HUP0103795A2 - Elektrosztatikus pofa és eljárás villamosan töltött szemcséknek szemcseérintkezési felületen elterülő szemcsegyűjtő tartományba vonzására, továbbá elektrosztatikus pofa szemcseérintkezési felületen elterülő szemcsegyűjtő tartományban felhalmozódott... - Google Patents
Elektrosztatikus pofa és eljárás villamosan töltött szemcséknek szemcseérintkezési felületen elterülő szemcsegyűjtő tartományba vonzására, továbbá elektrosztatikus pofa szemcseérintkezési felületen elterülő szemcsegyűjtő tartományban felhalmozódott...Info
- Publication number
- HUP0103795A2 HUP0103795A2 HU0103795A HUP0103795A HUP0103795A2 HU P0103795 A2 HUP0103795 A2 HU P0103795A2 HU 0103795 A HU0103795 A HU 0103795A HU P0103795 A HUP0103795 A HU P0103795A HU P0103795 A2 HUP0103795 A2 HU P0103795A2
- Authority
- HU
- Hungary
- Prior art keywords
- grain
- particle
- attracting
- bcz
- voltage
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 238000012544 monitoring process Methods 0.000 title abstract 2
- 239000011324 bead Substances 0.000 title 4
- 239000002245 particle Substances 0.000 abstract 18
- 239000003990 capacitor Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 230000014759 maintenance of location Effects 0.000 abstract 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00457—Dispensing or evacuation of the solid phase support
- B01J2219/00459—Beads
- B01J2219/00468—Beads by manipulation of individual beads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
- B01J2219/00277—Apparatus
- B01J2219/00497—Features relating to the solid phase supports
- B01J2219/005—Beads
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N2035/00465—Separating and mixing arrangements
- G01N2035/00564—Handling or washing solid phase elements, e.g. beads
- G01N2035/00574—Means for distributing beads
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/02—Bead coater
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/23—Chucks or sockets with magnetic or electrostatic means
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrostatic Spraying Apparatus (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
A találmány tárgya egyrészt elektrosztatikus pofa és eljárásvillamosan töltött szemcséknek szemcseérintkezési felületen elterülőszemcsegyűjtő tartományba vonzására, másrészt elektrosztatikus pofáhozcsatlakoztatott, szemcseérintkezési felületen elterülő szemcsegyűjtőtartományban felhalmozódott töltést monitorozó töltésérzékelőelektróddal rendelkező, felhalmozódott töltés érzékelésére szolgálóáramkör. A találmány szerinti elektrosztatikus pofa tartalmaz aszemcsegyűjtő tartományban (BCZ) szemcsevonzó teret szelektívenlétrehozó szemcseelektródot (9), amely szemcseelektród (9) váltakozóhullám alakú feszültség rákapcsolására a szemcséket szelektívmegtartás céljából befolyásolón és a szemcsegyűjtő tartományba (BCZ)terelőn van megformázva és kialakítva; valamint a szemcsegyűjtőtartományban (BCZ) ismétlődőn effektív szemcsevonzó feszültségetkiváltó váltakozó hullám alakú feszültséget leadón programozottelektronikus meghajtó egységet, ahol a váltakozó hullám alakúfeszültség szemcsevonzó impulzusból és ezt követő, legfeljebb 1011 Wcmfajlagos ellenállású hordozón megvalósított szemcsegyűjtő tartomány(BCZ) esetében a rákövetkező szemcsevonzó impulzus ráadásakor aszemcsegyűjtő tartományban (BCZ) effektív szemcsevonzó teretbiztosítón megválasztott relaxációs szakaszból áll, továbbá ahol aváltakozó hullám alakú feszültség frekvenciája legfeljebb 100 Hz. Atalálmány szerinti eljárás során legfeljebb 1011 Wcm fajlagosellenállású hordozót elektrosztatikus pofaszemcsevonzó elektródja fölérétegzett helyzetben szemcseérintkezési felületet (BCS) képezőnelektrosztatikus pofához tapasztanak; a szemcsevonzó elektródraváltakozó hullámalakú feszültséget kapcsolva szemcsevonzó teret hoznaklétre, ahol a váltakozó hullám alakú feszültséget szemcsevonzóimpulzusból és ezt követő, a rákövetkező szemcsevonzó impulzusráadásakor a szemcsegyűjtő tartományban (BCZ) effektív szemcsevonzóteret biztosítón megválasztott relaxációs szakaszból teszik össze, ésa váltakozó hullám alakú feszültség frekvenciáját legfeljebb 100 Hz-nek választják; továbbá szemcsét a szemcsegyűjtő tartományba (BCZ)vonzanak és ott megtartanak. A találmány szerinti áramkör tartalmazváltakozó feszültségű előfeszítő áramforrást; villamosan töltöttszemcséket szemcsegyűjtő tartománya (BCZ) vonzó szemcsevonzó teretlétrehozó legalább egy szemcseelektróddal (9), továbbá töltésgyűjtőelektród és a váltakozó feszültségű előfeszítő áramforrás közévillamosan bekapcsolt érzékelőkondenzátorral rendelkezőelektrosztatikus pofát valamint az érzékelőkondenzátor feszültségetmérő, a váltakozó feszültségű előfeszítő áramforrás éscsatolókondenzátor közé villamosan bekapcsolt elektrométert. Ó
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/095,425 US6149774A (en) | 1998-06-10 | 1998-06-10 | AC waveforms biasing for bead manipulating chucks |
PCT/US1999/012764 WO1999064148A1 (en) | 1998-06-10 | 1999-06-08 | Ac waveforms biasing for bead manipulating chucks |
Publications (2)
Publication Number | Publication Date |
---|---|
HUP0103795A2 true HUP0103795A2 (hu) | 2002-03-28 |
HUP0103795A3 HUP0103795A3 (en) | 2002-05-28 |
Family
ID=22251957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HU0103795A HUP0103795A3 (en) | 1998-06-10 | 1999-06-08 | Electrostatic chuck method for attracting electrostatically charged beads onto a bead collecting territory on bead contact surface and a monitoring circuit having charge sensor electrode for sensing accumulated charge on bead collecting territory on ... |
Country Status (11)
Country | Link |
---|---|
US (3) | US6149774A (hu) |
EP (1) | EP1093399A1 (hu) |
JP (1) | JP2002517308A (hu) |
KR (1) | KR20010078733A (hu) |
CN (1) | CN1121261C (hu) |
AU (1) | AU767221B2 (hu) |
CA (1) | CA2333130A1 (hu) |
HU (1) | HUP0103795A3 (hu) |
IL (1) | IL139925A0 (hu) |
NZ (1) | NZ508387A (hu) |
WO (1) | WO1999064148A1 (hu) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6063194A (en) | 1998-06-10 | 2000-05-16 | Delsys Pharmaceutical Corporation | Dry powder deposition apparatus |
US6149774A (en) * | 1998-06-10 | 2000-11-21 | Delsys Pharmaceutical Corporation | AC waveforms biasing for bead manipulating chucks |
US6923979B2 (en) * | 1999-04-27 | 2005-08-02 | Microdose Technologies, Inc. | Method for depositing particles onto a substrate using an alternating electric field |
US6295194B1 (en) * | 1999-09-10 | 2001-09-25 | Delsys Pharmaceutical Corporation | Bead or particle manipulating chucks |
JP2003060018A (ja) * | 2001-08-13 | 2003-02-28 | Nissin Electric Co Ltd | 基板吸着方法およびその装置 |
US6686207B2 (en) | 2001-10-12 | 2004-02-03 | Massachusetts Institute Of Technology | Manipulating micron scale items |
GB2384199B (en) * | 2002-01-17 | 2005-04-06 | Phoqus Ltd | Electrostatic application of powder material to solid dosage forms |
EP1561108A1 (en) * | 2002-10-18 | 2005-08-10 | Kristinn Johnsen | Nanoelectrode device for chemical analysis |
AU2003903295A0 (en) * | 2003-06-30 | 2003-07-10 | Raustech Pty Ltd | Substrate for combinatorial chemistry |
US7072165B2 (en) * | 2003-08-18 | 2006-07-04 | Axcelis Technologies, Inc. | MEMS based multi-polar electrostatic chuck |
US6947274B2 (en) * | 2003-09-08 | 2005-09-20 | Axcelis Technologies, Inc. | Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage |
US7072166B2 (en) * | 2003-09-12 | 2006-07-04 | Axcelis Technologies, Inc. | Clamping and de-clamping semiconductor wafers on a J-R electrostatic chuck having a micromachined surface by using force delay in applying a single-phase square wave AC clamping voltage |
US6946403B2 (en) * | 2003-10-28 | 2005-09-20 | Axcelis Technologies, Inc. | Method of making a MEMS electrostatic chuck |
KR101394337B1 (ko) * | 2006-08-30 | 2014-05-13 | 엘아이지에이디피 주식회사 | 정전척 |
US8149562B2 (en) * | 2007-03-09 | 2012-04-03 | Taiwan Semiconductor Manufacturing Company, Ltd. | System for decharging a wafer or substrate after dechucking from an electrostatic chuck |
US20090109595A1 (en) * | 2007-10-31 | 2009-04-30 | Sokudo Co., Ltd. | Method and system for performing electrostatic chuck clamping in track lithography tools |
US8055489B2 (en) * | 2007-12-13 | 2011-11-08 | Lam Research Corporation | Method for using an RC circuit to model trapped charge in an electrostatic chuck |
US8169768B1 (en) * | 2008-06-09 | 2012-05-01 | Kla-Tencor Corporation | Electrostatic chuck |
US20100269513A1 (en) * | 2009-04-23 | 2010-10-28 | General Electric Company | Thimble Fan for a Combustion System |
US8836160B1 (en) * | 2010-09-28 | 2014-09-16 | The Boeing Company | Method and application for vehicle power system isolation |
US9142354B2 (en) * | 2010-10-20 | 2015-09-22 | Chun-Yen Chang | High energy density and low leakage electronic devices |
US9470733B2 (en) * | 2014-11-17 | 2016-10-18 | The United States Of America, As Represented By The Secretary Of The Navy | Sensor incorporating multiferroic materials for detecting both electric and magnetic fields |
US9969078B2 (en) * | 2015-08-03 | 2018-05-15 | Mikro Mesa Technology Co., Ltd. | Transfer head array and transferring method |
US10373856B2 (en) | 2015-08-03 | 2019-08-06 | Mikro Mesa Technology Co., Ltd. | Transfer head array |
US10179731B2 (en) * | 2015-08-17 | 2019-01-15 | Mikro Mesa Technology Co., Ltd. | Transfer head array |
KR20200057855A (ko) * | 2018-11-16 | 2020-05-27 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
US11764094B2 (en) * | 2022-02-18 | 2023-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor processing tool and methods of operation |
Family Cites Families (71)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US30401A (en) * | 1860-10-16 | Improvement in evaporation of cane-juice | ||
US2408143A (en) * | 1944-01-15 | 1946-09-24 | William C Huebner | Apparatus for multicolor printing with electro lines of force |
US3831606A (en) * | 1971-02-19 | 1974-08-27 | Alza Corp | Auto inhaler |
US3971377A (en) * | 1974-06-10 | 1976-07-27 | Alza Corporation | Medicament dispensing process for inhalation therapy |
DE2502251A1 (de) * | 1975-01-17 | 1976-07-22 | Schering Ag | Vorrichtung zur inhalation pulverfoermiger feststoffe |
US4197289A (en) * | 1975-12-15 | 1980-04-08 | Hoffmann-La Roche Inc. | Novel dosage forms |
US4349531A (en) * | 1975-12-15 | 1982-09-14 | Hoffmann-La Roche Inc. | Novel dosage form |
US4332789A (en) * | 1975-12-15 | 1982-06-01 | Hoffmann-La Roche Inc. | Pharmaceutical unit dosage forms |
US4072129A (en) * | 1976-04-27 | 1978-02-07 | National Research Development Corporation | Electrostatic powder deposition |
US4160257A (en) * | 1978-07-17 | 1979-07-03 | Dennison Manufacturing Company | Three electrode system in the generation of electrostatic images |
USRE30401E (en) | 1978-07-07 | 1980-09-09 | Illinois Tool Works Inc. | Gasless ion plating |
US4628227A (en) * | 1980-10-06 | 1986-12-09 | Dennison Manufacturing Company | Mica-electrode laminations for the generation of ions in air |
JPS57196211A (en) * | 1981-05-29 | 1982-12-02 | Hitachi Ltd | Sample holding device |
GB2106325A (en) * | 1981-09-14 | 1983-04-07 | Philips Electronic Associated | Electrostatic chuck |
JPS5944797A (ja) * | 1982-09-07 | 1984-03-13 | 増田 閃一 | 物体の静電的処理装置 |
FI79651C (fi) * | 1982-10-08 | 1990-02-12 | Glaxo Group Ltd | Doseringsanordning foer medicin. |
US4538163A (en) * | 1983-03-02 | 1985-08-27 | Xerox Corporation | Fluid jet assisted ion projection and printing apparatus |
US4570630A (en) * | 1983-08-03 | 1986-02-18 | Miles Laboratories, Inc. | Medicament inhalation device |
US4707382A (en) * | 1983-09-28 | 1987-11-17 | Ricoh Company, Ltd. | Developer carrier and a method for manufacturing the same |
GB2154365A (en) * | 1984-02-10 | 1985-09-04 | Philips Electronic Associated | Loading semiconductor wafers on an electrostatic chuck |
GB8328808D0 (en) * | 1983-10-28 | 1983-11-30 | Riker Laboratories Inc | Inhalation responsive dispensers |
DE3345722A1 (de) * | 1983-12-17 | 1985-06-27 | Boehringer Ingelheim KG, 6507 Ingelheim | Inhalator |
GR861995B (en) * | 1985-07-30 | 1986-11-04 | Glaxo Group Ltd | Devices for administering medicaments to patients |
US4685620A (en) * | 1985-09-30 | 1987-08-11 | The University Of Georgia Research Foundation Inc. | Low-volume electrostatic spraying |
US5031610A (en) * | 1987-05-12 | 1991-07-16 | Glaxo Inc. | Inhalation device |
US4795644A (en) * | 1987-08-03 | 1989-01-03 | Merck & Co., Inc. | Device for pH independent release of drugs through the Donnan-like influence of charged insoluble resins |
US4925701A (en) * | 1988-05-27 | 1990-05-15 | Xerox Corporation | Processes for the preparation of polycrystalline diamond films |
US4918468A (en) * | 1988-11-14 | 1990-04-17 | Dennison Manufacturing Company | Method and apparatus for charged particle generation |
US4921727A (en) * | 1988-12-21 | 1990-05-01 | Rca Licensing Corporation | Surface treatment of silica-coated phosphor particles and method for a CRT screen |
US4921767A (en) * | 1988-12-21 | 1990-05-01 | Rca Licensing Corp. | Method of electrophotographically manufacturing a luminescent screen assembly for a cathode-ray-tube |
US4917978A (en) * | 1989-01-23 | 1990-04-17 | Thomson Consumer Electronics, Inc. | Method of electrophotographically manufacturing a luminescent screen assembly having increased adherence for a CRT |
GB8909891D0 (en) * | 1989-04-28 | 1989-06-14 | Riker Laboratories Inc | Device |
US5176132A (en) * | 1989-05-31 | 1993-01-05 | Fisons Plc | Medicament inhalation device and formulation |
US5028501A (en) * | 1989-06-14 | 1991-07-02 | Rca Licensing Corp. | Method of manufacturing a luminescent screen assembly using a dry-powdered filming material |
JP2616013B2 (ja) * | 1989-06-15 | 1997-06-04 | 株式会社村田製作所 | マグネットチャック |
US5014076A (en) * | 1989-11-13 | 1991-05-07 | Delphax Systems | Printer with high frequency charge carrier generation |
US4971257A (en) * | 1989-11-27 | 1990-11-20 | Marc Birge | Electrostatic aerosol spray can assembly |
US5027136A (en) * | 1990-01-16 | 1991-06-25 | Dennison Manufacturing Company | Method and apparatus for charged particle generation |
US4992807A (en) * | 1990-05-04 | 1991-02-12 | Delphax Systems | Gray scale printhead system |
US5115803A (en) * | 1990-08-31 | 1992-05-26 | Minnesota Mining And Manufacturing Company | Aerosol actuator providing increased respirable fraction |
US5103975A (en) * | 1990-11-21 | 1992-04-14 | Samsonite Corporation | Luggage with shoulder strap assembly and shoulder strap storage pocket |
US5328539A (en) * | 1990-11-28 | 1994-07-12 | H. B. Fuller Licensing & Financing Inc. | Radio frequency heating of thermoplastic receptor compositions |
US5186164A (en) * | 1991-03-15 | 1993-02-16 | Puthalath Raghuprasad | Mist inhaler |
AU650953B2 (en) * | 1991-03-21 | 1994-07-07 | Novartis Ag | Inhaler |
US5243970A (en) * | 1991-04-15 | 1993-09-14 | Schering Corporation | Dosing device for administering metered amounts of powdered medicaments to patients |
US5278588A (en) * | 1991-05-17 | 1994-01-11 | Delphax Systems | Electrographic printing device |
US5327883A (en) * | 1991-05-20 | 1994-07-12 | Dura Pharmaceuticals, Inc. | Apparatus for aerosolizing powdered medicine and process and using |
US5235911A (en) * | 1991-07-02 | 1993-08-17 | Coors Brewing Company | Plate cylinder registration apparatus |
US5161524A (en) * | 1991-08-02 | 1992-11-10 | Glaxo Inc. | Dosage inhalator with air flow velocity regulating means |
US5184398A (en) * | 1991-08-30 | 1993-02-09 | Texas Instruments Incorporated | In-situ real-time sheet resistance measurement method |
GB9123953D0 (en) | 1991-11-12 | 1992-01-02 | Minnesota Mining & Mfg | Inhalation device |
FR2683665B1 (fr) * | 1991-11-12 | 1993-12-31 | Francis Mouyen | Boitier renfermant l'ensemble des dispositifs informatiques et electroniques, notamment d'imagerie, utilises dans un cabinet dentaire. |
DE4211475A1 (de) * | 1991-12-14 | 1993-06-17 | Asta Medica Ag | Pulverinhalator |
US5362362A (en) * | 1992-06-29 | 1994-11-08 | Newspaper Association Of America | Methods of deinking cellulosic materials |
DE4225224A1 (de) * | 1992-07-30 | 1994-02-03 | Henkel Kgaa | Verfahren zur Herstellung von lagerstabilen nichtionischen Tensiden |
US5239993A (en) * | 1992-08-26 | 1993-08-31 | Glaxo Inc. | Dosage inhalator providing optimized compound inhalation trajectory |
HU217917B (hu) | 1992-10-19 | 2000-05-28 | Dura Pharmaceuticals Inc. | Inhalálókészülék száraz porok inhalálásához |
SE9203743D0 (sv) | 1992-12-11 | 1992-12-11 | Astra Ab | Efficient use |
DE69413528T2 (de) | 1993-04-06 | 1999-05-06 | Minnesota Mining And Mfg. Co., Saint Paul, Minn. | Vorrichtung zum deagglomerieren für trockenpulverinhalatoren |
TW402506B (en) | 1993-06-24 | 2000-08-21 | Astra Ab | Therapeutic preparation for inhalation |
EP0635870A1 (en) * | 1993-07-20 | 1995-01-25 | Applied Materials, Inc. | An electrostatic chuck having a grooved surface |
US5463525A (en) * | 1993-12-20 | 1995-10-31 | International Business Machines Corporation | Guard ring electrostatic chuck |
US5534309A (en) * | 1994-06-21 | 1996-07-09 | Msp Corporation | Method and apparatus for depositing particles on surfaces |
US5499487A (en) * | 1994-09-14 | 1996-03-19 | Vanguard Automation, Inc. | Method and apparatus for filling a ball grid array |
US5647347A (en) * | 1994-10-21 | 1997-07-15 | Glaxo Wellcome Inc. | Medicament carrier for dry powder inhalator |
US5714007A (en) * | 1995-06-06 | 1998-02-03 | David Sarnoff Research Center, Inc. | Apparatus for electrostatically depositing a medicament powder upon predefined regions of a substrate |
US5669973A (en) * | 1995-06-06 | 1997-09-23 | David Sarnoff Research Center, Inc. | Apparatus for electrostatically depositing and retaining materials upon a substrate |
US5642727A (en) * | 1995-07-25 | 1997-07-01 | David Sarnoff Research Center, Inc. | Inhaler apparatus using a tribo-electric charging technique |
US5846595A (en) * | 1996-04-09 | 1998-12-08 | Sarnoff Corporation | Method of making pharmaceutical using electrostatic chuck |
US5788814A (en) * | 1996-04-09 | 1998-08-04 | David Sarnoff Research Center | Chucks and methods for positioning multiple objects on a substrate |
US6149774A (en) * | 1998-06-10 | 2000-11-21 | Delsys Pharmaceutical Corporation | AC waveforms biasing for bead manipulating chucks |
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1998
- 1998-06-10 US US09/095,425 patent/US6149774A/en not_active Expired - Fee Related
-
1999
- 1999-06-08 HU HU0103795A patent/HUP0103795A3/hu unknown
- 1999-06-08 AU AU44260/99A patent/AU767221B2/en not_active Ceased
- 1999-06-08 WO PCT/US1999/012764 patent/WO1999064148A1/en not_active Application Discontinuation
- 1999-06-08 CN CN99809528A patent/CN1121261C/zh not_active Expired - Fee Related
- 1999-06-08 IL IL13992599A patent/IL139925A0/xx unknown
- 1999-06-08 KR KR1020007014020A patent/KR20010078733A/ko not_active Application Discontinuation
- 1999-06-08 JP JP2000553205A patent/JP2002517308A/ja not_active Withdrawn
- 1999-06-08 CA CA002333130A patent/CA2333130A1/en not_active Abandoned
- 1999-06-08 NZ NZ508387A patent/NZ508387A/en unknown
- 1999-06-08 EP EP99927326A patent/EP1093399A1/en not_active Withdrawn
- 1999-12-07 US US09/455,678 patent/US6187149B1/en not_active Expired - Fee Related
-
2001
- 2001-01-30 US US09/772,536 patent/US6475351B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN1121261C (zh) | 2003-09-17 |
WO1999064148A1 (en) | 1999-12-16 |
US6187149B1 (en) | 2001-02-13 |
US6475351B2 (en) | 2002-11-05 |
CN1312734A (zh) | 2001-09-12 |
IL139925A0 (en) | 2002-02-10 |
AU767221B2 (en) | 2003-11-06 |
KR20010078733A (ko) | 2001-08-21 |
EP1093399A1 (en) | 2001-04-25 |
US20020015275A1 (en) | 2002-02-07 |
US6149774A (en) | 2000-11-21 |
NZ508387A (en) | 2003-07-25 |
AU4426099A (en) | 1999-12-30 |
JP2002517308A (ja) | 2002-06-18 |
CA2333130A1 (en) | 1999-12-16 |
HUP0103795A3 (en) | 2002-05-28 |
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