IL124691A - Infrared radiation detector having a reduced active area - Google Patents

Infrared radiation detector having a reduced active area

Info

Publication number
IL124691A
IL124691A IL12469196A IL12469196A IL124691A IL 124691 A IL124691 A IL 124691A IL 12469196 A IL12469196 A IL 12469196A IL 12469196 A IL12469196 A IL 12469196A IL 124691 A IL124691 A IL 124691A
Authority
IL
Israel
Prior art keywords
microbridge
active area
detector
semiconductor substrate
area
Prior art date
Application number
IL12469196A
Other languages
English (en)
Other versions
IL124691A0 (en
Original Assignee
Lockheed Martin Ir Imaging Sys
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lockheed Martin Ir Imaging Sys filed Critical Lockheed Martin Ir Imaging Sys
Publication of IL124691A0 publication Critical patent/IL124691A0/xx
Publication of IL124691A publication Critical patent/IL124691A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0815—Light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/085—Optical arrangements having a through-hole enabling the optical elements to fulfil an additional optical function, e.g. mirrors or gratings having a through-hole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0859—Sighting arrangements, e.g. cameras
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
    • H04N23/23—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from thermal infrared radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • H10F77/147—Shapes of bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/407—Optical elements or arrangements indirectly associated with the devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
IL12469196A 1995-12-04 1996-12-04 Infrared radiation detector having a reduced active area IL124691A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US790995P 1995-12-04 1995-12-04
PCT/US1996/019261 WO1997021250A1 (en) 1995-12-04 1996-12-04 Infrared radiation detector having a reduced active area

Publications (2)

Publication Number Publication Date
IL124691A0 IL124691A0 (en) 1998-12-06
IL124691A true IL124691A (en) 2001-06-14

Family

ID=21728755

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12469196A IL124691A (en) 1995-12-04 1996-12-04 Infrared radiation detector having a reduced active area

Country Status (7)

Country Link
US (1) US5760398A (cg-RX-API-DMAC7.html)
EP (1) EP0865672B1 (cg-RX-API-DMAC7.html)
JP (1) JP4091979B2 (cg-RX-API-DMAC7.html)
AU (1) AU1408497A (cg-RX-API-DMAC7.html)
DE (1) DE69610118T2 (cg-RX-API-DMAC7.html)
IL (1) IL124691A (cg-RX-API-DMAC7.html)
WO (1) WO1997021250A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7495220B2 (en) 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6515285B1 (en) * 1995-10-24 2003-02-04 Lockheed-Martin Ir Imaging Systems, Inc. Method and apparatus for compensating a radiation sensor for ambient temperature variations
IL124443A (en) * 1995-11-15 2001-11-25 Lockheed Martin Ir Imaging Sys Dual-band multi-level microbridge detector
US6271802B1 (en) * 1997-04-14 2001-08-07 Mems Optical, Inc. Three dimensional micromachined electromagnetic device and associated methods
US6459084B1 (en) 1997-05-30 2002-10-01 University Of Central Florida Area receiver with antenna-coupled infrared sensors
JP3529596B2 (ja) * 1997-08-06 2004-05-24 株式会社東芝 赤外線固体撮像装置及びその製造方法
US6144030A (en) * 1997-10-28 2000-11-07 Raytheon Company Advanced small pixel high fill factor uncooled focal plane array
GB2335077B (en) * 1998-03-04 2003-05-28 Marconi Gec Ltd Radiation detectors
WO2000012986A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including a reflective layer
EP1117978B1 (en) * 1998-08-31 2005-06-15 Daewoo Electronics Corporation Bolometer with a serpentine stress balancing member
WO2000012985A1 (en) * 1998-08-31 2000-03-09 Daewoo Electronics Co., Ltd. Bolometer including an absorber made of a material having a low deposition-temperature and a low heat-conductivity
FR2788129B1 (fr) * 1998-12-30 2001-02-16 Commissariat Energie Atomique Detecteur bolometrique a antenne
GB2353428A (en) * 1999-08-20 2001-02-21 Bayerische Motoren Werke Ag Monitoring system for a vehicle
JP2001264441A (ja) * 2000-01-14 2001-09-26 Seiko Instruments Inc カロリーメーターとその製造方法
WO2001063232A1 (en) * 2000-02-24 2001-08-30 University Of Virginia Patent Foundation High sensitivity infrared sensing apparatus and related method thereof
US6690014B1 (en) 2000-04-25 2004-02-10 Raytheon Company Microbolometer and method for forming
US6730909B2 (en) 2000-05-01 2004-05-04 Bae Systems, Inc. Methods and apparatus for compensating a radiation sensor for temperature variations of the sensor
JP4612932B2 (ja) * 2000-06-01 2011-01-12 ホーチキ株式会社 赤外線検出素子および赤外線２次元イメージセンサ
JP3415817B2 (ja) * 2000-08-28 2003-06-09 アーベル・システムズ株式会社 太陽電池
US6777681B1 (en) 2001-04-25 2004-08-17 Raytheon Company Infrared detector with amorphous silicon detector elements, and a method of making it
US6476392B1 (en) * 2001-05-11 2002-11-05 Irvine Sensors Corporation Method and apparatus for temperature compensation of an uncooled focal plane array
US7049597B2 (en) * 2001-12-21 2006-05-23 Andrew Bodkin Multi-mode optical imager
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems
US8174694B2 (en) * 2001-12-21 2012-05-08 Bodkin Design And Engineering Llc Hyperspectral imaging systems
US7796316B2 (en) 2001-12-21 2010-09-14 Bodkin Design And Engineering Llc Micro-optic shutter
US6815659B2 (en) * 2002-01-14 2004-11-09 Palantyr Research, Llc Optical system and method of making same
JP2004062938A (ja) * 2002-07-25 2004-02-26 Pioneer Electronic Corp 球面収差補正装置及び球面収差補正方法
US6689628B1 (en) 2002-08-15 2004-02-10 Bae Systems Information And Electronic Systems Integration Inc. Method for dense pixel fabrication
JP3944465B2 (ja) 2003-04-11 2007-07-11 三菱電機株式会社 熱型赤外線検出器及び赤外線フォーカルプレーンアレイ
US7013570B2 (en) * 2003-06-18 2006-03-21 Irwin-Industrial Tool Company Stud finder
US7030378B2 (en) * 2003-08-05 2006-04-18 Bae Systems Information And Electronic Systems Integration, Inc. Real-time radiation sensor calibration
US6974219B1 (en) 2004-07-09 2005-12-13 Bae Systems Information And Electronic Systems Integration Inc Zero reflectance design for tilted devices
FR2883417B1 (fr) * 2005-03-16 2007-05-11 Ulis Soc Par Actions Simplifie Detecteur bolometrique, dispositif de detection infrarouge mettant en oeuvre un tel detecteur et procede de fabrication de ce detecteur
FR2884608B1 (fr) * 2005-04-18 2007-05-25 Commissariat Energie Atomique Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
DE102005018965B3 (de) * 2005-04-23 2006-10-12 HAWK Hochschule für angewandte Wissenschaft und Kunst Bildwandler mit einer beheizbaren Wandlerschicht
US7439513B2 (en) * 2005-08-16 2008-10-21 Institut National D'optique Fast microbolometer pixels with integrated micro-optical focusing elements
US7655909B2 (en) * 2006-01-26 2010-02-02 L-3 Communications Corporation Infrared detector elements and methods of forming same
US7459686B2 (en) * 2006-01-26 2008-12-02 L-3 Communications Corporation Systems and methods for integrating focal plane arrays
US7462831B2 (en) * 2006-01-26 2008-12-09 L-3 Communications Corporation Systems and methods for bonding
US7718965B1 (en) 2006-08-03 2010-05-18 L-3 Communications Corporation Microbolometer infrared detector elements and methods for forming same
US8153980B1 (en) 2006-11-30 2012-04-10 L-3 Communications Corp. Color correction for radiation detectors
DE102008005167A1 (de) 2008-01-19 2009-07-23 Testo Ag Wärmebildkamera
US8063370B2 (en) * 2009-01-16 2011-11-22 Hanvision Co., Ltd. Semiconductor device and method of manufacturing the same
DE102009032486A1 (de) * 2009-07-09 2011-01-13 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
US8546757B2 (en) * 2010-04-28 2013-10-01 L-3 Communications Corporation Pixel structure for microbolometer detector
WO2011151756A2 (en) * 2010-05-30 2011-12-08 Technion R&D Foundation Sensing device having a therhal antenna and a method for sensing electromagnetic radiation
DE102010027679A1 (de) 2010-07-20 2012-01-26 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement
JP5644257B2 (ja) * 2010-08-20 2014-12-24 Tdk株式会社 温度センサ
US8808888B2 (en) 2010-08-25 2014-08-19 Applied Materials, Inc. Flow battery systems
US8765514B1 (en) 2010-11-12 2014-07-01 L-3 Communications Corp. Transitioned film growth for conductive semiconductor materials
JP5706174B2 (ja) * 2011-01-26 2015-04-22 三菱電機株式会社 赤外線センサおよび赤外線センサアレイ
FR2977937B1 (fr) * 2011-07-15 2013-08-16 Centre Nat Rech Scient Detecteur bolometrique a performances ameliorees
CN102931201A (zh) * 2011-08-11 2013-02-13 中国科学院微电子研究所 基于红外焦平面阵列的聚能微镜阵列及其制作方法
EP2581721B1 (en) * 2011-10-10 2019-05-08 Samsung Electronics Co., Ltd Infrared thermal detector and method of manufacturing the same
KR101850520B1 (ko) * 2011-10-10 2018-04-19 삼성전자주식회사 적외선 열상 감지기 및 그 제조 방법
US10677656B2 (en) 2012-12-31 2020-06-09 Flir Systems, Inc. Devices and methods for infrared reference pixels
US9606016B2 (en) 2012-12-31 2017-03-28 Flir Systems, Inc. Devices and methods for determining vacuum pressure levels
JP2014235146A (ja) * 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
FR3016997B1 (fr) 2014-01-30 2016-03-04 Commissariat Energie Atomique Detecteur de rayonnement photonique comportant un reseau d'antennes et un support resistif en spirale
KR101570445B1 (ko) * 2014-02-27 2015-11-20 한국과학기술원 적외선 검출기
US10218921B2 (en) * 2016-09-15 2019-02-26 Sensors Unlimited, Inc. Imaging systems and methods
CN114616445A (zh) * 2020-12-30 2022-06-10 深圳市大疆创新科技有限公司 基于热辐射探测器的测温方法、装置及热辐射探测器

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130274A (ja) * 1983-12-19 1985-07-11 Toshiba Corp 固体撮像装置
JPH0682813B2 (ja) * 1984-07-13 1994-10-19 日本電気株式会社 赤外線検出固体撮像素子の製造方法
US4754139A (en) * 1986-04-10 1988-06-28 Aerojet-General Corporation Uncooled high resolution infrared imaging plane
US5300915A (en) * 1986-07-16 1994-04-05 Honeywell Inc. Thermal sensor
US5534111A (en) * 1988-02-29 1996-07-09 Honeywell Inc. Thermal isolation microstructure
US4922116A (en) * 1988-08-04 1990-05-01 Hughes Aircraft Company Flicker free infrared simulator with resistor bridges
US5010251A (en) * 1988-08-04 1991-04-23 Hughes Aircraft Company Radiation detector array using radiation sensitive bridges
US5021663B1 (en) * 1988-08-12 1997-07-01 Texas Instruments Inc Infrared detector
US5286976A (en) * 1988-11-07 1994-02-15 Honeywell Inc. Microstructure design for high IR sensitivity
US4961626A (en) * 1989-02-21 1990-10-09 United Techologies Corporation Direct incorporation of night vision in a helmet mounted display
US5113076A (en) * 1989-12-19 1992-05-12 Santa Barbara Research Center Two terminal multi-band infrared radiation detector
US5401968A (en) * 1989-12-29 1995-03-28 Honeywell Inc. Binary optical microlens detector array
HK1007597A1 (en) * 1990-04-26 1999-04-16 The Commonwealth Of Australia Semiconductor film bolometer thermal infrared detector
GB2248964A (en) * 1990-10-17 1992-04-22 Philips Electronic Associated Plural-wavelength infrared detector devices
US5171733A (en) * 1990-12-04 1992-12-15 The Regents Of The University Of California Antenna-coupled high Tc superconducting microbolometer
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
JPH07500913A (ja) * 1991-11-04 1995-01-26 ハネウエル・インコーポレーテッド 薄膜ピロ電気画像アレイ
WO1993026050A1 (en) * 1992-06-11 1993-12-23 Honeywell Inc. Two-level microbridge bolometer imaging array and method of making same
DE69221901T2 (de) * 1992-07-08 1998-01-29 Honeywell Inc Mikrostruktur-entwurf für hohe ir - empfindlichkeit
US5399897A (en) * 1993-11-29 1995-03-21 Raytheon Company Microstructure and method of making such structure
US5446284A (en) * 1994-01-25 1995-08-29 Loral Infrared & Imaging Systems, Inc. Monolithic detector array apparatus
US5486698A (en) * 1994-04-19 1996-01-23 Texas Instruments Incorporated Thermal imaging system with integrated thermal chopper
US5512748A (en) * 1994-07-26 1996-04-30 Texas Instruments Incorporated Thermal imaging system with a monolithic focal plane array and method
US5603848A (en) * 1995-01-03 1997-02-18 Texas Instruments Incorporated Method for etching through a substrate to an attached coating
US5626773A (en) * 1995-01-03 1997-05-06 Texas Instruments Incorporated Structure and method including dry etching techniques for forming an array of thermal sensitive elements
US5572060A (en) * 1995-02-01 1996-11-05 Southern Methodist University Uncooled YBaCuO thin film infrared detector
US5627082A (en) * 1995-03-29 1997-05-06 Texas Instruments Incorporated High thermal resistance backfill material for hybrid UFPA's
JP3287173B2 (ja) * 1995-04-07 2002-05-27 三菱電機株式会社 赤外線検出素子
US5602393A (en) * 1995-06-07 1997-02-11 Hughes Aircraft Company Microbolometer detector element with enhanced sensitivity

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7495220B2 (en) 1995-10-24 2009-02-24 Bae Systems Information And Electronics Systems Integration Inc. Uncooled infrared sensor

Also Published As

Publication number Publication date
DE69610118T2 (de) 2001-02-01
IL124691A0 (en) 1998-12-06
DE69610118D1 (de) 2000-10-05
WO1997021250A1 (en) 1997-06-12
JP4091979B2 (ja) 2008-05-28
AU1408497A (en) 1997-06-27
EP0865672A1 (en) 1998-09-23
EP0865672B1 (en) 2000-08-30
US5760398A (en) 1998-06-02
JP2000501832A (ja) 2000-02-15

Similar Documents

Publication Publication Date Title
US5760398A (en) Infrared radiation detector having a reduced active area
US6157404A (en) Imaging system including an array of dual-band microbridge detectors
US7495220B2 (en) Uncooled infrared sensor
US6515285B1 (en) Method and apparatus for compensating a radiation sensor for ambient temperature variations
US6621083B2 (en) High-absorption wide-band pixel for bolometer arrays
US6888141B2 (en) Radiation sensor with photo-thermal gain
EP2084501B1 (en) Dual band imager with visible or swir detectors combined with uncooled lwir detectors
US4679068A (en) Composite visible/thermal-infrared imaging system
US9658109B2 (en) Non-contact thermal sensor module
US6770882B2 (en) Micromachined pyro-optical structure
US9261411B2 (en) Uncooled microbolometer detector and array for terahertz detection
US6459084B1 (en) Area receiver with antenna-coupled infrared sensors
US7432506B2 (en) Method and system for enhanced radiation detection
KR101180592B1 (ko) 가시광선 및 원적외선 통합 검출용 광검출기
US6956213B2 (en) Alternative pixel shapes for uncooled microbolometers
US20050061977A1 (en) Radiation sensor with electro-thermal gain

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
HP Change in proprietorship
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees