HUP0402078A2 - Method and installation for densifying porous substrate by gas-phase chemical infiltration - Google Patents
Method and installation for densifying porous substrate by gas-phase chemical infiltrationInfo
- Publication number
- HUP0402078A2 HUP0402078A2 HU0402078A HUP0402078A HUP0402078A2 HU P0402078 A2 HUP0402078 A2 HU P0402078A2 HU 0402078 A HU0402078 A HU 0402078A HU P0402078 A HUP0402078 A HU P0402078A HU P0402078 A2 HUP0402078 A2 HU P0402078A2
- Authority
- HU
- Hungary
- Prior art keywords
- furnace
- reactive gas
- gas
- temperature
- heated
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000000126 substance Substances 0.000 title abstract 2
- 230000008595 infiltration Effects 0.000 title 1
- 238000001764 infiltration Methods 0.000 title 1
- 238000009434 installation Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000002243 precursor Substances 0.000 abstract 2
- 235000015489 Emblica officinalis Nutrition 0.000 abstract 1
- 240000009120 Phyllanthus emblica Species 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/4557—Heated nozzles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/10—Chemical vapor infiltration, i.e. CVI
Abstract
A találmány tárgya eljárás és berendezés porózus munkadarabokporozitásának csökkentésére reaktív gáz kémiai átgőzölögtetésévelbejuttatott beágyazóanyaggal, ahol a gázban a beágyazóanyag legalábbegy, gáz halmazállapotú prekurzora van jelen, és az eljárás során amunkadarabot kemence adagterében helyezik el, továbbá a kemencében azmunkadarabot a reaktív gázban jelenlévő prekurzor beágyazóanyaggáalakulásának hőmérsékletére hevítik, továbbá a reaktív gázt akemencébe vezetik, és a kemencébe belépő reaktív gázt felhevítik úgy,hogy gázhevítő téren juttatják át, amelyet a reaktív gáz kemencénbelüli áramlásának irányából nézve az adagtér belépő oldalán rendeznekel, valamint a reaktív gázt a kemencébe juttatás előtt előhevítenekúgy, hogy a kemencébe vezetendő reaktív gázt a környezeti hőmérsékletés az munkadarabok hevítésének hőmérséklete közötti hőmérsékletrehevítik. ÓThe subject of the invention is a method and equipment for reducing the porosity of porous workpieces with an embedding material introduced by chemical vaporization of a reactive gas, where at least one gaseous precursor of the embedding material is present in the gas, and during the process, a piece of amla is placed in the feed space of a furnace, and in the furnace, the workpiece is heated to the temperature at which the precursor present in the reactive gas becomes the embedding material , and the reactive gas is led into a furnace, and the reactive gas entering the furnace is heated by passing it through a gas heating space, which is arranged on the entrance side of the dose space in terms of the direction of the flow of the reactive gas inside the furnace, and the reactive gas is preheated before entering the furnace so that it enters the furnace the reactive gas to be conducted is heated to a temperature between the ambient temperature and the temperature of heating the workpieces. HE
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/034,848 US6953605B2 (en) | 2001-12-26 | 2001-12-26 | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
PCT/FR2002/004554 WO2003056059A1 (en) | 2001-12-26 | 2002-12-24 | Method and installation for densifying porous substrate by gas-phase chemical infiltration |
Publications (1)
Publication Number | Publication Date |
---|---|
HUP0402078A2 true HUP0402078A2 (en) | 2005-01-28 |
Family
ID=21878976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HU0402078A HUP0402078A2 (en) | 2001-12-26 | 2002-12-24 | Method and installation for densifying porous substrate by gas-phase chemical infiltration |
Country Status (17)
Country | Link |
---|---|
US (2) | US6953605B2 (en) |
EP (1) | EP1458902B1 (en) |
JP (1) | JP4426302B2 (en) |
KR (1) | KR100896854B1 (en) |
CN (1) | CN100371493C (en) |
AT (1) | ATE340880T1 (en) |
AU (1) | AU2002364339B2 (en) |
BR (1) | BR0215313B1 (en) |
CA (1) | CA2471672C (en) |
DE (1) | DE60215048T2 (en) |
ES (1) | ES2274121T3 (en) |
HU (1) | HUP0402078A2 (en) |
IL (1) | IL162659A0 (en) |
MX (1) | MXPA04006329A (en) |
RU (1) | RU2319682C2 (en) |
UA (1) | UA78733C2 (en) |
WO (1) | WO2003056059A1 (en) |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6669988B2 (en) * | 2001-08-20 | 2003-12-30 | Goodrich Corporation | Hardware assembly for CVI/CVD processes |
US7476419B2 (en) * | 1998-10-23 | 2009-01-13 | Goodrich Corporation | Method for measurement of weight during a CVI/CVD process |
US20040255862A1 (en) * | 2001-02-26 | 2004-12-23 | Lee Chung J. | Reactor for producing reactive intermediates for low dielectric constant polymer thin films |
US6758909B2 (en) * | 2001-06-05 | 2004-07-06 | Honeywell International Inc. | Gas port sealing for CVD/CVI furnace hearth plates |
FR2834713B1 (en) * | 2002-01-15 | 2004-04-02 | Snecma Moteurs | PROCESS AND PLANT FOR DENSIFICATION OF SUBSTRATES BY CHEMICAL STEAM INFILTRATION |
US20050158468A1 (en) * | 2004-01-20 | 2005-07-21 | John Gaffney | Method for manufacturing carbon composites |
US20060201426A1 (en) * | 2004-05-25 | 2006-09-14 | Lee Chung J | Reactor for Producing Reactive Intermediates for Transport Polymerization |
US7799375B2 (en) * | 2004-06-30 | 2010-09-21 | Poco Graphite, Inc. | Process for the manufacturing of dense silicon carbide |
US7332195B2 (en) * | 2004-08-26 | 2008-02-19 | Honeywell International Inc. | Chemical vapor deposition method |
FR2881145B1 (en) * | 2005-01-24 | 2007-11-23 | Snecma Propulsion Solide Sa | METHOD OF GAS PHASE CHEMICAL INFILTRATION FOR THE DENSIFICATION OF POROUS SUBSTRATES WITH PYROLYTIC CARBON |
FR2882064B1 (en) | 2005-02-17 | 2007-05-11 | Snecma Propulsion Solide Sa | PROCESS FOR THE DENSIFICATION OF THIN POROUS SUBSTRATES BY CHEMICAL VAPOR PHASE INFILTRATION AND DEVICE FOR LOADING SUCH SUBSTRATES |
US20060194059A1 (en) * | 2005-02-25 | 2006-08-31 | Honeywell International Inc. | Annular furnace spacers and method of using same |
US20060194060A1 (en) * | 2005-02-25 | 2006-08-31 | Honeywell International | Furnace spacers for spacing preforms in a furnace |
US20060274474A1 (en) * | 2005-06-01 | 2006-12-07 | Lee Chung J | Substrate Holder |
US20070014990A1 (en) | 2005-07-14 | 2007-01-18 | Honeywell International Inc. | Support structure for radiative heat transfer |
US20070184179A1 (en) * | 2006-02-09 | 2007-08-09 | Akshay Waghray | Methods and apparatus to monitor a process of depositing a constituent of a multi-constituent gas during production of a composite brake disc |
FR2897422B1 (en) * | 2006-02-14 | 2008-05-16 | Messier Bugatti Sa | SEALING DEVICE FOR GAS INTAKE OF AN OVEN OR THE LIKE |
US7771194B2 (en) * | 2006-05-26 | 2010-08-10 | Honeywell International Inc. | Gas preheater for chemical vapor processing furnace having circuitous passages |
CN101395298B (en) * | 2006-10-29 | 2011-10-05 | 马塞尔-布加蒂股份有限公司 | Method of densifying porous articles |
FR2924426B1 (en) * | 2007-11-30 | 2011-06-03 | Messier Bugatti | PROCESS FOR MANUFACTURING COMPOSITE MATERIAL PARTS WITH CARBON FIBER REINFORCEMENT |
JP5730496B2 (en) * | 2009-05-01 | 2015-06-10 | 株式会社日立国際電気 | Heat treatment apparatus, semiconductor device manufacturing method, and substrate processing method |
US8177884B2 (en) * | 2009-05-20 | 2012-05-15 | United Technologies Corporation | Fuel deoxygenator with porous support plate |
US20110064891A1 (en) * | 2009-09-16 | 2011-03-17 | Honeywell International Inc. | Methods of rapidly densifying complex-shaped, asymmetrical porous structures |
KR101678661B1 (en) * | 2009-11-18 | 2016-11-22 | 알이씨 실리콘 인코포레이티드 | Fluid bed reactor |
US20120090805A1 (en) * | 2010-10-18 | 2012-04-19 | Uzialko Stanislaw P | Systems and methods for a thermistor furnace |
FR2993044B1 (en) * | 2012-07-04 | 2014-08-08 | Herakles | LOADING DEVICE AND INSTALLATION FOR THE DENSIFICATION OF POROUS, TRUNCONIC AND STACKABLE PREFORMS |
FR2993555B1 (en) * | 2012-07-19 | 2015-02-20 | Herakles | INSTALLATION OF HEAVY DUTY CHEMICAL INFILTRATION WITH HIGH LOAD CAPACITY |
US11326255B2 (en) * | 2013-02-07 | 2022-05-10 | Uchicago Argonne, Llc | ALD reactor for coating porous substrates |
US9523149B2 (en) | 2013-03-14 | 2016-12-20 | Rolls-Royce Corporation | Rapid ceramic matrix composite production method |
FR3007511B1 (en) * | 2013-06-19 | 2017-09-08 | Herakles | INSTALLATION FOR THERMAL TREATMENTS OF PRODUCTS IN COMPOSITE MATERIAL COMPRISING DELOCALIZED TEMPERATURE MEANS |
FR3018526B1 (en) * | 2014-03-14 | 2021-06-11 | Herakles | CVI DENSIFICATION INSTALLATION INCLUDING A HIGH-CAPACITY PREHEATING ZONE |
US10648075B2 (en) * | 2015-03-23 | 2020-05-12 | Goodrich Corporation | Systems and methods for chemical vapor infiltration and densification of porous substrates |
US10982319B2 (en) | 2015-08-21 | 2021-04-20 | Flisom Ag | Homogeneous linear evaporation source |
TWI624554B (en) * | 2015-08-21 | 2018-05-21 | 弗里松股份有限公司 | Evaporation source |
RU2607401C1 (en) * | 2015-09-25 | 2017-01-10 | Олег Викторович Барзинский | Method of producing carbon-carbon composite material |
CN105463410B (en) * | 2015-12-15 | 2018-09-21 | 西安鑫垚陶瓷复合材料有限公司 | The method and gas piping structure that a kind of CVI for open containers is densified |
US10407769B2 (en) * | 2016-03-18 | 2019-09-10 | Goodrich Corporation | Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces |
EP3721159A4 (en) * | 2017-12-05 | 2021-08-18 | Mécanique Analytique Inc. | Gas chromatography modular oven |
CN108048817A (en) * | 2017-12-12 | 2018-05-18 | 湖南顶立科技有限公司 | A kind of chemical vapor deposition stove |
FR3084892B1 (en) | 2018-08-10 | 2020-11-06 | Safran Ceram | PROCESS FOR DENSIFICATION BY CHEMICAL INFILTRATION IN THE GASEOUS PHASE OF POROUS ANNULAR SUBSTRATES |
US11111578B1 (en) | 2020-02-13 | 2021-09-07 | Uchicago Argonne, Llc | Atomic layer deposition of fluoride thin films |
CN113683436B (en) * | 2021-08-27 | 2022-09-16 | 清华大学 | Air inlet assembly, vapor deposition device and preparation method of composite material of vapor deposition device |
CN114225843B (en) * | 2021-12-06 | 2022-08-05 | 中南大学 | Zone-limited directional flow full-saturation infiltration reactor and method for preparing carbon/carbon composite material brake disc |
FR3130276A1 (en) * | 2021-12-15 | 2023-06-16 | Safran Ceramics | Installation of thermochemical treatment and method of manufacturing a friction part in composite material |
US11932941B1 (en) | 2021-12-29 | 2024-03-19 | Rolls-Royce High Temperature Composites, Inc. | Load assemblies for loading parts in a furnace |
US11901169B2 (en) | 2022-02-14 | 2024-02-13 | Uchicago Argonne, Llc | Barrier coatings |
FR3132718A1 (en) * | 2022-02-16 | 2023-08-18 | Safran Landing Systems | Gas phase chemical infiltration densification process with monopile trays for semi-forced flow |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3663283A (en) * | 1969-10-02 | 1972-05-16 | Richard A Hebert | Process and apparatus for the production of finely-divided metal oxides |
JPS5222012A (en) | 1975-08-12 | 1977-02-19 | Matsushita Electric Ind Co Ltd | Manufacture of nonnburnt carbon rods |
US4141696A (en) | 1978-04-28 | 1979-02-27 | Texaco Inc. | Process for gas cleaning with reclaimed water and apparatus for water reclamation |
US4416748A (en) | 1981-09-08 | 1983-11-22 | Concord Scientific Corporation | Process for reduction of the content of SO2 and/or NOx in flue gas |
US4582632A (en) | 1983-04-11 | 1986-04-15 | Kabushiki Kaisha Kobe Seiko Sho | Non-permeable carbonaceous formed bodies and method for producing same |
US4738272A (en) | 1984-05-21 | 1988-04-19 | Mcconnell Christopher F | Vessel and system for treating wafers with fluids |
JPS6220309A (en) | 1985-07-18 | 1987-01-28 | Nec Corp | Light irradiation furnace |
JPS62249423A (en) | 1986-04-23 | 1987-10-30 | Hitachi Ltd | Processing apparatus |
US4920017A (en) | 1986-11-20 | 1990-04-24 | Electric Power Research Institute, Inc. | Porous and porous-nonporous composites for battery electrodes |
US4835074A (en) | 1987-09-25 | 1989-05-30 | The Electrosynthesis Company, Inc. | Modified carbons and electrochemical cells containing the same |
US4957593A (en) | 1989-03-07 | 1990-09-18 | University Of Connecticut | Modified composite electrodes with renewable surface for electrochemical applications and method of making same |
US5225378A (en) | 1990-11-16 | 1993-07-06 | Tokyo Electron Limited | Method of forming a phosphorus doped silicon film |
US5362228A (en) * | 1991-11-04 | 1994-11-08 | Societe Europeenne De Propulsion | Apparatus for preheating a flow of gas in an installation for chemical vapor infiltration, and a densification method using the apparatus |
JP2987663B2 (en) | 1992-03-10 | 1999-12-06 | 株式会社日立製作所 | Substrate processing equipment |
US5254374A (en) * | 1992-04-08 | 1993-10-19 | The United States Of America As Represented By The United States Department Of Energy | Chemical vapor infiltration using microwave energy |
US5567267A (en) | 1992-11-20 | 1996-10-22 | Tokyo Electron Limited | Method of controlling temperature of susceptor |
JPH0828335B2 (en) | 1992-11-30 | 1996-03-21 | 株式会社半導体プロセス研究所 | Semiconductor device manufacturing equipment |
US5348774A (en) * | 1993-08-11 | 1994-09-20 | Alliedsignal Inc. | Method of rapidly densifying a porous structure |
FR2711646B1 (en) * | 1993-10-27 | 1996-02-09 | Europ Propulsion | Method of chemical vapor infiltration of a pyrocarbon matrix within a porous substrate with establishment of a temperature gradient in the substrate. |
FR2711647B1 (en) * | 1993-10-27 | 1996-01-19 | Europ Propulsion | Process for the chemical vapor infiltration of a material into a porous substrate at a controlled surface temperature. |
FR2714076B1 (en) * | 1993-12-16 | 1996-03-15 | Europ Propulsion | Method for densifying porous substrates by chemical vapor infiltration of silicon carbide. |
US5582802A (en) | 1994-07-05 | 1996-12-10 | Spokoyny; Felix E. | Catalytic sulfur trioxide flue gas conditioning |
EP0832863B1 (en) * | 1994-11-16 | 2002-04-03 | The B.F. Goodrich Company | Pressure gradient CVI/CVD apparatus, process, and product |
US5480678A (en) | 1994-11-16 | 1996-01-02 | The B. F. Goodrich Company | Apparatus for use with CVI/CVD processes |
FR2727692A1 (en) | 1994-12-05 | 1996-06-07 | Europ Propulsion | GAS EXTRACTION DEVICE FOR A CHEMICAL STEAM INFILTRATION OVEN OR VAPOR DEPOSIT IN A PLANT FOR MANUFACTURING PARTS OF COMPOSITE MATERIAL |
FR2732677B1 (en) * | 1995-04-07 | 1997-06-27 | Europ Propulsion | CHEMICAL STEAM INFILTRATION PROCESS WITH VARIABLE INFILTRATION PARAMETERS |
FR2733254B1 (en) * | 1995-04-18 | 1997-07-18 | Europ Propulsion | CHEMICAL VAPOR INFILTRATION PROCESS FOR THE DENSIFICATION OF POROUS SUBSTRATES DISPOSED IN RING STACKS |
US5707432A (en) | 1996-06-14 | 1998-01-13 | Cabot Corporation | Modified carbon products and inks and coatings containing modified carbon products |
FR2754813B1 (en) | 1996-10-18 | 1999-01-15 | Europ Propulsion | DENSIFICATION OF POROUS SUBSTRATES DISPOSED IN ANNULAR CELLS BY CHEMICAL VAPOR INFILTRATION WITH TEMPERATURE GRADIENT |
US5840414A (en) | 1996-11-15 | 1998-11-24 | International Fuel Cells, Inc. | Porous carbon body with increased wettability by water |
US6248434B1 (en) | 1996-12-24 | 2001-06-19 | Widia Gmbh | Composite body comprising a hard metal, cermet or ceramic substrate body and method of producing same |
US5942347A (en) | 1997-05-20 | 1999-08-24 | Institute Of Gas Technology | Proton exchange membrane fuel cell separator plate |
US20030049372A1 (en) | 1997-08-11 | 2003-03-13 | Cook Robert C. | High rate deposition at low pressures in a small batch reactor |
US6007330A (en) | 1998-03-12 | 1999-12-28 | Cosmos Factory, Inc. | Liquid precursor delivery system |
AU3471099A (en) | 1998-04-03 | 1999-10-25 | Cabot Corporation | Modified pigments having improved dispersing properties |
US6024848A (en) | 1998-04-15 | 2000-02-15 | International Fuel Cells, Corporation | Electrochemical cell with a porous support plate |
FR2784695B1 (en) * | 1998-10-20 | 2001-11-02 | Snecma | DENSIFICATION OF POROUS STRUCTURES BY CHEMICAL STEAM INFILTRATION |
US6440220B1 (en) | 1998-10-23 | 2002-08-27 | Goodrich Corporation | Method and apparatus for inhibiting infiltration of a reactive gas into porous refractory insulation |
US6144802A (en) | 1999-06-29 | 2000-11-07 | Hyundai Electronics Industries Co., Ltd. | Fluid heater for semiconductor device |
WO2001003168A1 (en) | 1999-07-02 | 2001-01-11 | Tokyo Electron Limited | Semiconductor manufacture equipment |
US6258476B1 (en) | 1999-09-02 | 2001-07-10 | International Fuel Cells, Llc | Porous carbon body with increased wettability by water |
KR100783841B1 (en) | 2000-05-31 | 2007-12-10 | 동경 엘렉트론 주식회사 | Heat treatment system |
US20030091891A1 (en) | 2001-01-16 | 2003-05-15 | Tomoaki Yoshida | Catalyst composition for cell, gas diffusion layer, and fuel cell comprising the same |
US6645287B2 (en) | 2001-04-27 | 2003-11-11 | Cabot Corporation | Coating compositions comprising high t-area carbon products |
US6787029B2 (en) | 2001-08-31 | 2004-09-07 | Cabot Corporation | Material for chromatography |
US6572371B1 (en) * | 2002-05-06 | 2003-06-03 | Messier-Bugatti | Gas preheater and process for controlling distribution of preheated reactive gas in a CVI furnace for densification of porous annular substrates |
-
2001
- 2001-12-26 US US10/034,848 patent/US6953605B2/en not_active Expired - Lifetime
-
2002
- 2002-12-24 AT AT02799114T patent/ATE340880T1/en active
- 2002-12-24 RU RU2004118418/02A patent/RU2319682C2/en active
- 2002-12-24 EP EP02799114A patent/EP1458902B1/en not_active Expired - Lifetime
- 2002-12-24 UA UA20040605015A patent/UA78733C2/en unknown
- 2002-12-24 KR KR1020047010048A patent/KR100896854B1/en not_active IP Right Cessation
- 2002-12-24 CA CA2471672A patent/CA2471672C/en not_active Expired - Fee Related
- 2002-12-24 MX MXPA04006329A patent/MXPA04006329A/en active IP Right Grant
- 2002-12-24 IL IL16265902A patent/IL162659A0/en not_active IP Right Cessation
- 2002-12-24 ES ES02799114T patent/ES2274121T3/en not_active Expired - Lifetime
- 2002-12-24 HU HU0402078A patent/HUP0402078A2/en unknown
- 2002-12-24 JP JP2003556573A patent/JP4426302B2/en not_active Expired - Fee Related
- 2002-12-24 WO PCT/FR2002/004554 patent/WO2003056059A1/en active IP Right Grant
- 2002-12-24 AU AU2002364339A patent/AU2002364339B2/en not_active Ceased
- 2002-12-24 CN CNB028260562A patent/CN100371493C/en not_active Expired - Lifetime
- 2002-12-24 DE DE60215048T patent/DE60215048T2/en not_active Expired - Lifetime
- 2002-12-24 BR BRPI0215313-0A patent/BR0215313B1/en not_active IP Right Cessation
-
2003
- 2003-04-16 US US10/417,037 patent/US20030205203A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CA2471672C (en) | 2011-03-22 |
ES2274121T3 (en) | 2007-05-16 |
EP1458902B1 (en) | 2006-09-27 |
BR0215313A (en) | 2004-10-19 |
BR0215313B1 (en) | 2011-11-29 |
KR100896854B1 (en) | 2009-05-12 |
MXPA04006329A (en) | 2004-10-04 |
UA78733C2 (en) | 2007-04-25 |
JP4426302B2 (en) | 2010-03-03 |
EP1458902A1 (en) | 2004-09-22 |
CN100371493C (en) | 2008-02-27 |
CN1608142A (en) | 2005-04-20 |
US20030205203A1 (en) | 2003-11-06 |
RU2319682C2 (en) | 2008-03-20 |
AU2002364339B2 (en) | 2008-09-04 |
US20030118728A1 (en) | 2003-06-26 |
US6953605B2 (en) | 2005-10-11 |
RU2004118418A (en) | 2005-06-10 |
JP2005512940A (en) | 2005-05-12 |
DE60215048D1 (en) | 2006-11-09 |
KR20040071754A (en) | 2004-08-12 |
AU2002364339A1 (en) | 2003-07-15 |
IL162659A0 (en) | 2005-11-20 |
ATE340880T1 (en) | 2006-10-15 |
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CA2471672A1 (en) | 2003-07-10 |
WO2003056059A1 (en) | 2003-07-10 |
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