IL71088A - Reduced vacuum cryopump - Google Patents

Reduced vacuum cryopump

Info

Publication number
IL71088A
IL71088A IL71088A IL7108884A IL71088A IL 71088 A IL71088 A IL 71088A IL 71088 A IL71088 A IL 71088A IL 7108884 A IL7108884 A IL 7108884A IL 71088 A IL71088 A IL 71088A
Authority
IL
Israel
Prior art keywords
reduced vacuum
vacuum cryopump
cryopump
reduced
vacuum
Prior art date
Application number
IL71088A
Other languages
English (en)
Other versions
IL71088A0 (en
Original Assignee
Helix Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23869570&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL71088(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Tech Corp filed Critical Helix Tech Corp
Publication of IL71088A0 publication Critical patent/IL71088A0/xx
Publication of IL71088A publication Critical patent/IL71088A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IL71088A 1983-02-28 1984-02-27 Reduced vacuum cryopump IL71088A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/470,914 US4449373A (en) 1983-02-28 1983-02-28 Reduced vacuum cryopump

Publications (2)

Publication Number Publication Date
IL71088A0 IL71088A0 (en) 1984-05-31
IL71088A true IL71088A (en) 1987-07-31

Family

ID=23869570

Family Applications (1)

Application Number Title Priority Date Filing Date
IL71088A IL71088A (en) 1983-02-28 1984-02-27 Reduced vacuum cryopump

Country Status (5)

Country Link
US (1) US4449373A (xx)
EP (1) EP0117523B2 (xx)
JP (1) JPS59218371A (xx)
DE (1) DE3471347D1 (xx)
IL (1) IL71088A (xx)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8400349D0 (en) * 1984-01-07 1984-02-08 Boc Group Plc Cryogenic pumps
US4611467A (en) * 1985-06-10 1986-09-16 Helix Technology Corporation Method and apparatus for throttling gas flow to a cryopump
US4966016A (en) * 1987-01-27 1990-10-30 Bartlett Allen J Cryopump with multiple refrigerators
US4838035A (en) * 1988-05-05 1989-06-13 The United States Of America As Represented By The United States Department Of Energy Continuous cryopump with a method for removal of solidified gases
US5156007A (en) * 1991-01-30 1992-10-20 Helix Technology Corporation Cryopump with improved second stage passageway
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
JPH10184541A (ja) * 1996-12-27 1998-07-14 Anelva Corp 真空排気装置
US5887438A (en) * 1997-08-20 1999-03-30 Helix Technology Corporation Low profile in line cryogenic water pump
US5901558A (en) * 1997-08-20 1999-05-11 Helix Technology Corporation Water pump with integral gate valve
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
EP1127954A1 (en) * 2000-02-24 2001-08-29 Applied Materials, Inc. Method and apparatus for shielding a device from a semiconductor wafer process chamber
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
JP5025492B2 (ja) * 2005-02-08 2012-09-12 住友重機械工業株式会社 改善されたクライオポンプ
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置
WO2012016192A2 (en) 2010-07-30 2012-02-02 Brooks Automation, Inc. Multi-refrigerator high speed cryopump
US9266039B2 (en) * 2010-11-24 2016-02-23 Brooks Automation, Inc. Cryopump with controlled hydrogen gas release
KR101986159B1 (ko) 2011-02-09 2019-06-05 브룩스 오토메이션, 인크. 극저온 펌프
JP5669659B2 (ja) * 2011-04-14 2015-02-12 住友重機械工業株式会社 クライオポンプ及び真空排気方法
US9186601B2 (en) 2012-04-20 2015-11-17 Sumitomo (Shi) Cryogenics Of America Inc. Cryopump drain and vent
JP6076843B2 (ja) 2013-06-14 2017-02-08 住友重機械工業株式会社 クライオポンプ
JP6338403B2 (ja) 2013-03-25 2018-06-06 住友重機械工業株式会社 クライオポンプ及び真空排気方法
US9336990B2 (en) * 2013-08-29 2016-05-10 Varian Semiconductor Equipment Associates, Inc. Semiconductor process pumping arrangements

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US4148196A (en) * 1977-04-25 1979-04-10 Sciex Inc. Multiple stage cryogenic pump and method of pumping
US4285710A (en) * 1978-09-18 1981-08-25 Varian Associates, Inc. Cryogenic device for restricting the pumping speed of selected gases
US4339927A (en) * 1981-07-06 1982-07-20 Oerlikon-Burhle U.S.A. Inc. Gas-driven fluid flow control valve and cryopump incorporating the same
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump

Also Published As

Publication number Publication date
EP0117523A3 (en) 1986-01-15
IL71088A0 (en) 1984-05-31
EP0117523B2 (en) 1996-02-07
US4449373A (en) 1984-05-22
EP0117523A2 (en) 1984-09-05
JPS59218371A (ja) 1984-12-08
DE3471347D1 (en) 1988-06-23
EP0117523B1 (en) 1988-05-18

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Legal Events

Date Code Title Description
MM9K Patent not in force due to non-payment of renewal fees