IL126289A0 - Determining characteristic parameters by polarised light - Google Patents

Determining characteristic parameters by polarised light

Info

Publication number
IL126289A0
IL126289A0 IL12628997A IL12628997A IL126289A0 IL 126289 A0 IL126289 A0 IL 126289A0 IL 12628997 A IL12628997 A IL 12628997A IL 12628997 A IL12628997 A IL 12628997A IL 126289 A0 IL126289 A0 IL 126289A0
Authority
IL
Israel
Prior art keywords
characteristic parameters
polarised light
determining characteristic
determining
polarised
Prior art date
Application number
IL12628997A
Original Assignee
Leotek Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leotek Pty Ltd filed Critical Leotek Pty Ltd
Publication of IL126289A0 publication Critical patent/IL126289A0/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/216—Polarisation-affecting properties using circular polarised light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N2021/217—Measuring depolarisation or comparing polarised and depolarised parts of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing
    • G01N2201/123—Conversion circuit

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Drying Of Semiconductors (AREA)
  • Length Measuring Devices By Optical Means (AREA)
IL12628997A 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light IL126289A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPN8752A AUPN875296A0 (en) 1996-03-19 1996-03-19 Method and apparatus for monitoring materials processing
PCT/AU1997/000181 WO1997035177A1 (en) 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light

Publications (1)

Publication Number Publication Date
IL126289A0 true IL126289A0 (en) 1999-05-09

Family

ID=3793065

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12628997A IL126289A0 (en) 1996-03-19 1997-03-19 Determining characteristic parameters by polarised light

Country Status (6)

Country Link
JP (1) JP2001519891A (en)
KR (1) KR20000064701A (en)
CN (1) CN1219236A (en)
AU (1) AUPN875296A0 (en)
IL (1) IL126289A0 (en)
WO (1) WO1997035177A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19734646A1 (en) 1997-08-11 1999-03-04 Bosch Gmbh Robert Ellipsometer measuring device
US6583875B1 (en) 2000-05-19 2003-06-24 Therma-Wave, Inc. Monitoring temperature and sample characteristics using a rotating compensator ellipsometer
FR2809491B1 (en) * 2000-05-26 2008-07-04 Production Rech S Appliquees METHOD AND APPARATUS FOR ELLIPSOMETRIC METROLOGY FOR SAMPLE CONTAINED IN A CHAMBER OR THE LIKE
KR100688980B1 (en) * 2005-07-01 2007-03-08 삼성전자주식회사 Apparatus for monitoring plasma and method of monitoring plasma
CN102507040B (en) * 2011-11-10 2013-08-21 复旦大学 Thin film temperature measurement method based on ellipsometer
CN102519364B (en) * 2011-11-30 2014-10-15 上海华力微电子有限公司 Optical detection method and computer-aided system for plasma etching structure
FR2994264B1 (en) * 2012-08-02 2014-09-12 Centre Nat Rech Scient PROCESS FOR ANALYZING THE CRYSTALLINE STRUCTURE OF A POLY-CRYSTALLINE SEMICONDUCTOR MATERIAL
EP2703773B1 (en) * 2012-08-28 2014-12-24 Texmag GmbH Vertriebsgesellschaft Sensor for detecting a moving strip
CN103076287B (en) * 2013-01-25 2015-05-13 中国人民解放军陆军军官学院 Method for detecting damage of first wall of tokamak fusion reactor with polarized light
CN103486974B (en) * 2013-09-23 2016-04-13 中国科学院微电子研究所 A kind of Spectroscopic Ellipsometry measurement mechanism and method
CN103759661B (en) * 2013-11-04 2016-06-29 北京理工大学 A kind of device for measuring film thickness and refractive index in medium
MX361549B (en) * 2014-03-07 2018-12-10 Halliburton Energy Services Inc Wavelength-dependent light intensity modulation in multivariate optical computing devices using polarizers.
CN105136679B (en) * 2015-09-02 2017-12-26 北京航玻新材料技术有限公司 A kind of optical material surface method for evaluating quality and its application based on ellipsometer
CN105445191B (en) * 2015-11-30 2018-08-24 中国科学院长春应用化学研究所 Multichannel in situ measurement atmosphere pond
CN113281268B (en) * 2021-05-31 2022-08-16 华中科技大学 Data analysis method and system for rotating polarization device spectrum ellipsometer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985447A (en) * 1975-08-29 1976-10-12 Bell Telephone Laboratories, Incorporated Measurement of thin films by polarized light
FR2491234B1 (en) * 1980-09-29 1986-06-20 Labo Electronique Physique ELECTRONIC DEVICE FOR THE ANALYSIS AND CALCULATION OF FOURIER COEFFICIENTS OF A PERIODIC FUNCTION, AND ELLIPSOMETER COMPRISING SUCH A DEVICE
IT1184100B (en) * 1985-04-23 1987-10-22 Cselt Centro Studi Lab Telecom STATIC INTERFEROMETRIC ELLIPSOMETER
US4850711A (en) * 1986-06-13 1989-07-25 Nippon Kokan Kabushiki Kaisha Film thickness-measuring apparatus using linearly polarized light
DE4301889A1 (en) * 1993-01-14 1994-07-21 Sentech Instr Gmbh Method for determining characteristic sizes of transparent layers by means of ellipsometry

Also Published As

Publication number Publication date
AUPN875296A0 (en) 1996-04-18
JP2001519891A (en) 2001-10-23
WO1997035177A1 (en) 1997-09-25
KR20000064701A (en) 2000-11-06
CN1219236A (en) 1999-06-09

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