IT1010053B - Procedimento per fabbricare un dispositivo di silicio o carburo di silicio per processi di diffu sione - Google Patents

Procedimento per fabbricare un dispositivo di silicio o carburo di silicio per processi di diffu sione

Info

Publication number
IT1010053B
IT1010053B IT21851/74A IT2185174A IT1010053B IT 1010053 B IT1010053 B IT 1010053B IT 21851/74 A IT21851/74 A IT 21851/74A IT 2185174 A IT2185174 A IT 2185174A IT 1010053 B IT1010053 B IT 1010053B
Authority
IT
Italy
Prior art keywords
silicon
procedure
manufacturing
diffusion processes
carbide device
Prior art date
Application number
IT21851/74A
Other languages
English (en)
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1010053B publication Critical patent/IT1010053B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5057—Carbides
    • C04B41/5059—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
    • C04B41/5096—Silicon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
IT21851/74A 1973-04-26 1974-04-24 Procedimento per fabbricare un dispositivo di silicio o carburo di silicio per processi di diffu sione IT1010053B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE732321186A DE2321186B2 (de) 1973-04-26 1973-04-26 Verfahren zum Herstellen eines Silicium- oder Siliciumcarbid-Rohres

Publications (1)

Publication Number Publication Date
IT1010053B true IT1010053B (it) 1977-01-10

Family

ID=5879350

Family Applications (1)

Application Number Title Priority Date Filing Date
IT21851/74A IT1010053B (it) 1973-04-26 1974-04-24 Procedimento per fabbricare un dispositivo di silicio o carburo di silicio per processi di diffu sione

Country Status (4)

Country Link
JP (1) JPS5433835B2 (cg-RX-API-DMAC10.html)
BE (1) BE814247A (cg-RX-API-DMAC10.html)
DE (1) DE2321186B2 (cg-RX-API-DMAC10.html)
IT (1) IT1010053B (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2652218A1 (de) * 1976-11-16 1978-05-24 Wacker Chemitronic Verfahren zur herstellung von substratgebundenem, grossflaechigem silicium
JPS5717126A (en) * 1980-07-03 1982-01-28 Toshiba Ceramics Co Ltd Manufacture of silicon carbide process tube for semiconductor
US9683286B2 (en) * 2006-04-28 2017-06-20 Gtat Corporation Increased polysilicon deposition in a CVD reactor
KR101671546B1 (ko) * 2009-02-27 2016-11-01 가부시끼가이샤 도꾸야마 다결정 규소 로드 및 그의 제조 장치

Also Published As

Publication number Publication date
JPS5433835B2 (cg-RX-API-DMAC10.html) 1979-10-23
DE2321186C3 (cg-RX-API-DMAC10.html) 1979-10-31
JPS5015478A (cg-RX-API-DMAC10.html) 1975-02-18
BE814247A (fr) 1974-08-16
DE2321186B2 (de) 1979-03-08
DE2321186A1 (de) 1974-11-21

Similar Documents

Publication Publication Date Title
IT955649B (it) Metodo per la fabbricazione di un dispositivo semiconduttore
IT1024061B (it) Dispositivo di chiusura patrico larmente per ascensori
NL7513483A (nl) Geintegreerde halfgeleiderinrichting.
IT964646B (it) Ritrattore di cintura di sicurezza per sedile
IT1023482B (it) Metodo per la realizzazione di un dispositivo elettore
IT1020544B (it) Prodotto sinterizzato a base di nitruro di silicio
IT962283B (it) Dispositivo per lucidare sottili dischetti di silicio
IT1026142B (it) Procedimento per produrre strati di carburo di silicio su un sostrato di silicio
IT960386B (it) Apparecchio per la lucidatura auto matica di superfici
NL163904C (nl) Halfgeleiderinrichting.
NL182110B (nl) Halfgeleiderinrichting.
IT1014210B (it) Dispositivo di vincolo per articoli particolarmente lastrine semicondut tive di silicio
IT1043609B (it) Dispusitivo per il trattamento di superfici
IT1010392B (it) Procedimento per fabbricare gratic ci di silicio o carburo di silicio utile per processi di diffusione
IT1031605B (it) Dispositivo di pompaggio per fluidi
IT1022944B (it) Processo di diffusione planare per la fabbricazione di circuiti integrati monolitici
IT976915B (it) Metodo per fabbricare componenti pressati dinitru o di silicio
IT1024062B (it) Dispositivo di chiusura partico larmente per ascensori
IT1004927B (it) Procedimento per la diffusione del le impurezze in un semiconduttore
SE394857B (sv) Munstycke for kemiska reaktionsprocesser
IT968688B (it) Fibria per cintura di sicurezza
IT970954B (it) Metodo di diffusione planare di zone di un circuito integrato monolitico
BE788159A (fr) Procede de decapage du nitrure de silicium
SE7504635L (sv) Munstycke for slamsuganordning.
NL7414233A (nl) Halfgeleiderinrichting met hitte bestendige metalen laag.