GB8415505D0 - Vacuum lock - Google Patents

Vacuum lock

Info

Publication number
GB8415505D0
GB8415505D0 GB848415505A GB8415505A GB8415505D0 GB 8415505 D0 GB8415505 D0 GB 8415505D0 GB 848415505 A GB848415505 A GB 848415505A GB 8415505 A GB8415505 A GB 8415505A GB 8415505 D0 GB8415505 D0 GB 8415505D0
Authority
GB
United Kingdom
Prior art keywords
vacuum lock
lock
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB848415505A
Other versions
GB2143910A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of GB8415505D0 publication Critical patent/GB8415505D0/en
Publication of GB2143910A publication Critical patent/GB2143910A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB08415505A 1983-07-21 1984-06-18 A vacuum lock Withdrawn GB2143910A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH399483 1983-07-21

Publications (2)

Publication Number Publication Date
GB8415505D0 true GB8415505D0 (en) 1984-07-25
GB2143910A GB2143910A (en) 1985-02-20

Family

ID=4267830

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08415505A Withdrawn GB2143910A (en) 1983-07-21 1984-06-18 A vacuum lock

Country Status (3)

Country Link
JP (1) JPS6026662A (en)
FR (1) FR2549452A1 (en)
GB (1) GB2143910A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0339132A3 (en) * 1988-02-24 1990-07-04 Balzers Aktiengesellschaft Apparatus for the storage of objects in a vacuum chamber
FR2697003B1 (en) * 1992-10-16 1994-11-18 Commissariat Energie Atomique System for handling and confining flat objects in individual boxes.
DE69205571T2 (en) * 1992-08-04 1996-06-13 Ibm Coupling systems under pressure for transferring a semiconductor wafer between a portable sealable container under pressure and a processing system.
DE19824040C1 (en) * 1998-05-29 1999-10-07 Angew Solarenergie Ase Gmbh Coating system especially for coating silicon wafers, particularly for plasma-enhanced CVD in solar cell production
DE19907601A1 (en) 1999-02-22 2000-08-31 Angew Solarenergie Ase Gmbh Method and arrangement for the continuous treatment of objects
DE10252543A1 (en) * 2002-11-08 2004-05-27 Applied Films Gmbh & Co. Kg Coating for a plastic substrate
DE102008007629A1 (en) 2008-02-04 2009-08-06 Krones Ag Lock device for loading and unloading of containers in and out of a vacuum treatment chamber
GB0819474D0 (en) * 2008-10-23 2008-12-03 P2I Ltd Plasma processing apparatus
US8852693B2 (en) 2011-05-19 2014-10-07 Liquipel Ip Llc Coated electronic devices and associated methods
EP2703302B1 (en) * 2012-08-30 2016-03-09 Zanichelli Meccanica S.p.A. Feeder for feeding lids in vacuum crimping machines
DE102020130209A1 (en) * 2020-11-16 2022-05-19 Applied Materials, Inc. Vacuum processing system, support structure and method for transporting a substrate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2106858A5 (en) * 1970-09-25 1972-05-05 Commissariat Energie Atomique
GB1565521A (en) * 1976-12-15 1980-04-23 Wentgate Eng Method of continuous transfer of work through a sealed chamber
FR2420401A1 (en) * 1978-03-20 1979-10-19 Wentgate Engineers 1976 Ltd Continuous feeding of workpieces through sealed chamber - esp. for electron beam welding, brazing, evapn., leak detection, and all other operations conducted in vacuo (DK 15.10.79)
GB1604556A (en) * 1978-05-31 1981-12-09 Wentgate Engs 1976 Ltd Apparatus for transferring work through a region of reduced pressure for the performance of an operation thereon
JPS5814337A (en) * 1981-07-17 1983-01-27 Pioneer Electronic Corp Continuous metallizing device for material to be treated such as disc

Also Published As

Publication number Publication date
GB2143910A (en) 1985-02-20
JPS6026662A (en) 1985-02-09
FR2549452A1 (en) 1985-01-25

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)