IL133749A0 - Acousto-optic modulator array with reduced rf crosstalk - Google Patents

Acousto-optic modulator array with reduced rf crosstalk

Info

Publication number
IL133749A0
IL133749A0 IL13374998A IL13374998A IL133749A0 IL 133749 A0 IL133749 A0 IL 133749A0 IL 13374998 A IL13374998 A IL 13374998A IL 13374998 A IL13374998 A IL 13374998A IL 133749 A0 IL133749 A0 IL 133749A0
Authority
IL
Israel
Prior art keywords
acousto
crosstalk
reduced
optic modulator
modulator array
Prior art date
Application number
IL13374998A
Other languages
English (en)
Original Assignee
Etec Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etec Systems Inc filed Critical Etec Systems Inc
Publication of IL133749A0 publication Critical patent/IL133749A0/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/33—Acousto-optical deflection devices
    • G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Laser Beam Printer (AREA)
IL13374998A 1997-07-08 1998-06-19 Acousto-optic modulator array with reduced rf crosstalk IL133749A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US5197397P 1997-07-08 1997-07-08
US9232198A 1998-06-05 1998-06-05
PCT/US1998/012463 WO1999003016A1 (en) 1997-07-08 1998-06-19 Acousto-optic modulator array with reduced rf crosstalk

Publications (1)

Publication Number Publication Date
IL133749A0 true IL133749A0 (en) 2001-04-30

Family

ID=26730016

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13374998A IL133749A0 (en) 1997-07-08 1998-06-19 Acousto-optic modulator array with reduced rf crosstalk

Country Status (6)

Country Link
EP (1) EP0988575A1 (ja)
JP (1) JP2002508088A (ja)
KR (1) KR20010014272A (ja)
CA (1) CA2296278A1 (ja)
IL (1) IL133749A0 (ja)
WO (1) WO1999003016A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6295157B1 (en) * 1999-08-23 2001-09-25 Etec Systems, Inc. Thermally balanced acousto-optic modulator
US6724002B2 (en) 2001-01-31 2004-04-20 Applied Materials, Inc. Multiple electron beam lithography system with multiple beam modulated laser illumination
US20030048427A1 (en) 2001-01-31 2003-03-13 Applied Materials, Inc. Electron beam lithography system having improved electron gun
US6936981B2 (en) 2002-11-08 2005-08-30 Applied Materials, Inc. Retarding electron beams in multiple electron beam pattern generation
WO2007025748A1 (de) * 2005-08-31 2007-03-08 Heidelberg Instruments Mikrotechnik Gmbh Vorrichtung zur optischen aufspaltung und modulation von elektromagnetischer strahlung
JP2008537609A (ja) * 2006-05-30 2008-09-18 ビ−エイイ− システムズ パブリック リミテッド カンパニ− 音響光学装置
US11187962B2 (en) * 2018-12-14 2021-11-30 Mycronic AB Reducing impact of cross-talk between modulators that drive a multi-channel AOM
US11662612B2 (en) 2019-11-21 2023-05-30 Eagle Technology, Llc Acousto-optic modulator system and device with connections and related methods
US11454837B2 (en) 2019-11-22 2022-09-27 Eagle Technology, Llc AOM system with interface board and signal vias and related methods
US11573477B2 (en) * 2020-01-23 2023-02-07 University Of Maryland, College Park Crosstalk reduction in multi-channel acousto-optic modulators

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01293315A (ja) * 1988-05-20 1989-11-27 Think Lab Kk 光ビーム変調装置
US5309178A (en) * 1992-05-12 1994-05-03 Optrotech Ltd. Laser marking apparatus including an acoustic modulator

Also Published As

Publication number Publication date
JP2002508088A (ja) 2002-03-12
EP0988575A1 (en) 2000-03-29
WO1999003016A1 (en) 1999-01-21
KR20010014272A (ko) 2001-02-26
CA2296278A1 (en) 1999-01-21

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