IL294983B2 - מקור אור פלזמה מאולץ לייזר ושיטה להצתת פלזמה - Google Patents

מקור אור פלזמה מאולץ לייזר ושיטה להצתת פלזמה

Info

Publication number
IL294983B2
IL294983B2 IL294983A IL29498322A IL294983B2 IL 294983 B2 IL294983 B2 IL 294983B2 IL 294983 A IL294983 A IL 294983A IL 29498322 A IL29498322 A IL 29498322A IL 294983 B2 IL294983 B2 IL 294983B2
Authority
IL
Israel
Prior art keywords
laser
plasma
light source
chamber
laser beam
Prior art date
Application number
IL294983A
Other languages
English (en)
Other versions
IL294983A (he
IL294983B1 (he
Inventor
Dmitry Borisovich Abramenko
Robert Rafilevich Gayasov
Vladimir Mikhailovich Krivtsun
Aleksandr Andreevich Lash
Yurii Borisovich Kiryukhin
Denis Alexandrovich Glushkov
Original Assignee
Rnd Isan Ltd
Isteq B V
Isteq Group Holding B V
Dmitry Borisovich Abramenko
Robert Rafilevich Gayasov
Vladimir Mikhailovich Krivtsun
Aleksandr Andreevich Lash
Yurii Borisovich Kiryukhin
Denis Alexandrovich Glushkov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2020109782A external-priority patent/RU2732999C1/ru
Priority claimed from US16/814,317 external-priority patent/US10770282B1/en
Application filed by Rnd Isan Ltd, Isteq B V, Isteq Group Holding B V, Dmitry Borisovich Abramenko, Robert Rafilevich Gayasov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash, Yurii Borisovich Kiryukhin, Denis Alexandrovich Glushkov filed Critical Rnd Isan Ltd
Publication of IL294983A publication Critical patent/IL294983A/he
Publication of IL294983B1 publication Critical patent/IL294983B1/he
Publication of IL294983B2 publication Critical patent/IL294983B2/he

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P9/00—Electric spark ignition control, not otherwise provided for
    • F02P9/002—Control of spark intensity, intensifying, lengthening, suppression
    • F02P9/007—Control of spark intensity, intensifying, lengthening, suppression by supplementary electrical discharge in the pre-ionised electrode interspace of the sparking plug, e.g. plasma jet ignition

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Lasers (AREA)
  • Plasma Technology (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Glass Compositions (AREA)
IL294983A 2020-03-05 2021-02-25 מקור אור פלזמה מאולץ לייזר ושיטה להצתת פלזמה IL294983B2 (he)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU2020109782A RU2732999C1 (ru) 2020-03-05 2020-03-05 Источник света с лазерной накачкой и способ зажигания плазмы
US16/814,317 US10770282B1 (en) 2020-03-10 2020-03-10 Laser-pumped plasma light source and plasma ignition method
PCT/RU2021/050049 WO2021177859A1 (en) 2020-03-05 2021-02-26 Laser-pumped plasma light source and plasma ignition method

Publications (3)

Publication Number Publication Date
IL294983A IL294983A (he) 2022-09-01
IL294983B1 IL294983B1 (he) 2025-05-01
IL294983B2 true IL294983B2 (he) 2025-09-01

Family

ID=75674911

Family Applications (1)

Application Number Title Priority Date Filing Date
IL294983A IL294983B2 (he) 2020-03-05 2021-02-25 מקור אור פלזמה מאולץ לייזר ושיטה להצתת פלזמה

Country Status (7)

Country Link
EP (1) EP4115441B1 (he)
JP (1) JP6885636B1 (he)
KR (1) KR102827289B1 (he)
CN (1) CN115210849B (he)
CA (1) CA3166712A1 (he)
IL (1) IL294983B2 (he)
WO (1) WO2021177859A1 (he)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230044314A (ko) * 2020-08-06 2023-04-03 아이에스티이큐 비.브이. 고휘도 레이저 펌핑 플라즈마 광원 및 수차 감소 방법
US12144072B2 (en) * 2022-03-29 2024-11-12 Hamamatsu Photonics K.K. All-optical laser-driven light source with electrodeless ignition
CN118039452B (zh) * 2024-02-05 2025-01-28 中国科学技术大学 一种台式化高亮度等离子体光源
CN120914601B (zh) * 2025-10-10 2025-12-16 深圳多咪巴科技有限公司 一种泵浦激光发射器、激光线路及激光机

Family Cites Families (18)

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JPS5417349A (en) 1977-07-11 1979-02-08 Mitsubishi Aluminium Aluminum alloy brazing material for brazing used for fluxxfree brazing in high vacuum or nonoxidizable atomosphere
DD243629A3 (de) 1983-11-01 1987-03-11 Walter Gaertner Strahlungsquelle fuer optische geraete, insbesondere fuer fotolithografische abbildungssysteme
JPH10221499A (ja) * 1997-02-07 1998-08-21 Hitachi Ltd レーザプラズマｘ線源およびそれを用いた半導体露光装置並びに半導体露光方法
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
RU2250530C2 (ru) * 2003-06-25 2005-04-20 Институт проблем механики Российской Академии наук Лазерно-плазменный источник ионов и излучения
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RU2539970C2 (ru) 2012-12-17 2015-01-27 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ генерации излучения
RU2534223C1 (ru) 2013-04-11 2014-11-27 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ генерации излучения
KR102088363B1 (ko) * 2013-12-05 2020-04-14 삼성전자주식회사 플라즈마 광원 장치 및 플라즈마 광 생성 방법
US9506871B1 (en) * 2014-05-25 2016-11-29 Kla-Tencor Corporation Pulsed laser induced plasma light source
KR102345537B1 (ko) * 2014-12-11 2021-12-30 삼성전자주식회사 플라즈마 광원, 및 그 광원을 포함하는 검사 장치
US10057973B2 (en) 2015-05-14 2018-08-21 Excelitas Technologies Corp. Electrodeless single low power CW laser driven plasma lamp
US10887974B2 (en) * 2015-06-22 2021-01-05 Kla Corporation High efficiency laser-sustained plasma light source
CN105134453B (zh) * 2015-08-24 2017-03-08 中国科学院半导体研究所 采用双模式激光气体击穿方式下的点火装置及方法
US10244613B2 (en) 2015-10-04 2019-03-26 Kla-Tencor Corporation System and method for electrodeless plasma ignition in laser-sustained plasma light source
KR20170045949A (ko) * 2015-10-20 2017-04-28 삼성전자주식회사 플라즈마 광원 장치 및 그 광원 장치를 구비한 광원 시스템
US9865447B2 (en) * 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
KR20190034018A (ko) * 2017-09-22 2019-04-01 삼성전자주식회사 레이저 유도 플라즈마(lip) 기반 원자발광 분광장치, 그 장치를 포함한 반도체 제조설비, 및 그 장치를 이용한 반도체 소자 제조방법

Also Published As

Publication number Publication date
KR102827289B1 (ko) 2025-06-30
WO2021177859A1 (en) 2021-09-10
CN115210849B (zh) 2025-06-24
IL294983A (he) 2022-09-01
JP6885636B1 (ja) 2021-06-16
IL294983B1 (he) 2025-05-01
EP4115441A1 (en) 2023-01-11
JP2021141037A (ja) 2021-09-16
EP4115441B1 (en) 2025-02-26
CN115210849A (zh) 2022-10-18
CA3166712A1 (en) 2021-09-10
KR20220133979A (ko) 2022-10-05

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