JP6867828B2 - Capacitance sensor inspection machine and inspection method - Google Patents

Description

The present invention relates to an inspection machine and an inspection method for a capacitance sensor mounted on a home electric appliance, a mobile device, a four-wheeled vehicle, or the like.

There are various types of the conventional capacitance type input device 70. For example, as shown in FIGS. 5 and 6, a transparent operation panel 71 having an insulating property is provided, and the operation panel 71 has a plurality of detection electrodes. A type in which 72 are arranged at intervals is known.

Each detection electrode 72 is formed in a size corresponding to the operator's finger 73, forms a capacitance with the operator's finger 73, and the change in the capacitance is detected by the detection circuit 74. .. Strictly speaking, the detection circuit 74 detects the capacitance between the input terminal and the ground, but the detection electrode 72 is electrically connected to the input terminal, and the operator can perform the capacitance between the input terminal and the ground. Therefore, the capacitance between the detection electrode 72 and the operator's finger 73 can be detected. Further, when the distance between the detection electrode 72 and the operator's finger 73 changes, the change in capacitance between them can be detected.

As shown in FIG. 5, such a capacitance type input device 70 is formed between the detection electrode 72 and the finger 73 when the distance of the finger 73 to the selected arbitrary detection electrode 72 is long. Since the value of the capacitance to be generated is small, the output of the detection circuit 74 is turned off. On the other hand, as shown in FIG. 6, when the fingertip touches the surface of the operation panel 71 and the distance of the finger 73 to the selected arbitrary detection electrode 72 is short, the distance between the detection electrode 72 and the finger 73 is short. Since the value of the capacitance formed in is increased, the output of the detection circuit 74 is turned on.

By the way, after the capacitance type input device 70 is manufactured, the quality of its function is inspected and shipped. At the time of inspection, the inspection device 80 shown in FIG. 7 is used. This type of inspection device 80 includes a drive mechanism including, for example, an air cylinder, a screw mechanism, a gear mechanism, or the like, and a vertically movable conductive pusher 81 is vertically supported by the drive mechanism, and the pusher is vertically supported. The flat lower end of the 81 approaches or separates the detection electrode 72 instead of the finger 73.

When inspecting the quality of the function of the capacitance type input device 70 using the inspection device 80, the drive mechanism of the inspection device 80 is driven to intermittently push the pusher 81 with respect to the lower detection electrode 72. The distance between the paused pusher 81 and the detection electrode 72, and the relationship between these distances and the capacitance value are measured, and the capacitance value and a predetermined judgment standard are measured. Evaluate by comparing with the value.

As a result of comparing the capacitance value and the judgment standard value, if the capacitance value is within the judgment standard value, the capacitance type input device 70 is shipped as a non-defective product having no problem in the capacitance detection ability. be able to. On the other hand, when the capacitance value is outside the judgment standard value, the capacitance type input device 70 is a defective product having a problem in the capacitance detection ability, and therefore it is subjected to extrasystem processing (Patent Document). See 1 and 2).

Japanese Patent No. 5507487 Japanese Patent No. 5507526

The conventional capacitance type input device 70 is configured as described above, and the inspection device 80 is used at the time of inspecting the quality of the function. The inspection device 80 is provided with a plurality of movable parts such as a drive mechanism. Therefore, the structure becomes very complicated and expensive. Further, since it is necessary to mechanically and physically lower the pusher 81 with respect to the detection electrode 72, the inspection work becomes complicated and it takes time to complete the inspection, so that the inspection should be speeded up. There is also the problem of not being able to do it.

The present invention has been made in view of the above, and an object of the present invention is to provide an inexpensive capacitance sensor inspection machine and inspection method capable of simplifying and speeding up inspection.

In the present invention, in order to solve the above problems, the quality of the capacitance sensor in which the detection electrode is formed on the insulating member is inspected.
A holding jig that positions and holds the capacitance sensor , an inspection electrode capable of forming a capacitance between the detection electrode of the capacitance sensor at intervals and facing the detection electrode, and a capacitance. It includes a detection means for detecting a capacitance detection value based on the capacitance between the detection electrode of the sensor and the ground, and a changeover switch means for electrically connecting and disconnecting the inspection electrode and the ground .
A negative pressure space connected to the negative pressure means is formed in the holding jig, and the negative pressure space and the capacitance sensor can communicate with each other through the suction holes.
A negative pressure space is formed from the upper part to the inside of the holding jig, and the upper surface of the opening is covered with a lid material, and an inspection electrode protective layer on which a capacitance sensor is mounted is laminated on the lid material. And the inspection electrode protective layer is provided with a suction hole, and the upper portion of the hole facing the capacitance sensor is characterized.

Further, in the present invention, in order to solve the above problems, the quality of the capacitance sensor in which the detection electrode is formed on the insulating member is inspected.
A holding jig that positions and holds the capacitance sensor, an inspection electrode capable of forming a capacitance between the detection electrode of the capacitance sensor at intervals and facing the detection electrode, and a capacitance. It includes a detection means for detecting a capacitance detection value based on the capacitance between the detection electrode of the sensor and the ground, and a changeover switch means for electrically connecting and disconnecting the inspection electrode and the ground.
A negative pressure space connected to the negative pressure means is formed in the holding jig, and the negative pressure space and the capacitance sensor can communicate with each other through the suction holes.
The holding jig is divided into a lower holding jig and an upper holding jig that can be stacked in the vertical direction, and a capacitance sensor can be mounted on the upper part of the upper holding jig. A fixing hole to be fitted into the inspection electrode is provided in each tool, and a negative pressure space covered with the lower holding jig is formed in the lower part of the upper holding jig, and the negative pressure space is formed in this negative pressure space. It is characterized in that a suction hole is connected and the upper portion of the opening faces the capacitance sensor.

Further, the inspection electrode is formed in a substantially male screw, and of the lower holding jig and the upper holding jig, at least the fixing hole of the upper holding jig is formed in the female screw hole, and the inspection electrode is formed in the female screw hole. It is possible to screw it in so that its end faces the capacitance sensor mounted on the upper holding jig.
Further, it is preferable that the detection means converts the capacitance between the detection electrode of the capacitance sensor and the ground into a capacitance value or a detection value and outputs the value.

Further, in the present invention, in order to solve the above problems, the capacitance sensor inspection method according to claim 1 is used to inspect the quality of the capacitance sensor.
The inspection electrode of the inspection machine and the ground are disconnected by the changeover switch means, the capacitance sensor is set in the inspection machine, the capacitance detection value between the detection electrode and the ground is detected, and the detected capacitance detection value and the ground are detected. When the capacitance detection value is out of the first determination standard value as a result of comparison with the first determination standard value, the capacitance sensor is treated as a defective product.

Here, the insulating member of the capacitance sensor and the detection electrode in the claims may be transparent, opaque, or translucent. The insulating member includes at least an insulating sheet, film, substrate and the like. The number of detection electrodes may be singular or plural. Further, the inspection electrode and the detection means may be built in the holding jig or may be separate bodies. The number of inspection electrodes can be increased or decreased depending on the number of detection electrodes.

The capacitance detection value detected by the detection means is mainly a capacitance value, but any value that correlates with the capacitance value may be used as long as it is a value based on the capacitance. Further, the changeover switch means may be various switches that are manually operated, or may be an A contact or B contact type relay that is automatically operated.

According to the present invention, when inspecting the quality of the capacitance sensor, first, the inspection electrode of the inspection machine and the ground are disconnected by the changeover switch means, and the capacitance sensor is set in the inspection machine. The capacitance detection value between the detection electrode and the ground is detected by the detection means, and the detected capacitance detection value is compared with the first determination standard value. As a result of comparison, if the capacitance detection value deviates from the first judgment standard value, the capacitance sensor has a problem with the capacitance detection capability, so it is treated as a defective product after being removed from the inspection machine. ..

On the other hand, when the capacitance detection value is within the first determination standard value, the inspection electrode of the inspection machine and the ground are electrically connected by switching the changeover switch means, and the detection electrode of the capacitance sensor and the ground are connected. The capacitance detection value between them is detected by the detection means, and the capacitance detection value is compared with the second determination standard value. As a result of comparison, if the capacitance detection value deviates from the second judgment standard value, the capacitance sensor has a problem with the capacitance detection capability, so it is treated as a defective product after being removed from the inspection machine. .. When the capacitance detection value is within the second determination standard value, the capacitance sensor has no problem in the capacitance detection ability, so that it can be removed from the inspection machine and handled as a normal non-defective product.

According to the present invention, there is an effect that the inspection work of the capacitance sensor can be simplified and speeded up. Further, it is possible to inexpensively provide an inspection machine for a capacitance sensor having few moving parts. Further, if the air in the negative pressure space is exhausted by driving the negative pressure means, the capacitance sensor can be attracted to the suction hole of the holding jig, so that even if the capacitance sensor is a non-magnetic material such as resin. , Can be easily fixed. Further, even if the capacitance sensor is thin, the entire surface can be adsorbed with a uniform load without deforming the capacitance sensor. In addition, it can be expected to suppress the occurrence of so-called chattering. Further, if the upper surface of the open negative pressure space is covered with a lid material having excellent dimensional stability and the like, and the capacitance sensor is positioned and arranged on the lid material via the inspection electrode protective layer, the capacitance sensor It is possible to face the detection electrode and the inspection electrode in a stable posture with high accuracy.

According to the invention of claim 2, there is an effect that the inspection work of the capacitance sensor can be simplified and speeded up. Further, it is possible to inexpensively provide an inspection machine for a capacitance sensor having few moving parts. Further, if the air in the negative pressure space is exhausted by driving the negative pressure means, the capacitance sensor can be attracted to the suction hole of the holding jig, so that even if the capacitance sensor is a non-magnetic material such as resin. , Can be easily fixed. Further, even if the capacitance sensor is thin, the entire surface can be adsorbed with a uniform load without deforming the capacitance sensor. In addition, it can be expected to suppress the occurrence of so-called chattering. In addition, since the holding jig can be divided into a lower holding jig and an upper holding jig, even if the holding jig is high and heavy, the holding jig can be easily handled, moved, managed, maintained and inspected. Become.

According to the invention of claim 3 , since the inspection electrode forms a capacitance between the inspection electrode and the detection electrode of the capacitance sensor and also has a fastening function, the inspection electrode holds the lower part holding jig and the upper part. It is possible to reduce the number of parts by firmly connecting with the jig. Further, if the inspection electrode is rotated to adjust the gap between the end portion and the detection electrode of the capacitance sensor, the capacitance detection value can be stably detected with high accuracy. In addition, since the male screw of the inspection electrode and the female screw of the female screw hole are engaged, the inspection electrode can be moved up and down with high accuracy, and the gap between the end of the inspection electrode and the detection electrode of the capacitance sensor can be maintained. It becomes possible to adjust with high precision.

According to the invention of claim 4, if the capacitance is converted into a detection value that correlates with the capacitance value and output, the first and second determination standard values are based on the detection value. Judgment criteria corresponding to can be easily determined.

According to the invention of claim 5, since the number of movable parts of the inspection machine can be reduced, the time required for moving the movable parts can be shortened, and the capacity detection value can be detected in a short time. In addition, the capacitance detection value when the distance between the conventional pusher and the detection electrode is long can be quickly detected.

It is sectional drawing which shows typically the embodiment of the inspection machine of the capacitance sensor which concerns on this invention. It is a flowchart which shows the procedure of the inspection work in embodiment of the inspection method of the capacitance sensor which concerns on this invention. It is sectional drawing which shows typically the 2nd Embodiment of the inspection machine of the capacitance sensor which concerns on this invention. It is a graph explaining the relationship between the detection value of the detection circuit and the change state of the changeover switch in the 3rd Embodiment of the inspection machine of the capacitance sensor which concerns on this invention. It is sectional drawing which shows the case where the distance between an arbitrary detection electrode and an operator's finger is long. It is sectional drawing which shows the case where the distance between an arbitrary detection electrode and an operator's finger is short. It is sectional drawing which shows the conventional inspection apparatus.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. In the capacitance sensor inspection machine according to the present embodiment, as shown in FIGS. 1 and 2, a plurality of detection electrodes 3 are formed on the insulating sheet 2. It is an inspection machine that inspects the quality of the capacitance sensor 1 in which the capacitance sensor 1 is formed, and is a holding jig 10 for the capacitance sensor 1 and a detection electrode 3 facing a plurality of detection electrodes 3 of the capacitance sensor 1. A plurality of inspection electrodes 30 forming a capacitance between the two, a detection circuit 40 for detecting a capacitance value based on the capacitance between the detection electrode 3 of the capacitance sensor 1 and the ground 50, and a detection circuit 40. A changeover switch 60 for electrically connecting and disconnecting the plurality of inspection electrodes 30 and the ground 50 is provided.

As partially shown in FIG. 1, the capacitance sensor 1 includes, for example, a flexible flat rectangular thin insulating sheet 2, and a plurality of detection electrodes 3 having conductivity on the surface of the insulating sheet 2. Are arranged at intervals, and the plurality of detection electrodes 3 are coated and protected by an insulating layer 4 having light transmission and insulating properties. The insulating sheet 2 is made of a film made of polyester, polypropylene, polyethylene, polyethylene terephthalate, polycarbonate, polyamide, polyimide, acrylic resin, or the like, and is formed into a flat square, a rectangular shape, a substantially convex flat shape, or the like.

The plurality of detection electrodes 3 are arranged in a matrix of, for example, 1 × 3, 2 × 3, 3 × 3, and each detection electrode 3 is printed in a plane circle, rectangle, rhombus, etc. One end of a conductive elongated conductive line is printed and connected to the peripheral edge portion, and the conductive line is extended while bending to the peripheral edge portion of the insulating sheet 2, and the other end portion serves as a connection terminal.

The detection electrode 3 uses gold, silver, copper, nickel, aluminum, brass, laminated members and alloys thereof, conductive paste, carbon nanotubes, carbon nanofibers, conductive polymer, etc. for screen printing, inkjet printing, photolithography, etc. Is formed by. Further, the conductive line is formed by screen printing, inkjet printing, photolithography or the like with conductive ink made of silver ink, carbon ink, conductive polymer or the like. This conductive line is electrically connected to the detection circuit 40 when the capacitance sensor 1 is set on the holding jig 10.

The insulating layer 4 is made of, for example, a film made of polyethylene terephthalate, polycarbonate, acrylic resin, or the like, and is formed into a flat square, a rectangular shape, a substantially convex flat shape, or the like so as to correspond to the shape of the insulating sheet 2. It is adhered to by an adhesive material such as double-sided adhesive tape.

As shown in FIG. 1, the holding jig 10 is formed into a short flat rectangular block shape by, for example, polycarbonate, polyacetal, acrylic resin, etc., and the capacitance sensor 1 is positioned and mounted on a flat upper surface. .. The negative pressure space 11 for vacuum suction is cut out in a flat rectangular shape from most of the holding jig 10 except for the peripheral edge portion of the upper surface of the holding jig 10, and the upper surface of the holding jig 10 and the upper peripheral edge of the negative pressure space 11 are formed. A step receiving portion 13 for supporting the lid plate 12 is formed between them, and the negative pressure space 11 is detachably connected to an external vacuum pump 14 which is a negative pressure means.

The open upper surface of the negative pressure space 11 is covered with a lid plate 12 such as glass epoxy having excellent dimensional stability and electrical characteristics, and the flat upper surface of the lid plate 12 contacts the lower surface of the capacitance sensor 1. The inspection electrode protective layer 15 of the thin film is laminated and adhered. In the thickness direction of the lid plate 12 and the inspection electrode protective layer 15, a plurality of suction holes 16 for air flow that communicate the capacitance sensor 1 and the negative pressure space 11 are perforated at intervals, and each suction hole is formed. The open upper end of the 16 is exposed and faces the lower surface of the capacitance sensor 1, and the open lower end of each suction hole 16 communicates with the upper part of the negative pressure space 11.

The inspection electrode protective layer 15 is not particularly limited, but is formed of, for example, a sheet similar to the insulating sheet 2 of the capacitance sensor 1, and is imparted with light transmission from the viewpoint of ensuring the visibility of the inspection electrode 30. Will be done.

As shown in FIG. 1, each inspection electrode 30 is formed on the surface of the lid plate 12 of the holding jig 10 and is coated with the inspection electrode protective layer 15 so as to correspond to the number of detection electrodes 3 of the capacitance sensor 1. When the capacitance sensor 1 is positioned and held, it faces the detection electrode 3 in a non-contact manner from below with a slight interval, and forms a capacitance between the detection electrode 3 and the facing detection electrode 3. The inspection electrode 30 is formed on a flat circular plate or the like by, for example, laminating and adhering glass epoxy, gold-plated copper foil, and an insulating protective layer, but it can also be formed of the same material as the detection electrode 3.

The thickness of the inspection electrode 30 is 1 mm or less, preferably 0, from the viewpoint of minimizing the parasitic capacitance between the inspection electrode 30 and the ground 50 when the inspection electrode 30 is brought into non-contact with the ground 50 by the changeover switch 60. It is formed to be 0.8 mm or less, more preferably 0.5 mm or less, still more preferably 0.2 mm or less. The area of the inspection electrode 30 facing the detection electrode 3 is not particularly limited, but in consideration of the size of the operator's finger 73, for example, 13 mm ² (about φ4) to 314 ^{mm 2} (about φ20). It can be as large as a degree.

As shown in the figure, the detection circuit 40 is composed of, for example, an IC chip or the like, and is electrically connected to a plurality of inspection electrodes 30 via conductive lines, and the detection electrode 3 of the capacitance sensor 1 and the ground 50 are connected to each other. A capacitance value based on the capacitance between them is detected, and the detected capacitance value is output to a computer device (not shown). The computer device is composed of, for example, a commercially available notebook computer, and realizes a predetermined function such as comparing the capacitance value detected by the detection circuit 40 by the CPU executing a predetermined program using the RAM area as a work area. To do.

As shown in FIG. 1, the changeover switch 60 includes, for example, a switch that is manually pressed or rotated, and when it is turned on and closed, the plurality of inspection electrodes 30 and the ground 50 are electrically connected. It is connected, the state in which the operator has a capacitance between the ground 50 and the ground 50 is reproduced, and the capacitance value when the distance between the conventional pusher 81 and the detection electrode 3 is short is detected.

On the other hand, when the inspection electrode 30 and the ground 50 are electrically disconnected from each other when the inspection electrode 30 is opened by being turned off (the state shown in FIG. 1), the distance between the conventional pusher 81 and the detection electrode 3 is established. Detects the capacitance value when is long. The wiring including the lead wire between the changeover switch 60 and the inspection electrode 30 and the wiring including the lead wire between the ground 50 and the ground 50 are formed thin and short from the viewpoint of suppressing the parasitic capacitance as much as possible. Is preferable.

In the above configuration, when inspecting the quality of the manufactured capacitance sensor 1, first, as a preparatory step for the inspection, the good and defective capacitance sensors 1 are used, respectively, and the first and second determinations are made. Determine the standard value. Specifically, the inspection electrode 30 and the ground 50 of the inspection machine are disconnected by the OFF operation of the changeover switch 60, and the good capacitance sensor 1 is set on the holding jig 10 of the inspection machine, and the detection electrode 3 thereof. After measuring the capacitance value between the inspection electrode 30 and the ground 50, a defective capacitance sensor 1 is set in the inspection machine instead, and the detection electrode 3 and the inspection electrode 30 or the ground 50 are connected to each other. Measure the capacitance value between.

Through these operations, it is possible to obtain (1) the capacitance value of a non-defective product when the changeover switch is OFF, and (2) the capacitance value of a defective product when the changeover switch is OFF. In these operations, from the viewpoint of obtaining a highly accurate capacitance value, a plurality of non-defective and defective capacitance sensors 1 are used, and the capacitance value of each capacitance sensor 1 is measured a plurality of times. Is preferable.

Next, the inspection electrode 30 of the inspection machine and the ground 50 are connected by turning on the changeover switch 60, a good capacitance sensor 1 is set in the inspection machine, and the detection electrode 3 is connected to the inspection electrode 30 and the ground 50. After measuring the capacitance value between them, a defective capacitance sensor 1 is set in the inspection machine instead, and the capacitance value between the detection electrode 3 and the inspection electrode 30 or the ground 50 is measured. .. Through these operations, it is possible to obtain (3) the capacitance value of a non-defective product when the changeover switch is ON, and (4) the capacitance value of a defective product when the changeover switch is ON.

After obtaining a plurality of capacitance values in this way, the capacitance values of (1) and (2) are compared and examined to calculate the first determination standard value for comparison when the changeover switch is OFF, and then (3). ) And (4) are compared and examined to calculate the second determination standard value for comparison when the changeover switch is ON.

When the preparation for the inspection is completed, as shown in FIG. 2, the quality of the function of the manufactured capacitance sensor 1 is inspected. Specifically, the inspection electrode 30 and the ground 50 of the inspection machine are disconnected by the OFF operation of the changeover switch 60 (S1), and the capacitance sensor 1 of the measurement sample is positioned and set on the upper surface of the holding jig 10 of the inspection machine. (S2), the detection electrode 3 and the detection circuit 40 are electrically connected (S3), and the capacitance value between the detection electrode 3 of the capacitance sensor 1 and the ground 50 is detected and the computer is used. The capacitance value detected by the device is compared with the first determination standard value (S4).

When setting the capacitance sensor 1 of the measurement sample, if the vacuum pump 14 is driven to exhaust the air from the negative pressure space 11 and the plurality of suction holes 16, the suction holes 16 of the inspection electrode protection layer 15 are thinly bent. The capacitance sensor 1 can be vacuum-sucked without gaps, and the capacitance sensor 1 can be positioned on the upper surface of the inspection electrode protection layer 15 with high accuracy.

As a result of comparison, when the capacitance value is out of the first determination standard value, the capacitance sensor 1 of the measurement sample has a problem in the capacitance detection ability, so the vacuum pump 14 is stopped. After being removed from the holding jig 10 (S5), it is disposed of as a defective product (S6). At this time, the result of the negative comparison can be displayed on the monitor of the computer device, a warning sound can be sounded, and the inspector can be notified.

On the other hand, when the capacitance value is within the first determination standard value, the inspection electrode 30 and the ground 50 of the inspection machine are electrically connected (S7) by the changeover ON operation of the changeover switch 60 to be static. The capacitance value between the detection electrode 3 of the capacitance sensor 1 and the ground 50 is detected, and the amount of change due to the capacitance between the detection electrode 3 of the capacitance sensor 1 and the inspection electrode 30 is detected to be static. The capacitance value and the second determination standard value are compared with a computer device (S8).

As a result of comparison, when the capacitance value is outside the second determination standard value, the capacitance sensor 1 of the measurement sample has a problem in the capacitance detection ability, so the vacuum pump 14 is stopped. After removing it from the holding jig 10 (S9), it is disposed of as a defective product (S10). At this time, the result of the negative comparison can be displayed on the monitor of the computer device, or the inspector's attention can be alerted by the notification of the warning sound.

When the capacitance value is within the second determination standard value, the capacitance sensor 1 has no problem in the capacitance detection ability as a product, so that the vacuum pump 14 is stopped and the holding jig 10 is used. After removing it (S11), it is handled as a non-defective product and shipped (S12).

According to the above, by utilizing the inspection electrode 30, the moving parts of the inspection machine can be significantly reduced, so that the structure of the inspection machine becomes very simple, and the inspection machine can be expected to be miniaturized and manufactured at low cost. Further, since it is not necessary to gradually lower the inspection electrode 30 to the detection electrode 3 over time, the inspection work can be simplified and facilitated. Furthermore, since the inspection is completed in a short time, speeding up of the inspection can be greatly expected. Further, since the inspection electrode 30 formed on the lid plate 12 is not used as it is, but is covered with the inspection electrode protective layer 15 and used, even if a large number of capacitance sensors 1 are inspected, the inspection electrode 30 is used. Damage and deformation can be effectively prevented.

Next, FIG. 3 shows a second embodiment of the present invention. In this case, the holding jig 10 is divided into a detachable lower holding jig 17 and an upper holding jig 18, and each of them is divided into two parts. The inspection electrode 30A is formed into a bolt-shaped male screw to provide a fastening function, and the lower holding jig 17 and the upper holding jig 18 are fastened and fixed by a plurality of inspection electrodes 30A.

The lower holding jig 17 and the upper holding jig 18 are each formed into a flat rectangular shape by, for example, polycarbonate, polyacetal, acrylic resin, etc., and the upper holding jig 18 is laminated on the flat lower holding jig 17. The capacitance sensor 1 is positioned and mounted on the flat upper surface of the upper holding jig 18. In the central portion of the lower holding jig 17 and the upper holding jig 18, fixing fixing holes 19 for fixing to be screwed into the inspection electrode 30A from below are respectively drilled, and a pair of upper and lower fixing holes 19 communicating with each other are shown in the figure. A plurality of fixing holes 19 of the upper holding jig 18 are formed in the female screw holes 19a in which the female screws are carved.

The lower holding jig 17 is formed in a plate shape, and a ring-shaped spacer 20 for adjusting the dimensions is arranged from below on the lower peripheral edge of the fixing hole 19 which is a through hole, and an inspection electrode penetrating the spacer 20 is arranged. 30A is detachably and detachably screwed into the fixing hole 19 and the female screw hole 19a of the upper holding jig 18 from below with high accuracy. The inspection electrode 30A is rotatably screwed into the fixing hole 19 and the female screw hole 19a of the upper holding jig 18, and the flat end thereof faces the detection electrode 3 of the capacitance sensor 1 from below through the gap 21. ..

By rotating and moving the inspection electrode 30A up and down, the height of the gap 21 between the inspection electrode 30A and the detection electrode 3 of the capacitance sensor 1 is appropriately changed. By this change, the capacitance value is changed. It is possible to detect stably in the optimum state and with high accuracy.

The upper holding jig 18 is formed in a block shape, and a central fixing hole 19, in other words, a female screw hole 19a, faces the detection electrode 3 of the capacitance sensor 1 from below. From the lower surface to the inside of the upper holding jig 18, a substantially ring-shaped negative pressure space 11 closed by the flat upper surface of the lower holding jig 17 is formed, and an upper portion is formed above the negative pressure space 11. A plurality of suction holes 16 extending in the thickness direction of the holding jig 18 are connected. The plurality of suction holes 16 are arranged at predetermined intervals, and the open upper end portion of each suction hole 16 is exposed and faces the lower surface of the capacitance sensor 1, and the suction holes 16 are opened. The lower end portion communicates with the upper part of the negative pressure space 11.

The changeover switch 60 in the present embodiment includes a relay 61 that can be easily controlled by a computer device, and when it is turned on and closed, the inspection electrode 30A and the ground 50 are electrically connected and turned off. When opening, the plurality of inspection electrodes 30A and the ground 50 are electrically disconnected. Since the other parts are the same as those in the above embodiment, the description thereof will be omitted.

In this embodiment as well, the same effects as those in the above embodiment can be expected, and since the inspection electrode 30A has a fastening function in addition to the function of forming the capacitance, the lower holding jig 17 is used by the inspection electrode 30A. It is clear that the upper holding jig 18 and the upper holding jig 18 can be firmly fastened and fixed to reduce the number of parts such as dedicated fixing bolts. Further, if the changeover switch 60 is a relay 61, it can be expected that a large current can be easily controlled with a small current and the complicated wiring can be greatly simplified.

Next, FIG. 4 shows a third embodiment of the present invention. In this case, the detection circuit 40 does not output the capacitance value, but converts the capacitance into the detection value. I am trying to output it.

The detection circuit 40 is composed of, for example, a microcontroller or the like, and functions to output a detection value having a correlation with the capacitance value based on the capacitance. The microcontroller is not particularly limited, but is, for example, a type in which a predetermined history is stored in the RAM, a predetermined program is stored in the ROM, and the predetermined program is rewritten as needed by the control controller. Is preferable.

As a specific example of a microcontroller, PSoC (Cypress Semiconductor Corporation) made by Cypress, which has a built-in CPU, RAM, ROM, I / O block, etc. and can design a digital circuit and an analog circuit separately in an IC, is registered. Trademark) and the like.

As shown in FIG. 4, for example, such a detection circuit 40 detects in the range of sampling 0 to 250 in which (1) the inspection electrode 30 of the inspection machine and the ground 50 are disconnected by the OFF operation of the changeover switch 60. The value becomes about 5450, and (2) it is detected when the capacitance increases in the sampling range of 250 to 750 in which the inspection electrode 30 and the ground 50 of the inspection machine are connected by the ON operation of the changeover switch 60. The value becomes a value of about 6350, and (3) when the capacitance changes in the range of sampling 750 to 950, which is disconnected by the OFF operation of the changeover switch 60, the detected value becomes a value of about 5450. Since the other parts are the same as those in the above embodiment, the description thereof will be omitted.

In this embodiment as well, the same action and effect as those in the above embodiment can be expected, and the judgment criteria corresponding to the first and second judgment standard values are determined based on the detected values that are correlated with the capacitance value. Can be done. Furthermore, since it is only necessary to use a commercially available microcontroller, a great reduction in manufacturing cost can be expected.

In the above embodiment, the lid plate 12 of the holding jig 10 is perforated with a plurality of suction holes 16, but the lid plate 12 is made into a porous plate, and the porous lid plate 12 and the plurality of suction holes 16 are integrated. It may be transformed into. Further, an LCR meter may be adopted instead of the detection circuit 40, and the operator may compare the capacitance value detected by the LCR meter with the first and second determination standard values. Further, the detection circuit 40 and the changeover switch 60 can be mounted on the printed wiring board, and the printed wiring board can be mounted on the holding jig 10 to shorten the wiring.

Further, when the upper holding jig 18 is laminated on the lower holding jig 17, unevenness is formed on the contact surfaces of the lower holding jig 17 and the upper holding jig 18, and these unevenness are fitted to be firmly formed. Can be fixed. Further, the airtightness can be maintained by interposing an elastic seal gasket between the lower holding jig 17 and the upper holding jig 18. Further, the fixing hole 19 of the lower holding jig 17 can be formed in the female screw hole 19a in which the female screw is carved.

Further, the computer device has a function of disconnecting the inspection electrode 30 and the ground 50 of the inspection machine by the changeover switch 60, and detecting between the detection electrode 3 of the capacitance sensor 1 and the ground 50, if necessary. When the function of comparing the capacitance detection value such as the capacitance value and the first determination standard value and the result of comparison are that the capacitance detection value is outside the first determination standard value, the capacitance sensor 1 When the capacitance detection value is within the first judgment standard value as a result of comparison with the function of determining a defective product, the function of electrically connecting the inspection electrode 30 and the ground 50 of the inspection machine with the changeover switch 60. And the function of detecting the capacitance detection value between the detection electrode 3 of the capacitance sensor 1 and the ground 50 and comparing the capacitance detection value with the second determination standard value, and as a result of the comparison, the capacitance detection value is If it is outside the second judgment standard value, the capacitance sensor 1 is judged to be a defective product, and if the capacitance detection value is within the second judgment standard value, the capacitance sensor 1 is regarded as a non-defective product. The function of determining can be automatically realized.

The capacitance sensor inspection machine and inspection method according to the present invention are used in the fields of home appliances, mobile devices, computer devices, electronic devices, automobiles and the like.

1 Capacitance sensor 2 Insulation sheet (insulation member)
3 Detection electrode 10 Holding jig 11 Negative pressure space 12 Lid plate (lid material)
14 Vacuum pump (negative pressure means)
15 Inspection electrode protection layer 16 Suction hole 17 Lower holding jig 18 Upper holding jig 19 Fixing hole 19a Female screw hole 21 Gap 30 Inspection electrode 30A Inspection electrode 40 Detection circuit (detection means)
50 Ground 60 Changeover switch (changeover switch means)
61 Relay (changeover switch means)

Claims (5)

It is a capacitance sensor inspection machine that inspects the quality of a capacitance sensor with a detection electrode formed on an insulating member.
A holding jig that positions and holds the capacitance sensor , an inspection electrode capable of forming a capacitance between the detection electrode of the capacitance sensor at intervals and facing the detection electrode, and a capacitance. It includes a detection means for detecting a capacitance detection value based on the capacitance between the detection electrode of the sensor and the ground, and a changeover switch means for electrically connecting and disconnecting the inspection electrode and the ground .
A negative pressure space connected to the negative pressure means is formed in the holding jig, and the negative pressure space and the capacitance sensor can communicate with each other through the suction holes.
A negative pressure space is formed from the upper part to the inside of the holding jig, and the upper surface of the opening is covered with a lid material, and an inspection electrode protective layer on which a capacitance sensor is mounted is laminated on the lid material. An inspection machine for a capacitance sensor, characterized in that a suction hole is provided in the protective layer for the inspection electrode, and the upper portion of the opening faces the capacitance sensor. It is a capacitance sensor inspection machine that inspects the quality of a capacitance sensor with a detection electrode formed on an insulating member.
A holding jig that positions and holds the capacitance sensor, an inspection electrode capable of forming a capacitance between the detection electrode of the capacitance sensor at intervals and facing the detection electrode, and a capacitance. It includes a detection means for detecting a capacitance detection value based on the capacitance between the detection electrode of the sensor and the ground, and a changeover switch means for electrically connecting and disconnecting the inspection electrode and the ground.
A negative pressure space connected to the negative pressure means is formed in the holding jig, and the negative pressure space and the capacitance sensor can communicate with each other through the suction holes.
The holding jig is divided into a lower holding jig and an upper holding jig that can be stacked in the vertical direction, and a capacitance sensor can be mounted on the upper part of the upper holding jig. A fixing hole to be fitted into the inspection electrode is provided in each tool, and a negative pressure space covered with the lower holding jig is formed in the lower part of the upper holding jig, and the negative pressure space is formed in this negative pressure space. An inspection machine for a capacitance sensor, characterized in that a suction hole is connected and the upper portion of the opening faces the capacitance sensor. The inspection electrode is formed in a substantially male screw, and of the lower holding jig and the upper holding jig, at least the fixing hole of the upper holding jig is formed in the female screw hole, and the inspection electrode is screwed into the female screw hole. The capacitance sensor inspection machine according to claim 2, wherein the end thereof faces the capacitance sensor mounted on the upper holding jig. The inspection of the capacitance sensor according to claim 1, 2, or 3 , wherein the detection means converts the capacitance between the detection electrode of the capacitance sensor and the ground into a capacitance value or a detection value and outputs the value. Machine. A method for inspecting a capacitance sensor according to claim 1, wherein the inspection machine for the capacitance sensor is used to inspect the quality of the capacitance sensor.
The inspection electrode of the inspection machine and the ground are disconnected by the changeover switch means, the capacitance sensor is set in the inspection machine, the capacitance detection value between the detection electrode and the ground is detected, and the detected capacitance detection value and the ground are detected. A capacitance sensor characterized in that the capacitance sensor is treated as a defective product when the capacitance detection value is outside the first determination standard value as a result of comparison with the first determination standard value. Inspection method.

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