IN2014CN00877A - - Google Patents
Info
- Publication number
- IN2014CN00877A IN2014CN00877A IN877CHN2014A IN2014CN00877A IN 2014CN00877 A IN2014CN00877 A IN 2014CN00877A IN 877CHN2014 A IN877CHN2014 A IN 877CHN2014A IN 2014CN00877 A IN2014CN00877 A IN 2014CN00877A
- Authority
- IN
- India
- Prior art keywords
- treating
- composition
- silicon substrates
- nxn
- alkaline
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 239000000203 mixture Substances 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 abstract 1
- 239000002253 acid Substances 0.000 abstract 1
- 150000007513 acids Chemical class 0.000 abstract 1
- 125000001931 aliphatic group Chemical group 0.000 abstract 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 abstract 1
- 150000001342 alkaline earth metals Chemical class 0.000 abstract 1
- 125000002877 alkyl aryl group Chemical group 0.000 abstract 1
- 239000000908 ammonium hydroxide Substances 0.000 abstract 1
- 239000007853 buffer solution Substances 0.000 abstract 1
- 230000005611 electricity Effects 0.000 abstract 1
- 230000005670 electromagnetic radiation Effects 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 125000001453 quaternary ammonium group Chemical group 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/04—Aqueous dispersions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/34—Organic compounds containing sulfur
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
1333 n3n3 n22nn+An aqueous alkaline composition for treating the surface of silicon substrates the said composition comprising: (A) a quaternary ammonium hydroxide; and (B) a component selected from the group consisting of water soluble acids and their water soluble salts of the general formulas (I) to (V): (R S0 )nXn+ (I) R P02 (Xn+) (II); (RO S03 )nXn+ (III) RO P02 (X+) (IV) and [(RO)P0 ] X (V); wherein the n = 1 or 2; X is hydrogen ammonium or alkaline or alkaline earth metal; the variable R1 is an olefinically unsaturated aliphatic or cycloaliphatic moiety and R is R1 or an alkylaryl moiety; and (C) a buffer system wherein at least one component other than water is volatile; the use of the composition for treating silicon substrates a method for treating the surface of silicon substrates and methods for manufacturing devices generating electricity upon the exposure to electromagnetic radiation.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161521386P | 2011-08-09 | 2011-08-09 | |
PCT/IB2012/053576 WO2013021296A1 (en) | 2011-08-09 | 2012-07-12 | Aqueous alkaline compositions and method for treating the surface of silicon substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
IN2014CN00877A true IN2014CN00877A (en) | 2015-04-03 |
Family
ID=47667939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IN877CHN2014 IN2014CN00877A (en) | 2011-08-09 | 2012-07-12 |
Country Status (9)
Country | Link |
---|---|
US (1) | US20140134778A1 (en) |
JP (1) | JP2014529641A (en) |
KR (1) | KR101922855B1 (en) |
CN (1) | CN103717687B (en) |
IN (1) | IN2014CN00877A (en) |
MY (1) | MY167595A (en) |
SG (1) | SG10201605697UA (en) |
TW (1) | TWI564386B (en) |
WO (1) | WO2013021296A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6462572B2 (en) | 2013-09-05 | 2019-01-30 | 小林 光 | Hydrogen production apparatus, hydrogen production method, silicon fine particles for hydrogen production, and method for producing silicon fine particles for hydrogen production |
CN110225667B (en) * | 2013-09-11 | 2023-01-10 | 花王株式会社 | Detergent composition for resin mask layer and method for manufacturing circuit board |
US11271129B2 (en) * | 2016-11-03 | 2022-03-08 | Total Marketing Services | Surface treatment of solar cells |
US10934485B2 (en) | 2017-08-25 | 2021-03-02 | Versum Materials Us, Llc | Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device |
CN108550639B (en) * | 2018-03-21 | 2020-08-21 | 台州市棱智塑业有限公司 | Silicon heterojunction solar cell interface treating agent and treating method |
KR102624328B1 (en) * | 2018-10-31 | 2024-01-15 | 상라오 신위안 웨동 테크놀러지 디벨롭먼트 컴퍼니, 리미티드 | Solar cell module |
SG11202103910PA (en) | 2018-11-15 | 2021-05-28 | Entegris Inc | Silicon nitride etching composition and method |
CN109609290B (en) * | 2018-12-13 | 2021-04-09 | 蓝思科技(长沙)有限公司 | Cleaning agent and cleaning method for polished glass |
TW202037706A (en) * | 2019-02-13 | 2020-10-16 | 日商德山股份有限公司 | Semiconductor wafer treatment liquid containing hypochlorite ions and ph buffer |
WO2020195343A1 (en) * | 2019-03-26 | 2020-10-01 | 富士フイルムエレクトロニクスマテリアルズ株式会社 | Cleaning liquid |
CN110473936A (en) * | 2019-07-26 | 2019-11-19 | 镇江仁德新能源科技有限公司 | A kind of black silicon etching method of single side wet process |
CN114651317A (en) * | 2019-09-10 | 2022-06-21 | 富士胶片电子材料美国有限公司 | Etching composition |
CN112745990B (en) * | 2019-10-30 | 2022-06-03 | 洛阳阿特斯光伏科技有限公司 | Non-phosphorus two-component cleaning agent and preparation method and application thereof |
KR20210119164A (en) | 2020-03-24 | 2021-10-05 | 동우 화인켐 주식회사 | A crystalline silicon ethant compositon, and a pattern formation method |
CN112680229A (en) * | 2021-01-29 | 2021-04-20 | 深圳市百通达科技有限公司 | Silicon-based material etching solution for wet electron chemistry and preparation method thereof |
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US5466389A (en) * | 1994-04-20 | 1995-11-14 | J. T. Baker Inc. | PH adjusted nonionic surfactant-containing alkaline cleaner composition for cleaning microelectronics substrates |
US5989353A (en) * | 1996-10-11 | 1999-11-23 | Mallinckrodt Baker, Inc. | Cleaning wafer substrates of metal contamination while maintaining wafer smoothness |
JP2000208466A (en) * | 1999-01-12 | 2000-07-28 | Dainippon Screen Mfg Co Ltd | Method and apparatus for treating substrate |
JP4206233B2 (en) * | 2002-07-22 | 2009-01-07 | 旭硝子株式会社 | Abrasive and polishing method |
US20040077295A1 (en) * | 2002-08-05 | 2004-04-22 | Hellring Stuart D. | Process for reducing dishing and erosion during chemical mechanical planarization |
JP2005268665A (en) * | 2004-03-19 | 2005-09-29 | Fujimi Inc | Polishing composition |
DE602005000732T2 (en) * | 2004-06-25 | 2007-12-06 | Jsr Corp. | Cleaning composition for semiconductor component and method for producing a semiconductor device |
JP2008536312A (en) * | 2005-04-08 | 2008-09-04 | サッチェム, インコーポレイテッド | Selective wet etching of metal nitride |
JP2009503910A (en) * | 2005-08-05 | 2009-01-29 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | High-throughput chemical mechanical polishing composition for metal film planarization |
KR100786949B1 (en) * | 2005-12-08 | 2007-12-17 | 주식회사 엘지화학 | Adjuvant capable of controlling a polishing selectivity and chemical mechanical polishing slurry comprising the same |
JP2007180451A (en) * | 2005-12-28 | 2007-07-12 | Fujifilm Corp | Chemical mechanical planarizing method |
US8685909B2 (en) * | 2006-09-21 | 2014-04-01 | Advanced Technology Materials, Inc. | Antioxidants for post-CMP cleaning formulations |
JP2008124222A (en) * | 2006-11-10 | 2008-05-29 | Fujifilm Corp | Polishing solution |
JP2010512657A (en) * | 2006-12-22 | 2010-04-22 | テクノ セミケム シーオー., エルティーディー. | Copper chemical mechanical polishing composition containing zeolite |
JP2008181955A (en) * | 2007-01-23 | 2008-08-07 | Fujifilm Corp | Polishing liquid for metal and polishing method using the same |
JP2008277723A (en) * | 2007-03-30 | 2008-11-13 | Fujifilm Corp | Metal-polishing liquid and polishing method |
EP2149148A1 (en) * | 2007-05-14 | 2010-02-03 | Basf Se | Method for removing etching residues from semiconductor components |
CN101720352B (en) * | 2007-05-17 | 2015-11-25 | 安格斯公司 | For removing the new antioxidant of formula after CPM |
AU2008296423B2 (en) * | 2007-08-31 | 2011-12-08 | Jh Biotech, Inc. | Preparation of fatty acids in solid form |
KR20100082012A (en) * | 2007-11-16 | 2010-07-15 | 이케이씨 테크놀로지, 인코포레이티드 | Compositions for removal of metal hard mask etching residues from a semiconductor substrate |
KR101094662B1 (en) * | 2008-07-24 | 2011-12-20 | 솔브레인 주식회사 | Chemical mechanical polishing composition including a stopping agent of poly-silicon polishing |
JP5553985B2 (en) * | 2008-12-11 | 2014-07-23 | 三洋化成工業株式会社 | Electronic material cleaner |
US8361237B2 (en) * | 2008-12-17 | 2013-01-29 | Air Products And Chemicals, Inc. | Wet clean compositions for CoWP and porous dielectrics |
TWI583786B (en) * | 2010-01-29 | 2017-05-21 | 恩特葛瑞斯股份有限公司 | Cleaning agent for semiconductor provided with metal wiring |
KR101894603B1 (en) * | 2010-06-09 | 2018-09-03 | 바스프 에스이 | Aqueous alkaline etching and cleaning composition and method for treating the surface of silicon substrates |
EP2460860A1 (en) * | 2010-12-02 | 2012-06-06 | Basf Se | Use of mixtures for removing polyurethanes from metal surfaces |
-
2012
- 2012-07-12 JP JP2014524461A patent/JP2014529641A/en active Pending
- 2012-07-12 SG SG10201605697UA patent/SG10201605697UA/en unknown
- 2012-07-12 KR KR1020147003265A patent/KR101922855B1/en active IP Right Grant
- 2012-07-12 CN CN201280038487.1A patent/CN103717687B/en not_active Expired - Fee Related
- 2012-07-12 US US14/131,304 patent/US20140134778A1/en not_active Abandoned
- 2012-07-12 WO PCT/IB2012/053576 patent/WO2013021296A1/en active Application Filing
- 2012-07-12 MY MYPI2013004626A patent/MY167595A/en unknown
- 2012-07-12 IN IN877CHN2014 patent/IN2014CN00877A/en unknown
- 2012-08-09 TW TW101128828A patent/TWI564386B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR101922855B1 (en) | 2019-02-27 |
US20140134778A1 (en) | 2014-05-15 |
MY167595A (en) | 2018-09-20 |
TWI564386B (en) | 2017-01-01 |
CN103717687B (en) | 2016-05-18 |
JP2014529641A (en) | 2014-11-13 |
SG10201605697UA (en) | 2016-09-29 |
CN103717687A (en) | 2014-04-09 |
WO2013021296A1 (en) | 2013-02-14 |
TW201313894A (en) | 2013-04-01 |
KR20140057259A (en) | 2014-05-12 |
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