IL83316A - Chemical vapor deposition apparatus - Google Patents

Chemical vapor deposition apparatus

Info

Publication number
IL83316A
IL83316A IL8331684A IL8331684A IL83316A IL 83316 A IL83316 A IL 83316A IL 8331684 A IL8331684 A IL 8331684A IL 8331684 A IL8331684 A IL 8331684A IL 83316 A IL83316 A IL 83316A
Authority
IL
Israel
Prior art keywords
vapor deposition
chemical vapor
deposition apparatus
chemical
vapor
Prior art date
Application number
IL8331684A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/528,193 external-priority patent/US4539933A/en
Application filed by Anicon Inc filed Critical Anicon Inc
Publication of IL83316A publication Critical patent/IL83316A/en

Links

IL8331684A 1983-08-31 1984-08-29 Chemical vapor deposition apparatus IL83316A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/528,193 US4539933A (en) 1983-08-31 1983-08-31 Chemical vapor deposition apparatus
IL72796A IL72796A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus

Publications (1)

Publication Number Publication Date
IL83316A true IL83316A (en) 1988-04-29

Family

ID=26321335

Family Applications (3)

Application Number Title Priority Date Filing Date
IL8331684A IL83316A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus
IL8331584A IL83315A (en) 1983-08-31 1984-08-29 Quartz vacuum chamber base for a chemical vapor deposition apparatus
IL8331784A IL83317A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus

Family Applications After (2)

Application Number Title Priority Date Filing Date
IL8331584A IL83315A (en) 1983-08-31 1984-08-29 Quartz vacuum chamber base for a chemical vapor deposition apparatus
IL8331784A IL83317A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus

Country Status (1)

Country Link
IL (3) IL83316A (en)

Also Published As

Publication number Publication date
IL83315A (en) 1988-04-29
IL83317A (en) 1988-04-29

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