IN2014DN07102A - - Google Patents
Info
- Publication number
- IN2014DN07102A IN2014DN07102A IN7102DEN2014A IN2014DN07102A IN 2014DN07102 A IN2014DN07102 A IN 2014DN07102A IN 7102DEN2014 A IN7102DEN2014 A IN 7102DEN2014A IN 2014DN07102 A IN2014DN07102 A IN 2014DN07102A
- Authority
- IN
- India
- Prior art keywords
- metal nitride
- thermistor
- nitride material
- film
- tialn
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/008—Thermistors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/06—Epitaxial-layer growth by reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/04—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
- H01C7/042—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient mainly consisting of inorganic non-metallic substances
- H01C7/043—Oxides or oxidic compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
- H01C7/022—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances
- H01C7/023—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient mainly consisting of non-metallic substances containing oxides or oxidic compounds, e.g. ferrites
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Thermistors And Varistors (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
PROVIDED ARE: A METAL NITRIDE MATERIAL THAT IS FOR A THERMISTOR AND THAT HAS HIGH RELIABILITY AND HIGH HEAT RESISTANCE AND CAN BE DIRECTLY FORMED WITHOUT FIRING INTO A FILM OR THE LIKE; A METHOD FOR PRODUCING THE METAL NITRIDE MATERIAL FOR A THERMISTOR; AND A FILM THERMISTOR SENSOR. THE METAL NITRIDE MATERIAL USED IN A THERMISTOR COMPRISES A METAL NITRIDE REPRESENTED BY THE GENERAL FORMULA TIALN (WHERE 0.70 = Y/(X+Y) = 0.95 0.4 = Z = 0.5 AND X+Y+Z = 1) THE CRYSTAL STRUCTURE THEREOF BEING A SINGLE PHASE OF HEXAGONAL WURTZITE.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012041966A JP5477670B2 (en) | 2012-02-28 | 2012-02-28 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
PCT/JP2013/055769 WO2013129680A1 (en) | 2012-02-28 | 2013-02-26 | Metal nitride material for thermistor, method for producing same, and film thermistor sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014DN07102A true IN2014DN07102A (en) | 2015-04-24 |
Family
ID=49082865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN7102DEN2014 IN2014DN07102A (en) | 2012-02-28 | 2013-02-26 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9905341B2 (en) |
EP (1) | EP2822001B1 (en) |
JP (1) | JP5477670B2 (en) |
KR (1) | KR101872063B1 (en) |
CN (1) | CN104025211B (en) |
IN (1) | IN2014DN07102A (en) |
TW (1) | TWI552173B (en) |
WO (1) | WO2013129680A1 (en) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5871190B2 (en) * | 2012-03-30 | 2016-03-01 | 三菱マテリアル株式会社 | Metal nitride film for thermistor, method for producing the same, and film type thermistor sensor |
JP5896157B2 (en) * | 2012-09-06 | 2016-03-30 | 三菱マテリアル株式会社 | Temperature sensor |
JP5896160B2 (en) * | 2012-09-28 | 2016-03-30 | 三菱マテリアル株式会社 | Temperature sensor |
JP6111637B2 (en) * | 2012-12-12 | 2017-04-12 | 三菱マテリアル株式会社 | Temperature sensor and manufacturing method thereof |
JP2014119257A (en) * | 2012-12-13 | 2014-06-30 | Mitsubishi Materials Corp | Air flow sensor |
JP6015425B2 (en) * | 2012-12-21 | 2016-10-26 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6015424B2 (en) * | 2012-12-21 | 2016-10-26 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6015423B2 (en) * | 2012-12-21 | 2016-10-26 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP5928831B2 (en) * | 2013-03-21 | 2016-06-01 | 三菱マテリアル株式会社 | Temperature sensor |
JP6094422B2 (en) * | 2013-08-09 | 2017-03-15 | 三菱マテリアル株式会社 | Temperature sensor |
JP6094421B2 (en) * | 2013-08-09 | 2017-03-15 | 三菱マテリアル株式会社 | Temperature sensor |
JP6354947B2 (en) * | 2013-08-30 | 2018-07-11 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6318915B2 (en) * | 2013-08-30 | 2018-05-09 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6355022B2 (en) * | 2013-08-30 | 2018-07-11 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6319566B2 (en) * | 2014-05-16 | 2018-05-09 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6319567B2 (en) * | 2014-05-16 | 2018-05-09 | 三菱マテリアル株式会社 | Metal nitride material for thermistor, manufacturing method thereof, and film type thermistor sensor |
JP6460376B2 (en) * | 2014-08-29 | 2019-01-30 | 三菱マテリアル株式会社 | Temperature sensor and manufacturing method thereof |
WO2017047512A1 (en) * | 2015-09-16 | 2017-03-23 | Semitec株式会社 | Resistor and temperature sensor |
JP2017134024A (en) * | 2016-01-29 | 2017-08-03 | 三菱マテリアル株式会社 | Temperature sensor |
JP6819872B2 (en) * | 2017-03-23 | 2021-01-27 | 三菱マテリアル株式会社 | Thermistor and its manufacturing method and thermistor sensor |
JP7234573B2 (en) | 2017-12-25 | 2023-03-08 | 三菱マテリアル株式会社 | THERMISTOR AND MANUFACTURING METHOD THEREOF AND THERMISTOR SENSOR |
WO2019131570A1 (en) | 2017-12-25 | 2019-07-04 | 三菱マテリアル株式会社 | Thermistor, method for manufacturing same, and thermistor sensor |
JP2019129185A (en) | 2018-01-22 | 2019-08-01 | 三菱マテリアル株式会社 | Thermistor, method for manufacturing the same, and thermistor sensor |
EP3854765A4 (en) | 2018-12-28 | 2022-07-13 | Murata Manufacturing Co., Ltd. | Composite, and structure and thermistor using same |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5142748B1 (en) * | 1970-12-22 | 1976-11-17 | ||
JPS5110360B1 (en) * | 1970-12-25 | 1976-04-03 | ||
JPS5110360A (en) * | 1974-07-02 | 1976-01-27 | Fujitsu Ltd | MAGUNETSUTO |
DE3207979A1 (en) * | 1982-03-05 | 1983-09-08 | Ernst Prof. Dr.-Ing. 7000 Stuttgart Lüder | Thin-film resistance thermometer |
JP2579470B2 (en) * | 1986-10-14 | 1997-02-05 | 株式会社富士通ゼネラル | Method of manufacturing nitride thin film resistor |
US5330853A (en) * | 1991-03-16 | 1994-07-19 | Leybold Ag | Multilayer Ti-Al-N coating for tools |
JPH0590011A (en) * | 1991-09-26 | 1993-04-09 | Anritsu Corp | Thermosensitive resistor and its manufacture |
JPH06158272A (en) * | 1992-11-17 | 1994-06-07 | Ulvac Japan Ltd | Resistance film and production thereof |
JP2003226573A (en) | 2002-02-01 | 2003-08-12 | Mitsubishi Materials Corp | Composite ceramic material and lc composite part |
SE523826C2 (en) * | 2002-03-20 | 2004-05-25 | Seco Tools Ab | Cutter coated with TiAIN for high speed machining of alloy steels, ways of making a cutter and use of the cutter |
AU2003227598A1 (en) * | 2002-04-11 | 2003-10-20 | Cemecon Ag | Coated bodies and a method for coating a body |
JP3862080B2 (en) * | 2002-11-01 | 2006-12-27 | 防衛庁技術研究本部長 | Method for manufacturing thermal infrared detector |
JP4436064B2 (en) * | 2003-04-16 | 2010-03-24 | 大阪府 | Thermistor material and manufacturing method thereof |
JP2006324520A (en) | 2005-05-19 | 2006-11-30 | Mitsubishi Materials Corp | Thermistor thin film and its manufacturing method |
US8277958B2 (en) * | 2009-10-02 | 2012-10-02 | Kennametal Inc. | Aluminum titanium nitride coating and method of making same |
-
2012
- 2012-02-28 JP JP2012041966A patent/JP5477670B2/en active Active
-
2013
- 2013-02-26 IN IN7102DEN2014 patent/IN2014DN07102A/en unknown
- 2013-02-26 WO PCT/JP2013/055769 patent/WO2013129680A1/en active Application Filing
- 2013-02-26 EP EP13754162.9A patent/EP2822001B1/en active Active
- 2013-02-26 US US14/380,997 patent/US9905341B2/en active Active
- 2013-02-26 CN CN201380004634.8A patent/CN104025211B/en active Active
- 2013-02-26 KR KR1020147022802A patent/KR101872063B1/en active IP Right Grant
- 2013-02-27 TW TW102106961A patent/TWI552173B/en active
Also Published As
Publication number | Publication date |
---|---|
US20150036723A1 (en) | 2015-02-05 |
CN104025211B (en) | 2016-11-09 |
EP2822001B1 (en) | 2017-03-29 |
US9905341B2 (en) | 2018-02-27 |
CN104025211A (en) | 2014-09-03 |
TWI552173B (en) | 2016-10-01 |
EP2822001A4 (en) | 2016-02-10 |
JP2013179161A (en) | 2013-09-09 |
JP5477670B2 (en) | 2014-04-23 |
KR20140136434A (en) | 2014-11-28 |
EP2822001A1 (en) | 2015-01-07 |
KR101872063B1 (en) | 2018-06-27 |
TW201351450A (en) | 2013-12-16 |
WO2013129680A1 (en) | 2013-09-06 |
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