IL83315A - Quartz vacuum chamber base for a chemical vapor deposition apparatus
- Google Patents
Quartz vacuum chamber base for a chemical vapor deposition apparatus
Info
Publication number
IL83315A
IL83315AIL8331584AIL8331584AIL83315AIL 83315 AIL83315 AIL 83315AIL 8331584 AIL8331584 AIL 8331584AIL 8331584 AIL8331584 AIL 8331584AIL 83315 AIL83315 AIL 83315A
Authority
IL
Israel
Prior art keywords
vapor deposition
vacuum chamber
chemical vapor
deposition apparatus
chamber base
Prior art date
Application number
IL8331584A
Original Assignee
Anicon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/528,193external-prioritypatent/US4539933A/en
Application filed by Anicon IncfiledCriticalAnicon Inc
Publication of IL83315ApublicationCriticalpatent/IL83315A/en