IT1090469B - Sistema per illuminare un campo anulare - Google Patents

Sistema per illuminare un campo anulare

Info

Publication number
IT1090469B
IT1090469B IT5110977A IT5110977A IT1090469B IT 1090469 B IT1090469 B IT 1090469B IT 5110977 A IT5110977 A IT 5110977A IT 5110977 A IT5110977 A IT 5110977A IT 1090469 B IT1090469 B IT 1090469B
Authority
IT
Italy
Prior art keywords
anular
illuminating
field
anular field
Prior art date
Application number
IT5110977A
Other languages
English (en)
Italian (it)
Original Assignee
Perkin Elmer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp
Application granted granted Critical
Publication of IT1090469B publication Critical patent/IT1090469B/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0836—Catadioptric systems using more than three curved mirrors
    • G02B17/0848—Catadioptric systems using more than three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
IT5110977A 1976-09-22 1977-09-21 Sistema per illuminare un campo anulare IT1090469B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72535176A 1976-09-22 1976-09-22

Publications (1)

Publication Number Publication Date
IT1090469B true IT1090469B (it) 1985-06-26

Family

ID=24914185

Family Applications (1)

Application Number Title Priority Date Filing Date
IT5110977A IT1090469B (it) 1976-09-22 1977-09-21 Sistema per illuminare un campo anulare

Country Status (7)

Country Link
JP (1) JPS5341079A (fr)
CA (1) CA1090183A (fr)
CH (1) CH623659A5 (fr)
DE (1) DE2742488A1 (fr)
FR (1) FR2372379A1 (fr)
GB (1) GB1589784A (fr)
IT (1) IT1090469B (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4321628A (en) * 1980-04-02 1982-03-23 Xerox Corporation Scanning apparatus
GB2173608A (en) * 1985-03-25 1986-10-15 Richard George Bingham Imaging system having three curved and one aspherical mirror
JPH11326759A (ja) * 1998-05-18 1999-11-26 Ricoh Co Ltd 画像表示装置
JP2001228401A (ja) 2000-02-16 2001-08-24 Canon Inc 投影光学系、および該投影光学系による投影露光装置、デバイス製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541379A (fr) * 1966-11-02 1968-10-04 Eltro Gmbh Procédé et dispositif de formation d'images
US3644030A (en) * 1968-07-12 1972-02-22 Ricoh Kk Light source system
US3748015A (en) * 1971-06-21 1973-07-24 Perkin Elmer Corp Unit power imaging catoptric anastigmat
DE2410924A1 (de) * 1973-03-09 1974-09-26 Perkin Elmer Corp Vorrichtung zur fotografischen belichtung einer oberflaeche
DE2348567A1 (de) * 1973-09-27 1975-04-17 Guido Georg Reinert Fluoreszenzlampe des entladungsroehrentyps mit uv-strahlendem leuchtstoff, sogenannter schwarzlichtleuchtstoffroehre fuer die beobachtung feiner strukturen mittels einer lupe, eines stereomikroskops oder aequivalenter optischer geraete
US3878419A (en) * 1973-12-17 1975-04-15 Carlo F Lafiandra Precision base mercury vapor lamp
CH597618A5 (fr) * 1975-12-02 1978-04-14 Zelacolor Syst

Also Published As

Publication number Publication date
DE2742488A1 (de) 1978-03-23
FR2372379A1 (fr) 1978-06-23
DE2742488C2 (fr) 1988-01-21
FR2372379B1 (fr) 1982-08-13
CH623659A5 (en) 1981-06-15
GB1589784A (en) 1981-05-20
CA1090183A (fr) 1980-11-25
JPS5341079A (en) 1978-04-14
JPH0315170B2 (fr) 1991-02-28

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