IN2014CN04975A - - Google Patents
Info
- Publication number
- IN2014CN04975A IN2014CN04975A IN4975CHN2014A IN2014CN04975A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A IN 4975CHN2014 A IN4975CHN2014 A IN 4975CHN2014A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A
- Authority
- IN
- India
- Prior art keywords
- substrate
- cavity
- trenches
- cell
- cmut cell
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161577704P | 2011-12-20 | 2011-12-20 | |
PCT/IB2012/057273 WO2013093728A1 (fr) | 2011-12-20 | 2012-12-13 | Dispositif transducteur d'ultrasons et procédé de fabrication de ce dispositif |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014CN04975A true IN2014CN04975A (fr) | 2015-09-18 |
Family
ID=47631486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN4975CHN2014 IN2014CN04975A (fr) | 2011-12-20 | 2012-12-13 |
Country Status (8)
Country | Link |
---|---|
US (2) | US9802224B2 (fr) |
EP (1) | EP2750806B1 (fr) |
JP (1) | JP6069798B2 (fr) |
CN (1) | CN104023860B (fr) |
BR (1) | BR112014014911A2 (fr) |
IN (1) | IN2014CN04975A (fr) |
RU (1) | RU2607720C2 (fr) |
WO (1) | WO2013093728A1 (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102440005B (zh) * | 2009-05-25 | 2014-09-24 | 株式会社日立医疗器械 | 超声波换能器及利用该超声波换能器的超声波诊断装置 |
JP6210992B2 (ja) * | 2011-10-28 | 2017-10-11 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 応力層を持つ事前圧壊容量マイクロマシン・トランスデューサセル |
RU2607720C2 (ru) * | 2011-12-20 | 2017-01-10 | Конинклейке Филипс Н.В. | Устройство ультразвукового преобразователя и способ его изготовления |
US9259206B2 (en) * | 2013-02-20 | 2016-02-16 | Georgia Tech Research Corporation | CMUT-on-CMOS based guidewire intravascular imaging |
US9351081B2 (en) * | 2013-02-27 | 2016-05-24 | Texas Instruments Incorporated | Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug |
CN106999163B (zh) * | 2014-12-11 | 2021-01-26 | 皇家飞利浦有限公司 | 具有交错列的微加工超声换能器的导管换能器 |
JP6932085B2 (ja) | 2015-07-02 | 2021-09-08 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | マルチモード容量性マイクロマシン超音波トランスデューサ並びに関連するデバイス、システム及び方法 |
WO2017216139A1 (fr) | 2016-06-13 | 2017-12-21 | Koninklijke Philips N.V. | Transducteur à ultrasons à large bande |
US20180180724A1 (en) * | 2016-12-26 | 2018-06-28 | Nxp Usa, Inc. | Ultrasonic transducer integrated with supporting electronics |
JP7145892B2 (ja) * | 2017-06-30 | 2022-10-03 | コーニンクレッカ フィリップス エヌ ヴェ | 複数の離間されたセグメントに分離された基板を有する腔内超音波撮像装置、溝を有する腔内超音波撮像装置、及び製造する方法 |
JP7180129B2 (ja) * | 2018-06-06 | 2022-11-30 | セイコーエプソン株式会社 | 超音波装置および電子機器 |
CN109759306B (zh) * | 2019-02-03 | 2020-11-13 | 中国科学院微电子研究所 | 超声换能器阵列结构及其制备方法 |
DE102019214261B3 (de) * | 2019-09-19 | 2020-08-20 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System |
EP3909692A1 (fr) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | Transducteur à ultrasons et réseau de transducteurs à ultrasons en mosaïque |
EP3909691A1 (fr) * | 2020-05-14 | 2021-11-17 | Koninklijke Philips N.V. | Transducteur à ultrasons et réseau en mosaïque de transducteurs à ultrasons |
DE102022122821A1 (de) | 2022-09-08 | 2024-03-14 | Infineon Technologies Ag | Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2117415C1 (ru) * | 1994-05-31 | 1998-08-10 | Шанаурин Александр Михайлович | Электростатический конденсаторный преобразователь |
JP4723732B2 (ja) * | 2000-07-12 | 2011-07-13 | セイコーインスツル株式会社 | 脈検出装置及び超音波診断装置 |
US6669644B2 (en) * | 2001-07-31 | 2003-12-30 | Koninklijke Philips Electronics N.V. | Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy |
US6659954B2 (en) * | 2001-12-19 | 2003-12-09 | Koninklijke Philips Electronics Nv | Micromachined ultrasound transducer and method for fabricating same |
US7303530B2 (en) * | 2003-05-22 | 2007-12-04 | Siemens Medical Solutions Usa, Inc. | Transducer arrays with an integrated sensor and methods of use |
JP4123192B2 (ja) * | 2004-06-03 | 2008-07-23 | セイコーエプソン株式会社 | 超音波トランスデューサ、および超音波トランスデューサの製造方法 |
US7037746B1 (en) * | 2004-12-27 | 2006-05-02 | General Electric Company | Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane |
ITRM20050093A1 (it) * | 2005-03-04 | 2006-09-05 | Consiglio Nazionale Ricerche | Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato. |
EP1890606A1 (fr) * | 2005-04-25 | 2008-02-27 | Koninklijke Philips Electronics N.V. | Procede et appareil d'imagerie en continu au moyen d'un systeme de transducteur a ultrasons |
US7615834B2 (en) * | 2006-02-28 | 2009-11-10 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
JP4804961B2 (ja) * | 2006-03-03 | 2011-11-02 | オリンパスメディカルシステムズ株式会社 | 超音波振動子及びそれを搭載した体腔内超音波診断装置 |
US7741686B2 (en) * | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
JP4800170B2 (ja) * | 2006-10-05 | 2011-10-26 | 株式会社日立製作所 | 超音波トランスデューサおよびその製造方法 |
JP4885779B2 (ja) * | 2007-03-29 | 2012-02-29 | オリンパスメディカルシステムズ株式会社 | 静電容量型トランスデューサ装置及び体腔内超音波診断システム |
US8641628B2 (en) * | 2007-09-26 | 2014-02-04 | Siemens Medical Solutions Usa, Inc. | Aperture synthesis using cMUTs |
US7843022B2 (en) * | 2007-10-18 | 2010-11-30 | The Board Of Trustees Of The Leland Stanford Junior University | High-temperature electrostatic transducers and fabrication method |
RU2511671C2 (ru) * | 2008-09-16 | 2014-04-10 | Конинклейке Филипс Электроникс Н.В. | Емкостной микрообработанный ультразвуковой преобразователь |
US20100173437A1 (en) * | 2008-10-21 | 2010-07-08 | Wygant Ira O | Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound |
JP5495918B2 (ja) * | 2009-07-24 | 2014-05-21 | キヤノン株式会社 | 電気機械変換装置、及び電気機械変換装置の作製方法 |
KR101593994B1 (ko) * | 2009-09-04 | 2016-02-16 | 삼성전자주식회사 | 고출력 초음파 트랜스듀서 |
EP2455133A1 (fr) * | 2010-11-18 | 2012-05-23 | Koninklijke Philips Electronics N.V. | Cathéter doté de transducteurs ultrasonores capacitifs micro-usinés dotés d'une mise au point réglable |
EP2688686B1 (fr) * | 2011-03-22 | 2022-08-17 | Koninklijke Philips N.V. | Cmut ultrasonore sans couplage acoustique avec le substrat |
RU2603435C2 (ru) * | 2011-10-17 | 2016-11-27 | Конинклейке Филипс Н.В. | Устройство с переходными отверстиями в подложке и способ его производства |
JP6210992B2 (ja) * | 2011-10-28 | 2017-10-11 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 応力層を持つ事前圧壊容量マイクロマシン・トランスデューサセル |
EP2747904B1 (fr) * | 2011-10-28 | 2020-04-08 | Koninklijke Philips N.V. | Cellule de transducteur micro-usinée capacitive préaffaissée comportant un bouchon |
RU2607720C2 (ru) * | 2011-12-20 | 2017-01-10 | Конинклейке Филипс Н.В. | Устройство ультразвукового преобразователя и способ его изготовления |
EP2806982B1 (fr) * | 2012-01-27 | 2020-03-11 | Koninklijke Philips N.V. | Transducteur capacitif micro-usiné et son procédé de fabrication |
US9607606B2 (en) * | 2012-11-20 | 2017-03-28 | Koninkijke Philips N.V. | Capacitive micro-machined transducer and method of manufacturing the same |
-
2012
- 2012-12-13 RU RU2014129830A patent/RU2607720C2/ru active
- 2012-12-13 EP EP12821050.7A patent/EP2750806B1/fr active Active
- 2012-12-13 JP JP2014548280A patent/JP6069798B2/ja active Active
- 2012-12-13 CN CN201280063552.6A patent/CN104023860B/zh active Active
- 2012-12-13 IN IN4975CHN2014 patent/IN2014CN04975A/en unknown
- 2012-12-13 US US14/365,647 patent/US9802224B2/en active Active
- 2012-12-13 BR BR112014014911A patent/BR112014014911A2/pt not_active Application Discontinuation
- 2012-12-13 WO PCT/IB2012/057273 patent/WO2013093728A1/fr active Application Filing
-
2017
- 2017-10-11 US US15/729,699 patent/US10835922B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
RU2014129830A (ru) | 2016-02-10 |
BR112014014911A2 (pt) | 2017-06-13 |
JP2015509304A (ja) | 2015-03-26 |
US9802224B2 (en) | 2017-10-31 |
US20180029077A1 (en) | 2018-02-01 |
CN104023860B (zh) | 2016-06-15 |
US10835922B2 (en) | 2020-11-17 |
EP2750806A1 (fr) | 2014-07-09 |
CN104023860A (zh) | 2014-09-03 |
RU2607720C2 (ru) | 2017-01-10 |
US20140307528A1 (en) | 2014-10-16 |
JP6069798B2 (ja) | 2017-02-01 |
EP2750806B1 (fr) | 2019-05-08 |
WO2013093728A1 (fr) | 2013-06-27 |
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