IT1003883B - Procedimento per fabbricare transi stori a effetto di campo applicando un processo di assorbimento selet tivo - Google Patents
Procedimento per fabbricare transi stori a effetto di campo applicando un processo di assorbimento selet tivoInfo
- Publication number
- IT1003883B IT1003883B IT49646/74A IT4964674A IT1003883B IT 1003883 B IT1003883 B IT 1003883B IT 49646/74 A IT49646/74 A IT 49646/74A IT 4964674 A IT4964674 A IT 4964674A IT 1003883 B IT1003883 B IT 1003883B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- applying
- field effect
- absorption process
- different field
- Prior art date
Links
Classifications
-
- H10P32/141—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
- H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
- H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions
- H10D30/6717—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions the source and the drain regions being asymmetrical
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/03—Manufacture or treatment wherein the substrate comprises sapphire, e.g. silicon-on-sapphire [SOS]
-
- H10P32/171—
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/043—Dual dielectric
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/053—Field effect transistors fets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/15—Silicon on sapphire SOS
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/913—Active solid-state devices, e.g. transistors, solid-state diodes with means to absorb or localize unwanted impurities or defects from semiconductors, e.g. heavy metal gettering
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2316118A DE2316118C3 (de) | 1973-03-30 | 1973-03-30 | Verfahren zur Herstellung von Feldeffekttransistoren durch Anwendung einer selektiven Getterung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT1003883B true IT1003883B (it) | 1976-06-10 |
Family
ID=5876584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT49646/74A IT1003883B (it) | 1973-03-30 | 1974-03-26 | Procedimento per fabbricare transi stori a effetto di campo applicando un processo di assorbimento selet tivo |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US3897625A (cg-RX-API-DMAC10.html) |
| JP (1) | JPS5648986B2 (cg-RX-API-DMAC10.html) |
| AT (1) | AT339378B (cg-RX-API-DMAC10.html) |
| BE (1) | BE813048A (cg-RX-API-DMAC10.html) |
| CA (1) | CA991317A (cg-RX-API-DMAC10.html) |
| CH (1) | CH570041A5 (cg-RX-API-DMAC10.html) |
| DE (1) | DE2316118C3 (cg-RX-API-DMAC10.html) |
| FR (1) | FR2223839B1 (cg-RX-API-DMAC10.html) |
| GB (1) | GB1460489A (cg-RX-API-DMAC10.html) |
| IT (1) | IT1003883B (cg-RX-API-DMAC10.html) |
| LU (1) | LU69732A1 (cg-RX-API-DMAC10.html) |
| NL (1) | NL7404256A (cg-RX-API-DMAC10.html) |
| SE (1) | SE394767B (cg-RX-API-DMAC10.html) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2801085A1 (de) * | 1977-01-11 | 1978-07-13 | Zaidan Hojin Handotai Kenkyu | Statischer induktionstransistor |
| US4333224A (en) * | 1978-04-24 | 1982-06-08 | Buchanan Bobby L | Method of fabricating polysilicon/silicon junction field effect transistors |
| US4380113A (en) * | 1980-11-17 | 1983-04-19 | Signetics Corporation | Process for fabricating a high capacity memory cell |
| US4998146A (en) * | 1989-05-24 | 1991-03-05 | Xerox Corporation | High voltage thin film transistor |
| FR2774509B1 (fr) * | 1998-01-30 | 2001-11-16 | Sgs Thomson Microelectronics | Procede de depot d'une region de silicium monocristallin |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3490964A (en) * | 1966-04-29 | 1970-01-20 | Texas Instruments Inc | Process of forming semiconductor devices by masking and diffusion |
| US3783052A (en) * | 1972-11-10 | 1974-01-01 | Motorola Inc | Process for manufacturing integrated circuits on an alumina substrate |
| US3837071A (en) * | 1973-01-16 | 1974-09-24 | Rca Corp | Method of simultaneously making a sigfet and a mosfet |
-
1973
- 1973-03-30 DE DE2316118A patent/DE2316118C3/de not_active Expired
-
1974
- 1974-03-18 AT AT222874A patent/AT339378B/de not_active IP Right Cessation
- 1974-03-20 FR FR7409452A patent/FR2223839B1/fr not_active Expired
- 1974-03-22 CH CH402574A patent/CH570041A5/xx not_active IP Right Cessation
- 1974-03-26 IT IT49646/74A patent/IT1003883B/it active
- 1974-03-26 GB GB1331374A patent/GB1460489A/en not_active Expired
- 1974-03-28 NL NL7404256A patent/NL7404256A/xx unknown
- 1974-03-28 LU LU69732A patent/LU69732A1/xx unknown
- 1974-03-28 US US455589A patent/US3897625A/en not_active Expired - Lifetime
- 1974-03-28 JP JP3508174A patent/JPS5648986B2/ja not_active Expired
- 1974-03-29 BE BE142635A patent/BE813048A/xx unknown
- 1974-03-29 CA CA196,351A patent/CA991317A/en not_active Expired
- 1974-03-29 SE SE7404271A patent/SE394767B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CA991317A (en) | 1976-06-15 |
| NL7404256A (cg-RX-API-DMAC10.html) | 1974-10-02 |
| GB1460489A (en) | 1977-01-06 |
| SE394767B (sv) | 1977-07-04 |
| LU69732A1 (cg-RX-API-DMAC10.html) | 1974-07-17 |
| DE2316118B2 (cg-RX-API-DMAC10.html) | 1975-04-03 |
| FR2223839A1 (cg-RX-API-DMAC10.html) | 1974-10-25 |
| CH570041A5 (cg-RX-API-DMAC10.html) | 1975-11-28 |
| JPS49131082A (cg-RX-API-DMAC10.html) | 1974-12-16 |
| BE813048A (fr) | 1974-07-15 |
| FR2223839B1 (cg-RX-API-DMAC10.html) | 1978-02-10 |
| DE2316118C3 (de) | 1975-11-27 |
| JPS5648986B2 (cg-RX-API-DMAC10.html) | 1981-11-19 |
| DE2316118A1 (de) | 1974-10-10 |
| ATA222874A (de) | 1977-02-15 |
| US3897625A (en) | 1975-08-05 |
| AT339378B (de) | 1977-10-10 |
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