IL83316A0 - Chemical vapor deposition apparatus - Google Patents

Chemical vapor deposition apparatus

Info

Publication number
IL83316A0
IL83316A0 IL83316A IL8331687A IL83316A0 IL 83316 A0 IL83316 A0 IL 83316A0 IL 83316 A IL83316 A IL 83316A IL 8331687 A IL8331687 A IL 8331687A IL 83316 A0 IL83316 A0 IL 83316A0
Authority
IL
Israel
Prior art keywords
vapor deposition
chemical vapor
deposition apparatus
chemical
vapor
Prior art date
Application number
IL83316A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/528,193 external-priority patent/US4539933A/en
Application filed by Anicon Inc filed Critical Anicon Inc
Priority to IL83316A priority Critical patent/IL83316A0/en
Publication of IL83316A0 publication Critical patent/IL83316A0/en

Links

IL83316A 1983-08-31 1987-07-24 Chemical vapor deposition apparatus IL83316A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL83316A IL83316A0 (en) 1983-08-31 1987-07-24 Chemical vapor deposition apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/528,193 US4539933A (en) 1983-08-31 1983-08-31 Chemical vapor deposition apparatus
IL72796A IL72796A (en) 1983-08-31 1984-08-29 Chemical vapor deposition apparatus
IL83316A IL83316A0 (en) 1983-08-31 1987-07-24 Chemical vapor deposition apparatus

Publications (1)

Publication Number Publication Date
IL83316A0 true IL83316A0 (en) 1987-12-31

Family

ID=27271052

Family Applications (1)

Application Number Title Priority Date Filing Date
IL83316A IL83316A0 (en) 1983-08-31 1987-07-24 Chemical vapor deposition apparatus

Country Status (1)

Country Link
IL (1) IL83316A0 (en)

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