CN103486974B - A kind of Spectroscopic Ellipsometry measurement mechanism and method - Google Patents
A kind of Spectroscopic Ellipsometry measurement mechanism and method Download PDFInfo
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- CN103486974B CN103486974B CN201310436198.3A CN201310436198A CN103486974B CN 103486974 B CN103486974 B CN 103486974B CN 201310436198 A CN201310436198 A CN 201310436198A CN 103486974 B CN103486974 B CN 103486974B
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- 238000005259 measurement Methods 0.000 title claims abstract description 66
- 238000000391 spectroscopic ellipsometry Methods 0.000 title claims abstract description 28
- 230000007246 mechanism Effects 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000008033 biological extinction Effects 0.000 claims abstract description 122
- 230000010287 polarization Effects 0.000 claims abstract description 94
- 238000001228 spectrum Methods 0.000 claims abstract description 84
- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 230000003595 spectral effect Effects 0.000 claims abstract description 31
- 238000004891 communication Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 abstract description 10
- 230000000694 effects Effects 0.000 description 7
- 230000005670 electromagnetic radiation Effects 0.000 description 5
- 238000012360 testing method Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 238000004590 computer program Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
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Abstract
The invention discloses a kind of Spectroscopic Ellipsometry measurement mechanism and method, belong to field of optical measuring technologies, the present invention includes: light source, the measurement for the amounts of thickness variation for rete provides measuring beam; Spectrum polarizing attenuator, for receiving measuring beam, and exports containing the first polarization extinction light beam of the first amounts of thickness variation and the second polarization extinction light beam of the second amounts of thickness variation; Spectral extinction detector, for receiving the first polarization extinction light beam and the second polarization extinction light beam, and realizes the measurement of the first amounts of thickness variation to rete and the second amounts of thickness variation respectively according to the first polarization extinction light beam and the second polarization extinction light beam; Optical multiplexer, for providing optically multiplexed between light source and spectrum polarizing attenuator and optically multiplexed between spectrum polarizing attenuator and spectral extinction detector.The present invention, by adopting optically multiplexed technology, realizes measuring the thicknesses of layers variable quantity that efficiency is high, plurality of positions is measured on automatization level highland.
Description
Technical field
The present invention relates to field of optical measuring technologies, particularly relate to a kind of Spectroscopic Ellipsometry measurement mechanism and method.
Background technology
Along with the development of field of optical measurements, Spectroscopic Ellipsometry technology becomes the optical measuring technique of micrometric measurement film sample physical constant.
Spectroscopic Ellipsometry technology is by measuring film sample to be measured reflection (or transmission) polarisation of light state and situation of change thereof, accurately measuring the physical constant of film sample to be measured.Current Spectroscopic Ellipsometry measurement mechanism mostly comprises two arms, one of them arm built with light source and polarization generator part, for providing the polarized measuring beams met the demands; Another arm, built with Polarization Detection device and spectral detector, reflects spectrum polarizing state and the situation of change thereof of (or transmission) light for detecting testing sample.
But present invention applicant is in the invention technical scheme process realizing the embodiment of the present application, find at least there is following technical matters based on the measurement mechanism of Spectroscopic Ellipsometry technology at present:
Current Spectroscopic Ellipsometry measurement mechanism can only measure the physical constant in a certain zonule, film sample surface.For the application scenario that large area film thickness monitoring or gradient plated film are monitored, palpus mobile test sample or integrated many covering devices could carry out distributed monitoring to the thicknesses of layers of plurality of positions.So not only by the volume of increase device, weight and cost, also the integration complexity of device will be improved.
Summary of the invention
The embodiment of the present invention provides a kind of Spectroscopic Ellipsometry measurement mechanism and method, needing mobile test sample or integrated many cover measurement mechanisms could realize the deficiency measured the thicknesses of layers of plurality of positions for solving in prior art, reaching the technique effect that automatization level is high, measurement efficiency is high.
Embodiments provide a kind of Spectroscopic Ellipsometry measurement mechanism, for realizing the measurement of the amounts of thickness variation to rete, wherein, described rete has the first amounts of thickness variation in primary importance, in the second place, there is the second amounts of thickness variation, described device comprises: a light source, and described light source is used for providing measuring beam for the measurement of the described amounts of thickness variation of described rete; One spectrum polarizing attenuator, described spectrum polarizing attenuator for receiving described measuring beam, and exports the first polarization extinction light beam containing described first amounts of thickness variation and the second polarization extinction light beam containing described second amounts of thickness variation successively; One spectral extinction detector, described spectral extinction detector is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively, and realizes the measurement of described first amounts of thickness variation to described rete and described second amounts of thickness variation respectively according to described first polarization extinction light beam and described second polarization extinction light beam; One optical multiplexer, described optical multiplexer is optically multiplexed for what provide between the optically multiplexed and described spectrum polarizing attenuator between described light source and described spectrum polarizing attenuator and described spectral extinction detector.
Further, described optical multiplexer comprises: the first multiplexer input port, and described first multiplexer input port is for receiving described measuring beam; First multiplexer delivery outlet, described first multiplexer delivery outlet is for exporting described measuring beam; Wherein, described first multiplexer delivery outlet comprises: the first division multiplexer delivery outlet; Second division multiplexer delivery outlet; First multiplexer switch unit, described first multiplexer switch unit is used for described measuring beam to switch to export described first division multiplexer delivery outlet or described second division multiplexer delivery outlet to.
Further, described optical multiplexer also comprises: the second multiplexer input port, and described second multiplexer input port is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively; Wherein, described second multiplexer input port comprises: the first division multiplexer input port, for receiving described first polarization extinction light beam; Second division multiplexer input port, for receiving described second polarization extinction light beam; Second multiplexer delivery outlet, described second multiplexer delivery outlet is used for exporting described first polarization extinction light beam and described second polarization extinction light beam successively; Second multiplexer switch unit, described second multiplexer switch unit is used for the described first polarization extinction light beam from described first division multiplexer input port and the described second polarization extinction light beam from described second division multiplexer input port to export to described spectral extinction detector successively.
Further, described spectrum polarizing attenuator comprises: the first spectrum polarizing delustring module, described first polarization extinction light beam after the primary importance of the described rete of measurement for receiving the described measuring beam of described first division multiplexer delivery outlet, and is exported to described first division multiplexer input port by described first spectrum polarizing delustring module; Second spectrum polarizing delustring module, described second polarization extinction light beam after the second place of the described rete of measurement for receiving the described measuring beam of described second division multiplexer delivery outlet, and is exported to described second division multiplexer input port by described second spectrum polarizing delustring module.
Further, described first spectrum polarizing delustring module comprises: the first spectrum polarizing delustring module input port, and described first spectrum polarizing delustring module input port is for receiving the described measuring beam of described first division multiplexer delivery outlet; First spectrum polarizing delustring module delivery outlet, described first spectrum polarizing delustring module delivery outlet is used for the described first polarization extinction light beam after by the primary importance of the described rete of measurement and exports to described first division multiplexer input port.
Further, described second spectrum polarizing delustring module comprises: the second spectrum polarizing delustring module input port, and described second spectrum polarizing delustring module input port is for receiving the described measuring beam of described second division multiplexer delivery outlet; Second spectrum polarizing delustring module delivery outlet, described second spectrum polarizing delustring module delivery outlet is used for the described second polarization extinction light beam after by the second place of the described rete of measurement and exports to described second division multiplexer input port.
Further, described spectral extinction detector is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively, and the measurement of described first amounts of thickness variation to described rete and described second amounts of thickness variation is realized respectively according to described first polarization extinction light beam and described second polarization extinction light beam, be specially: described spectral extinction detector is for receiving described first polarization extinction light beam, and the first drift value of optical wavelength corresponding to the polarization extinction point detecting described first polarization extinction light beam, and set up the quantitative relationship of described first drift value and described first amounts of thickness variation, realize the measurement to described first amounts of thickness variation, described spectral extinction detector is for receiving described second polarization extinction light beam, and the second drift value of optical wavelength corresponding to the polarization extinction point detecting described second polarization extinction light beam, and set up the quantitative relationship of described second drift value and described second amounts of thickness variation, realize the measurement to described second amounts of thickness variation.
Further, described device also comprises: an airtight chamber, described spectrum polarizing attenuator and described rete is comprised in described airtight chamber, wherein, described airtight chamber also comprises: an optical feed trough mouth, described optical feed trough mouth is connected with described spectrum polarizing attenuator, for successively described first polarization extinction light beam and described second polarization extinction light beam being exported to described optical multiplexer.
The embodiment of the present invention additionally provides a kind of Spectroscopic Ellipsometry measuring method, be applied in the Spectroscopic Ellipsometry measurement mechanism as described in claim 1-8, wherein, described method comprises: in first time period, controlling described optical multiplexer makes described light source and described spectral extinction detector realize optical communication, to measure described first amounts of thickness variation of the primary importance of described rete with described first spectrum polarizing delustring module delivery outlet and described first spectrum polarizing delustring module input port respectively; In second time period, controlling described optical multiplexer makes described light source and described spectral extinction detector realize optical communication, to measure described second amounts of thickness variation of the second place of described rete with described second spectrum polarizing delustring module delivery outlet and described second spectrum polarizing delustring module input port respectively; Wherein, after described second time period is positioned at described first time period.
The beneficial effect of the embodiment of the present invention is as follows:
A kind of Spectroscopic Ellipsometry measurement mechanism that one embodiment of the invention provides and method, by adopting optically multiplexed technology, realizing measuring the thicknesses of layers that efficiency is high, plurality of positions is measured on automatization level highland and measuring.
Further, one embodiment of the invention is by modular mentality of designing, spectrum polarizing attenuator and rete are placed in airtight chamber, achieve optical measurement module to be separated with the effective of electrical measurement module, there are the needs that can be applicable to the responsive occasion of electromagnetic radiation, heat trnasfer and vacuum deflation.
Further, one embodiment of the invention has compact conformation, is easy to integrated technique effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of Spectroscopic Ellipsometry measurement mechanism in one embodiment of the invention;
Fig. 2 is the structural representation of another Spectroscopic Ellipsometry measurement mechanism in one embodiment of the invention
Fig. 3 is the schematic flow sheet of a kind of Spectroscopic Ellipsometry measurement mechanism in one embodiment of the invention.
Embodiment
A kind of Spectroscopic Ellipsometry measurement mechanism that one embodiment of the invention that one embodiment of the invention provides provides and method, by adopting optically multiplexed technology, realize measuring the thicknesses of layers variable quantity that efficiency is high, plurality of positions is measured on automatization level highland; And the present invention is by modular mentality of designing, spectrum polarizing attenuator and rete are placed in airtight chamber, achieve optical measurement module to be separated with the effective of electrical measurement module, there are the needs that can be applicable to the responsive occasion of electromagnetic radiation, heat trnasfer and vacuum deflation.Meanwhile, the present invention has compact conformation, is easy to integrated technique effect.
[embodiment 1]
For enabling those skilled in the art understand the present invention in more detail, describe the present invention below in conjunction with accompanying drawing.
As described in Figure 1, Fig. 1 is a kind of Spectroscopic Ellipsometry measurement mechanism in one embodiment of the invention, wherein said Spectroscopic Ellipsometry measurement mechanism is for realizing the measurement of the amounts of thickness variation to rete 5, wherein, described rete 5 has the first amounts of thickness variation in primary importance 51, has the second amounts of thickness variation in the second place 51.Specifically, described Spectroscopic Ellipsometry measurement mechanism comprises: light source 1, spectral extinction detector 2, optical multiplexer 3, spectrum polarizing attenuator 4, rete 5; Wherein,
Light source 1, described light source 1 provides measuring beam for the measurement of the amounts of thickness variation for described rete 5.
Specifically, light source 1 is broad spectrum light source, and specifically, can select deuterium-Halogen lamp LED optical fiber source, it should be noted that, foregoing description is exemplary description, and other can provide the light source of measuring beam to be protection scope of the present invention.
Spectrum polarizing attenuator 4, described spectrum polarizing attenuator 4 for receiving described measuring beam, and exports successively containing the first polarization extinction light beam of described first amounts of thickness variation and the second polarization extinction light beam of described second amounts of thickness variation.
Spectral extinction detector 2, described spectral extinction detector 2 for receiving described first polarization extinction light beam and described second polarization extinction light beam successively, and realizes the measurement of described first amounts of thickness variation to described rete 5 and described second amounts of thickness variation respectively according to described first polarization extinction light beam and described second polarization extinction light beam.
Specifically, the optional fiber spectrometer of spectral extinction detector 2, for receiving described first polarization extinction light beam, and the first drift value of optical wavelength corresponding to the polarization extinction point detecting described first polarization extinction light beam, and set up the quantitative relationship of described first drift value and described first amounts of thickness variation, finally realize the measurement to described first amounts of thickness variation; Spectral extinction detector 2 is also for receiving described second polarization extinction light beam, and the second drift value of optical wavelength corresponding to the polarization extinction point detecting described second polarization extinction light beam, and set up the quantitative relationship of described second drift value and described second amounts of thickness variation, finally realize the measurement to described second amounts of thickness variation.It should be noted that, foregoing description is exemplary description, and other instruments that can realize spectral extinction detection effect are protection scope of the present invention.
Optical multiplexer 3, described optical multiplexer 3 is optically multiplexed for what provide between the optically multiplexed and described spectrum polarizing attenuator 4 between described light source and described spectrum polarizing attenuator and described spectral extinction detector 2.
Further, described optical multiplexer 3 comprises:
First multiplexer input port 31, described first multiplexer input port 31 is for receiving described measuring beam;
First multiplexer delivery outlet 33, described first multiplexer delivery outlet 33 is for exporting described measuring beam; Wherein, described first multiplexer delivery outlet 33 comprises:
First division multiplexer delivery outlet 331;
Second division multiplexer delivery outlet 332;
First multiplexer switch unit 35, described first multiplexer switch unit 35 exports the first division multiplexer delivery outlet 331 or the second division multiplexer delivery outlet 332 to for being switched by described measuring beam.
Described optical multiplexer 3 comprises:
Second multiplexer input port 34, described second multiplexer inputs 34 mouthfuls for receiving described first polarization extinction light beam and described second polarization extinction light beam successively; Wherein, described second multiplexer input port 34 comprises:
First division multiplexer input port 341, for receiving described first polarization extinction light beam;
Second division multiplexer input port 342, for receiving described second polarization extinction light beam;
Second multiplexer delivery outlet 32, described second multiplexer delivery outlet 32 is for exporting described first polarization extinction light beam and described second polarization extinction light beam successively;
Second multiplexer switch unit 36, described second multiplexer switch unit 36 is for exporting to described spectral extinction detector 2 successively by the described first polarization extinction light beam from described first division multiplexer input port 341 and the described second polarization extinction light beam from described second division multiplexer input port 342.
Further, described spectrum polarizing attenuator comprises:
First spectrum polarizing delustring module 41, described first polarization extinction light beam after the primary importance 51 of the described rete 5 of measurement for receiving the described measuring beam of described first division multiplexer delivery outlet 331, and is exported to described first division multiplexer input port 341 by described first spectrum polarizing delustring module 41;
Second spectrum polarizing delustring module 42, described second polarization extinction light beam after the second place 52 of the described rete of measurement for receiving the described measuring beam of described second division multiplexer delivery outlet 332, and is exported to the second division multiplexer input port 342 by described second spectrum polarizing delustring module 42.
Further, described first spectrum polarizing delustring module 41 comprises:
First spectrum polarizing delustring module input port 411, described first spectrum polarizing delustring module input port 411 is for receiving the described measuring beam of described first division multiplexer delivery outlet 331;
First spectrum polarizing delustring module delivery outlet 412, described first spectrum polarizing delustring module delivery outlet 412 is for exporting to described first division multiplexer input port 341 by the described first polarization extinction light beam after the primary importance 51 of the described rete 5 of measurement.
Further, described second spectrum polarizing delustring module 42 comprises:
Second spectrum polarizing delustring module input port 421, described second spectrum polarizing delustring module input port 421 is for receiving the described measuring beam of described second division multiplexer delivery outlet 332;
Second spectrum polarizing delustring module delivery outlet 422, described second spectrum polarizing delustring module delivery outlet 422 is for exporting to described second division multiplexer input port 342 by the described second polarization extinction light beam after the second place 52 of the described rete 5 of measurement.
Further, in order to realize measuring fast and automatically, efficiently, can by the passage bridge of computer program control both optical multiplexer 3 and multiplexed.
[embodiment 2]
Further, in order to be applicable to the needs to the responsive occasion of electromagnetic radiation, heat trnasfer and vacuum deflation, the embodiment of the present invention additionally provides a kind of typical apply embodiment.
As shown in Figure 2, the embodiment of the present invention additionally provides airtight chamber 7, described spectrum polarizing attenuator 4 and described rete 5 is comprised in described airtight chamber 7, wherein, described airtight chamber 7 also comprises: optical feed trough mouth 6, described optical feed trough mouth 6 is connected with described spectrum polarizing attenuator 4, for successively described first polarization extinction light beam and described second polarization extinction light beam being exported to described optical multiplexer 3.
Further, described rete 5 is in described airtight chamber 7, and wherein, described rete 5 can be the rete on many group plated film samples, the air pressure in described airtight chamber 7 can greater than or equal to or lower than normal atmospheric pressure.
From effect, achieve optical measurement module by described airtight chamber 7 to be separated with the effective of electrical measurement module, make in described airtight chamber 7, only to comprise optical fiber, described optical feed trough mouth 6 and described spectrum polarizing delustring module, without any electrical module and electronic circuit, therefore, in described airtight chamber 7, produce any electromagnetic radiation, heat trnasfer hardly, and by choosing suitable material, vacuum deflation can be controlled in extremely low level.
[embodiment 3]
In order to be illustrated more clearly in a kind of Spectroscopic Ellipsometry measurement mechanism provided by the present invention, the embodiment of the present invention additionally provides a kind of Spectroscopic Ellipsometry measuring method, and as shown in Figure 3, described method comprises:
Step 10: in first time period, control both optical multiplexer makes light source and spectral extinction detector realize optical communication, to measure the first amounts of thickness variation of the primary importance of rete with the first spectrum polarizing delustring module delivery outlet and the first spectrum polarizing delustring module input port respectively;
Step 20: in the second time period, control both optical multiplexer makes light source and spectral extinction detector realize optical communication, to measure the second amounts of thickness variation of the second place of rete with the second spectrum polarizing delustring module delivery outlet and the second spectrum polarizing delustring module input port respectively; Wherein, after described second time period is positioned at described first time period.
In sum, a kind of Spectroscopic Ellipsometry measurement mechanism of providing of the embodiment of the present invention and method have following technique effect:
1. a kind of Spectroscopic Ellipsometry measurement mechanism of providing of one embodiment of the invention and method, by adopting optically multiplexed technology, realizes measuring the thicknesses of layers variable quantity that efficiency is high, plurality of positions is measured on automatization level highland;
2. one embodiment of the invention is by modular mentality of designing, spectrum polarizing attenuator and rete are placed in airtight chamber, achieve optical measurement module to be separated with the effective of electrical measurement module, there are the needs that can be applicable to the responsive occasion of electromagnetic radiation, heat trnasfer and vacuum deflation.
3. one embodiment of the invention has compact conformation, is easy to integrated technique effect.
Above-described specific embodiment; object of the present invention, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a Spectroscopic Ellipsometry measurement mechanism, for realizing the measurement of the amounts of thickness variation to rete, wherein, described rete has the first amounts of thickness variation in primary importance, has the second amounts of thickness variation, it is characterized in that in the second place, and described device comprises:
One light source, described light source is used for providing measuring beam for the measurement of the described amounts of thickness variation of described rete;
One spectrum polarizing attenuator, described spectrum polarizing attenuator for receiving described measuring beam, and exports the first polarization extinction light beam containing described first amounts of thickness variation and the second polarization extinction light beam containing described second amounts of thickness variation successively;
One spectral extinction detector, described spectral extinction detector is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively, and realizes the measurement of described first amounts of thickness variation to described rete and described second amounts of thickness variation respectively according to described first polarization extinction light beam and described second polarization extinction light beam;
One optical multiplexer, described optical multiplexer is optically multiplexed for what provide between the optically multiplexed and described spectrum polarizing attenuator between described light source and described spectrum polarizing attenuator and described spectral extinction detector.
2. device as claimed in claim 1, it is characterized in that, described optical multiplexer comprises:
First multiplexer input port, described first multiplexer input port is for receiving described measuring beam;
First multiplexer delivery outlet, described first multiplexer delivery outlet is for exporting described measuring beam; Wherein, described first multiplexer delivery outlet comprises:
First division multiplexer delivery outlet;
Second division multiplexer delivery outlet;
First multiplexer switch unit, described first multiplexer switch unit is used for described measuring beam to switch to export described first division multiplexer delivery outlet or described second division multiplexer delivery outlet to.
3. device as claimed in claim 1, it is characterized in that, described optical multiplexer also comprises:
Second multiplexer input port, described second multiplexer input port is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively; Wherein, described second multiplexer input port comprises:
First division multiplexer input port, for receiving described first polarization extinction light beam;
Second division multiplexer input port, for receiving described second polarization extinction light beam;
Second multiplexer delivery outlet, described second multiplexer delivery outlet is used for exporting described first polarization extinction light beam and described second polarization extinction light beam successively;
Second multiplexer switch unit, described second multiplexer switch unit is used for the described first polarization extinction light beam from described first division multiplexer input port and the described second polarization extinction light beam from described second division multiplexer input port to export to described spectral extinction detector successively.
4. device as claimed in claim 1, it is characterized in that, described spectrum polarizing attenuator comprises:
First spectrum polarizing delustring module, described first polarization extinction light beam after the primary importance of the described rete of measurement for receiving the described measuring beam of described first division multiplexer delivery outlet, and is exported to described first division multiplexer input port by described first spectrum polarizing delustring module;
Second spectrum polarizing delustring module, described second polarization extinction light beam after the second place of the described rete of measurement for receiving the described measuring beam of described second division multiplexer delivery outlet, and is exported to described second division multiplexer input port by described second spectrum polarizing delustring module.
5. device as claimed in claim 4, it is characterized in that, described first spectrum polarizing delustring module comprises:
First spectrum polarizing delustring module input port, described first spectrum polarizing delustring module input port is for receiving the described measuring beam of described first division multiplexer delivery outlet;
First spectrum polarizing delustring module delivery outlet, described first spectrum polarizing delustring module delivery outlet is used for the described first polarization extinction light beam after by the primary importance of the described rete of measurement and exports to described first division multiplexer input port.
6. device as claimed in claim 4, it is characterized in that, described second spectrum polarizing delustring module comprises:
Second spectrum polarizing delustring module input port, described second spectrum polarizing delustring module input port is for receiving the described measuring beam of described second division multiplexer delivery outlet;
Second spectrum polarizing delustring module delivery outlet, described second spectrum polarizing delustring module delivery outlet is used for the described second polarization extinction light beam after by the second place of the described rete of measurement and exports to described second division multiplexer input port.
7. device as claimed in claim 1, it is characterized in that, described spectral extinction detector is used for receiving described first polarization extinction light beam and described second polarization extinction light beam successively, and the measurement of described first amounts of thickness variation to described rete and described second amounts of thickness variation is realized respectively according to described first polarization extinction light beam and described second polarization extinction light beam, be specially:
Described spectral extinction detector is for receiving described first polarization extinction light beam, and the first drift value of optical wavelength corresponding to the polarization extinction point detecting described first polarization extinction light beam, and set up the quantitative relationship of described first drift value and described first amounts of thickness variation, realize the measurement to described first amounts of thickness variation;
Described spectral extinction detector is for receiving described second polarization extinction light beam, and the second drift value of optical wavelength corresponding to the polarization extinction point detecting described second polarization extinction light beam, and set up the quantitative relationship of described second drift value and described second amounts of thickness variation, realize the measurement to described second amounts of thickness variation.
8. device as claimed in claim 1, it is characterized in that, described device also comprises:
One airtight chamber, comprises described spectrum polarizing attenuator and described rete in described airtight chamber, wherein, described airtight chamber also comprises:
One optical feed trough mouth, described optical feed trough mouth is connected with described spectrum polarizing attenuator, for successively described first polarization extinction light beam and described second polarization extinction light beam being exported to described optical multiplexer.
9. a Spectroscopic Ellipsometry measuring method, be applied in the Spectroscopic Ellipsometry measurement mechanism as described in claim 1-8, wherein, described method comprises:
In first time period, controlling described optical multiplexer makes described light source and described spectral extinction detector realize optical communication, to measure described first amounts of thickness variation of the primary importance of described rete with described first spectrum polarizing delustring module delivery outlet and described first spectrum polarizing delustring module input port respectively;
In second time period, controlling described optical multiplexer makes described light source and described spectral extinction detector realize optical communication, to measure described second amounts of thickness variation of the second place of described rete with described second spectrum polarizing delustring module delivery outlet and described second spectrum polarizing delustring module input port respectively; Wherein, after described second time period is positioned at described first time period.
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| CN102095381A (en) * | 2010-12-08 | 2011-06-15 | 广东富山玻璃机械有限公司 | Method for measuring thickness of rigid transparent material with laser |
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| CN102095381A (en) * | 2010-12-08 | 2011-06-15 | 广东富山玻璃机械有限公司 | Method for measuring thickness of rigid transparent material with laser |
Non-Patent Citations (2)
| Title |
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| PHASAR解复用器的原理及其性能综述与分析;王道义等;《光通信技术》;20030331;第24卷(第3期);213-218页 * |
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