IL55324A - Apparatus and method for controlling pressure ratio in high vacuum vapor pumps - Google Patents

Apparatus and method for controlling pressure ratio in high vacuum vapor pumps

Info

Publication number
IL55324A
IL55324A IL55324A IL5532478A IL55324A IL 55324 A IL55324 A IL 55324A IL 55324 A IL55324 A IL 55324A IL 5532478 A IL5532478 A IL 5532478A IL 55324 A IL55324 A IL 55324A
Authority
IL
Israel
Prior art keywords
high vacuum
pressure ratio
vacuum vapor
controlling pressure
vapor pumps
Prior art date
Application number
IL55324A
Other languages
English (en)
Other versions
IL55324A0 (en
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of IL55324A0 publication Critical patent/IL55324A0/xx
Publication of IL55324A publication Critical patent/IL55324A/xx

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/66—Regulating electric power
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/08—Control

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Temperature (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Measuring Fluid Pressure (AREA)
IL55324A 1977-08-29 1978-08-09 Apparatus and method for controlling pressure ratio in high vacuum vapor pumps IL55324A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/828,835 US4191512A (en) 1977-08-29 1977-08-29 Apparatus and method for controlling pressure ratio in high vacuum vapor pumps

Publications (2)

Publication Number Publication Date
IL55324A0 IL55324A0 (en) 1978-10-31
IL55324A true IL55324A (en) 1982-01-31

Family

ID=25252866

Family Applications (1)

Application Number Title Priority Date Filing Date
IL55324A IL55324A (en) 1977-08-29 1978-08-09 Apparatus and method for controlling pressure ratio in high vacuum vapor pumps

Country Status (6)

Country Link
US (1) US4191512A (enrdf_load_stackoverflow)
JP (1) JPS5459610A (enrdf_load_stackoverflow)
DE (1) DE2837512A1 (enrdf_load_stackoverflow)
FR (1) FR2402091A1 (enrdf_load_stackoverflow)
GB (1) GB2005051B (enrdf_load_stackoverflow)
IL (1) IL55324A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4610603A (en) * 1981-07-06 1986-09-09 Torr Vacuum Products, Inc. Protective control system for diffusion pump
JPS6110999U (ja) * 1984-06-27 1986-01-22 株式会社 徳田製作所 油拡散真空ポンプ
US7003215B2 (en) * 2002-01-21 2006-02-21 Air Products And Chemicals, Inc. Vapor flow controller
US20030202874A1 (en) * 2002-04-29 2003-10-30 Marsbed Hablanian Methods and apparatus for controlling power in vapor jet vacuum pumps
CN102829004B (zh) * 2012-09-05 2016-09-07 常州大成绿色镀膜科技有限公司 一种防爆油扩散泵真空系统及其防爆控制方法
DE102014212644A1 (de) * 2014-06-30 2015-12-31 Oerlikon Leybold Vacuum Gmbh Diffusionspumpe

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US728616A (en) * 1902-09-29 1903-05-19 John Ernest Hardman Signal system.
US2518597A (en) * 1945-06-20 1950-08-15 Niagara Alkali Company Pumping apparatus
US2792484A (en) * 1951-12-19 1957-05-14 Gen Electric Temperature measuring and controlling apparatus
DE1035314B (de) * 1956-04-06 1958-07-31 Siemens Ag Diffusionspumpe mit regelbarer Sauggeschwindigkeit
US3168418A (en) * 1962-03-27 1965-02-02 Alloyd Electronics Device for monitoring and controlling evaporation rate in vacuum deposition
BE658703A (enrdf_load_stackoverflow) * 1964-01-24 1900-01-01
US3282330A (en) * 1964-11-04 1966-11-01 Nat Res Corp Diffusion pump safety control
US3275221A (en) * 1965-05-27 1966-09-27 Varian Associates Automatic high vacuum system
US3445859A (en) * 1965-07-01 1969-05-20 Dresser Ind Diffusion vacuum pump apparatus
US3495777A (en) * 1967-05-16 1970-02-17 Athena Controls Proportional temperature regulation system
NL6907810A (enrdf_load_stackoverflow) * 1968-05-31 1969-12-02
US3575766A (en) * 1968-10-29 1971-04-20 Reynolds Tobacco Co R Band sealer for cigarette or filter maker
US3553429A (en) * 1968-11-18 1971-01-05 Eastman Kodak Co Temperature control circuit
US3544236A (en) * 1969-03-17 1970-12-01 James L Brookmire Fluid flow control
US3859012A (en) * 1972-08-10 1975-01-07 Coulter Electronics Fluid ejecting mechanism
JPS5232449B2 (enrdf_load_stackoverflow) * 1973-03-19 1977-08-22
JPS5177910A (ja) * 1974-12-27 1976-07-06 Fujitsu Ltd Shinkusochinohaikiseigyohoho
US4024376A (en) * 1975-06-13 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Device for measuring the evaporation rate in vacuum evaporation processes
US3999190A (en) * 1975-10-22 1976-12-21 Burroughs Corporation Temperature control system for ink jet printer

Also Published As

Publication number Publication date
JPS6249480B2 (enrdf_load_stackoverflow) 1987-10-20
GB2005051B (en) 1982-03-31
US4191512A (en) 1980-03-04
IL55324A0 (en) 1978-10-31
DE2837512A1 (de) 1979-03-08
FR2402091B1 (enrdf_load_stackoverflow) 1983-11-04
FR2402091A1 (fr) 1979-03-30
JPS5459610A (en) 1979-05-14
GB2005051A (en) 1979-04-11

Similar Documents

Publication Publication Date Title
JPS5382587A (en) Vacuum packing method and apparatus
GB1541035A (en) Vacuum sputtering apparatus and method
DE3064623D1 (en) Ion source in a vacuum chamber and method for its operation
GB2001393B (en) Method and apparatus for the evacuation of a receptacle
GB1549042A (en) Method and apparatus for vacuum shaping an extensible sheet
GB1541039A (en) Method and apparatus for supplying background gas in a sputtering chamber
JPS5490205A (en) Operating method and apparatus for vacuum pipe still
CA1000670A (en) Receptacle evacuation apparatus and method
JPS53104967A (en) Apparatus for supplying and exhausting material in vacuum device
IL55324A (en) Apparatus and method for controlling pressure ratio in high vacuum vapor pumps
AU514235B2 (en) Method and device for controlling pump operation
JPS5420151A (en) High pressure cooking and canning apparatus
JPS54155291A (en) Method and apparatus for polymerizing under pressure
DE2861627D1 (en) Device and method for separating under high pressure
IL58527A0 (en) Process and apparatus for pumping gases
JPS5685463A (en) Method for continuously carrying out different treatment in same high pressure steamer
JPS54112285A (en) High pressure liquid treating method
JPS53142292A (en) Method and apparatus for transporting substance in vacuum room and gas
JPS5334464A (en) Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor
GB2058707B (en) Vacuum packing process and apparatus
IL50398A0 (en) Apparatus for treatment by vacuum and/or gas
GB1547472A (en) Process and aopparatus for vacuum packing
JPS54113480A (en) Pressure controlling apparatus in sterilizing apparatus
JPS5340274A (en) Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor
JPS5340273A (en) Apparatus for controlling vapour pressure in liquiddgrowth furnace for semiconductor