IL83317A - Chemical vapor deposition apparatus - Google Patents
Chemical vapor deposition apparatusInfo
- Publication number
- IL83317A IL83317A IL8331784A IL8331784A IL83317A IL 83317 A IL83317 A IL 83317A IL 8331784 A IL8331784 A IL 8331784A IL 8331784 A IL8331784 A IL 8331784A IL 83317 A IL83317 A IL 83317A
- Authority
- IL
- Israel
- Prior art keywords
- vapor deposition
- chemical vapor
- deposition apparatus
- chemical
- vapor
- Prior art date
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/528,193 US4539933A (en) | 1983-08-31 | 1983-08-31 | Chemical vapor deposition apparatus |
IL72796A IL72796A (en) | 1983-08-31 | 1984-08-29 | Chemical vapor deposition apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
IL83317A true IL83317A (en) | 1988-04-29 |
Family
ID=26321335
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL8331584A IL83315A (en) | 1983-08-31 | 1984-08-29 | Quartz vacuum chamber base for a chemical vapor deposition apparatus |
IL8331784A IL83317A (en) | 1983-08-31 | 1984-08-29 | Chemical vapor deposition apparatus |
IL8331684A IL83316A (en) | 1983-08-31 | 1984-08-29 | Chemical vapor deposition apparatus |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL8331584A IL83315A (en) | 1983-08-31 | 1984-08-29 | Quartz vacuum chamber base for a chemical vapor deposition apparatus |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL8331684A IL83316A (en) | 1983-08-31 | 1984-08-29 | Chemical vapor deposition apparatus |
Country Status (1)
Country | Link |
---|---|
IL (3) | IL83315A (en) |
-
1984
- 1984-08-29 IL IL8331584A patent/IL83315A/en unknown
- 1984-08-29 IL IL8331784A patent/IL83317A/en unknown
- 1984-08-29 IL IL8331684A patent/IL83316A/en unknown
Also Published As
Publication number | Publication date |
---|---|
IL83316A (en) | 1988-04-29 |
IL83315A (en) | 1988-04-29 |
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