * 1978-05-03 1981-03-17 Massachusetts Institute Of Technology Orientation of ordered liquids and their use in devices
DE2845147B1 (de) * 1978-10-17 1980-01-17 Censor Patent Versuch Projektionsmaske

Also Published As

Publication number Publication date
GB2092773B (en) 1985-06-05
EP0068012B1 (en) 1986-04-23
US4361643A (en) 1982-11-30
GB2092773A (en) 1982-08-18
EP0068012A1 (en) 1983-01-05
EP0068012A4 (en) 1983-07-04
WO1982002361A1 (en) 1982-07-22
IT8125925A0 (it) 1981-12-30

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19961223