ID25549A - COMPOSITION OF LIGHT RESISTANCE CONTAINING POLYMERIC POLYMER POLYMER WITH LABILE ACID PLANTING GROUP - Google Patents
COMPOSITION OF LIGHT RESISTANCE CONTAINING POLYMERIC POLYMER POLYMER WITH LABILE ACID PLANTING GROUPInfo
- Publication number
- ID25549A ID25549A IDW20000568A ID20000568A ID25549A ID 25549 A ID25549 A ID 25549A ID W20000568 A IDW20000568 A ID W20000568A ID 20000568 A ID20000568 A ID 20000568A ID 25549 A ID25549 A ID 25549A
- Authority
- ID
- Indonesia
- Prior art keywords
- polymer
- composition
- light resistance
- containing polymeric
- resistance containing
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D487/00—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00
- C07D487/02—Heterocyclic compounds containing nitrogen atoms as the only ring hetero atoms in the condensed system, not provided for by groups C07D451/00 - C07D477/00 in which the condensed system contains two hetero rings
- C07D487/04—Ortho-condensed systems
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
- C08F232/08—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having condensed rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
- C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US92890097A | 1997-09-12 | 1997-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
ID25549A true ID25549A (en) | 2000-10-12 |
Family
ID=25456971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IDW20000568A ID25549A (en) | 1997-09-12 | 1998-09-03 | COMPOSITION OF LIGHT RESISTANCE CONTAINING POLYMERIC POLYMER POLYMER WITH LABILE ACID PLANTING GROUP |
Country Status (11)
Country | Link |
---|---|
EP (1) | EP1021750A1 (en) |
JP (1) | JP4416941B2 (en) |
KR (1) | KR100572899B1 (en) |
CN (1) | CN1251021C (en) |
AU (1) | AU747516C (en) |
HK (1) | HK1030992A1 (en) |
ID (1) | ID25549A (en) |
MY (1) | MY123980A (en) |
RU (1) | RU2199773C2 (en) |
TW (1) | TWI235285B (en) |
WO (1) | WO1999014635A1 (en) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU3303599A (en) * | 1998-02-23 | 1999-09-06 | B.F. Goodrich Company, The | Polycyclic resist compositions with increased etch resistance |
JP5095048B2 (en) * | 1999-11-15 | 2012-12-12 | 信越化学工業株式会社 | Polymer compound, resist material, and pattern forming method |
EP1130468A3 (en) * | 2000-02-25 | 2003-07-30 | Shipley Company LLC | Polymer and photoresist compositions |
US6531627B2 (en) * | 2000-04-27 | 2003-03-11 | Shin-Etsu Chemical Co., Ltd. | Ester compounds, polymers, resist compositions and patterning process |
JP3997381B2 (en) * | 2000-04-28 | 2007-10-24 | 信越化学工業株式会社 | Novel ester compound having alicyclic structure and process for producing the same |
JP4544389B2 (en) * | 2000-04-28 | 2010-09-15 | 信越化学工業株式会社 | Polymer compound, resist material, and pattern forming method |
TWI284782B (en) * | 2000-04-28 | 2007-08-01 | Shinetsu Chemical Co | Polymers, resist compositions and patterning process |
JP3997382B2 (en) * | 2000-04-28 | 2007-10-24 | 信越化学工業株式会社 | Novel ester compound having alicyclic structure and process for producing the same |
JP4626736B2 (en) * | 2000-10-04 | 2011-02-09 | Jsr株式会社 | Optically transparent material and liquid crystal display substrate material containing cyclic olefin copolymer |
TW544455B (en) * | 2001-01-17 | 2003-08-01 | Shinetsu Chemical Co | Ether, polymer, resist composition and patterning process |
KR100948708B1 (en) * | 2002-04-08 | 2010-03-22 | 니폰 제온 가부시키가이샤 | Norbornene-based ring-opening polymerization polymer, product of hydrogenation of norbornene-based ring-opening polymerization polymer, and processes for producing these |
US7989571B2 (en) | 2002-07-10 | 2011-08-02 | Lg Chem, Ltd. | Method for producing norbornene monomer composition, norbornene polymer prepared therefrom, optical film comprising the norbornene polymer, and method for producing the norbornene polymer |
KR100561068B1 (en) | 2002-07-10 | 2006-03-15 | 주식회사 엘지화학 | Norbornene-ester based addition polymer and method for preparing the same |
JP4018101B2 (en) * | 2002-07-10 | 2007-12-05 | エルジ・ケム・リミテッド | Norbornene-ester addition polymer and process for producing the same |
JP4242833B2 (en) | 2002-07-10 | 2009-03-25 | エルジー・ケム・リミテッド | Method for producing norbornene-based addition polymer containing ester group or acetyl group |
TWI344578B (en) * | 2003-02-20 | 2011-07-01 | Promerus Llc | Dissolution rate modifiers for photoresist compositions |
WO2005049668A1 (en) * | 2003-11-18 | 2005-06-02 | Jsr Corporation | Novel (co)polymer, process for producing the same, and process for producing carboxylated (co)polymer |
JP2006100563A (en) * | 2004-09-29 | 2006-04-13 | Sumitomo Bakelite Co Ltd | Semiconductor device |
JP4554665B2 (en) | 2006-12-25 | 2010-09-29 | 富士フイルム株式会社 | PATTERN FORMATION METHOD, POSITIVE RESIST COMPOSITION FOR MULTIPLE DEVELOPMENT USED FOR THE PATTERN FORMATION METHOD, NEGATIVE DEVELOPMENT SOLUTION USED FOR THE PATTERN FORMATION METHOD, AND NEGATIVE DEVELOPMENT RINSE SOLUTION USED FOR THE PATTERN FORMATION METHOD |
US8637229B2 (en) | 2006-12-25 | 2014-01-28 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
US8530148B2 (en) | 2006-12-25 | 2013-09-10 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
US8034547B2 (en) | 2007-04-13 | 2011-10-11 | Fujifilm Corporation | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method |
US8603733B2 (en) | 2007-04-13 | 2013-12-10 | Fujifilm Corporation | Pattern forming method, and resist composition, developer and rinsing solution used in the pattern forming method |
US8476001B2 (en) | 2007-05-15 | 2013-07-02 | Fujifilm Corporation | Pattern forming method |
JP4558064B2 (en) | 2007-05-15 | 2010-10-06 | 富士フイルム株式会社 | Pattern formation method |
JP4617337B2 (en) | 2007-06-12 | 2011-01-26 | 富士フイルム株式会社 | Pattern formation method |
US8632942B2 (en) | 2007-06-12 | 2014-01-21 | Fujifilm Corporation | Method of forming patterns |
US8617794B2 (en) | 2007-06-12 | 2013-12-31 | Fujifilm Corporation | Method of forming patterns |
EP2157477B1 (en) | 2007-06-12 | 2014-08-06 | FUJIFILM Corporation | Use of a resist composition for negative working-type development, and method for pattern formation using the resist composition |
JP4590431B2 (en) | 2007-06-12 | 2010-12-01 | 富士フイルム株式会社 | Pattern formation method |
JP5332883B2 (en) * | 2009-04-30 | 2013-11-06 | 住友ベークライト株式会社 | Photosensitive composition, optical waveguide, optical wiring, opto-electric hybrid board, electronic device, and method for forming optical waveguide |
JP6459192B2 (en) * | 2014-03-20 | 2019-01-30 | 住友ベークライト株式会社 | Photosensitive resin composition |
KR102324819B1 (en) | 2014-12-12 | 2021-11-11 | 삼성전자주식회사 | Photoresist polymers, photoresist compositions, methods of forming patterns and methods of manufacturing semiconductor devices |
KR101746789B1 (en) | 2014-12-18 | 2017-06-13 | 주식회사 엘지화학 | Vertical alignment layer comprising a cyclic olefin copolymer |
GB201522304D0 (en) | 2015-12-17 | 2016-02-03 | Mars Inc | Food product for reducing muscle breakdown |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4106943A (en) * | 1973-09-27 | 1978-08-15 | Japan Synthetic Rubber Co., Ltd. | Photosensitive cross-linkable azide containing polymeric composition |
US4571375A (en) * | 1983-10-24 | 1986-02-18 | Benedikt George M | Ring-opened polynorbornene negative photoresist with bisazide |
JP3804138B2 (en) * | 1996-02-09 | 2006-08-02 | Jsr株式会社 | Radiation sensitive resin composition for ArF excimer laser irradiation |
KR100536824B1 (en) * | 1996-03-07 | 2006-03-09 | 스미토모 베이클라이트 가부시키가이샤 | Photoresist compositions comprising polycyclic polymers with acid labile pendant groups |
KR100261022B1 (en) * | 1996-10-11 | 2000-09-01 | 윤종용 | Chemically amplified resist composition |
-
1998
- 1998-09-03 AU AU92199/98A patent/AU747516C/en not_active Ceased
- 1998-09-03 EP EP98944729A patent/EP1021750A1/en not_active Withdrawn
- 1998-09-03 ID IDW20000568A patent/ID25549A/en unknown
- 1998-09-03 KR KR1020007002642A patent/KR100572899B1/en not_active IP Right Cessation
- 1998-09-03 JP JP2000512109A patent/JP4416941B2/en not_active Expired - Fee Related
- 1998-09-03 RU RU2000109327/04A patent/RU2199773C2/en not_active IP Right Cessation
- 1998-09-03 CN CNB988089661A patent/CN1251021C/en not_active Expired - Fee Related
- 1998-09-03 WO PCT/US1998/018353 patent/WO1999014635A1/en not_active Application Discontinuation
- 1998-09-10 MY MYPI98004156A patent/MY123980A/en unknown
- 1998-10-23 TW TW087115292A patent/TWI235285B/en not_active IP Right Cessation
-
2001
- 2001-03-12 HK HK01101755A patent/HK1030992A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2001516804A (en) | 2001-10-02 |
EP1021750A1 (en) | 2000-07-26 |
KR20010023940A (en) | 2001-03-26 |
CN1251021C (en) | 2006-04-12 |
TWI235285B (en) | 2005-07-01 |
RU2199773C2 (en) | 2003-02-27 |
AU747516B2 (en) | 2002-05-16 |
JP4416941B2 (en) | 2010-02-17 |
CN1276884A (en) | 2000-12-13 |
MY123980A (en) | 2006-06-30 |
AU9219998A (en) | 1999-04-05 |
AU747516C (en) | 2003-07-24 |
KR100572899B1 (en) | 2006-04-24 |
WO1999014635A1 (en) | 1999-03-25 |
HK1030992A1 (en) | 2001-05-25 |
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