HUE044983T2 - Kompozit piezoelektromos, oldalirányban rezgõ rezonátor - Google Patents
Kompozit piezoelektromos, oldalirányban rezgõ rezonátorInfo
- Publication number
- HUE044983T2 HUE044983T2 HUE12753636A HUE044983T2 HU E044983 T2 HUE044983 T2 HU E044983T2 HU E12753636 A HUE12753636 A HU E12753636A HU E044983 T2 HUE044983 T2 HU E044983T2
- Authority
- HU
- Hungary
- Prior art keywords
- composite piezoelectric
- laterally vibrating
- vibrating resonator
- piezoelectric laterally
- resonator
- Prior art date
Links
- 239000002131 composite material Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/057—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by stacking bulk piezoelectric or electrostrictive bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161525607P | 2011-08-19 | 2011-08-19 | |
| US13/587,618 US9406865B2 (en) | 2011-08-19 | 2012-08-16 | Composite piezoelectric laterally vibrating resonator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| HUE044983T2 true HUE044983T2 (hu) | 2019-11-28 |
Family
ID=46763194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| HUE12753636 HUE044983T2 (hu) | 2011-08-19 | 2012-08-20 | Kompozit piezoelektromos, oldalirányban rezgõ rezonátor |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9406865B2 (hu) |
| EP (1) | EP2745399B1 (hu) |
| JP (3) | JP5951774B2 (hu) |
| KR (1) | KR101736446B1 (hu) |
| CN (1) | CN104040886B (hu) |
| ES (1) | ES2744447T3 (hu) |
| HU (1) | HUE044983T2 (hu) |
| WO (1) | WO2013028638A2 (hu) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9331666B2 (en) * | 2012-10-22 | 2016-05-03 | Qualcomm Mems Technologies, Inc. | Composite dilation mode resonators |
| US20160352307A1 (en) * | 2015-05-27 | 2016-12-01 | Murata Manufacturing Co., Ltd. | Mems resonator with high quality factor |
| US10432162B2 (en) | 2016-03-31 | 2019-10-01 | Avago Technologies International Sales Pte. Limited | Acoustic resonator including monolithic piezoelectric layer having opposite polarities |
| CN111490740B (zh) * | 2019-01-29 | 2023-01-10 | 中国科学院半导体研究所 | 阵列化的分布式兰姆模态射频微机电谐振器 |
| EP4005090A4 (en) * | 2019-07-31 | 2023-08-30 | Qxonix Inc. | MASS LOADED BULK ACOUSTIC WAVE (BAW) RESONATOR STRUCTURES, DEVICES AND SYSTEMS |
| CN117352983A (zh) * | 2022-06-28 | 2024-01-05 | 欣兴电子股份有限公司 | 多层共振器线路结构及多层滤波器线路结构 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB865093A (en) * | 1956-04-23 | 1961-04-12 | Toyo Tsushinki Kabushiki Kaish | Electro-mechanical filters |
| US4703287A (en) * | 1985-08-22 | 1987-10-27 | United Technologies Corporation | Phase modulator for fiber-optic sensors |
| JPH02222584A (ja) * | 1989-02-23 | 1990-09-05 | Yokogawa Electric Corp | バイモルフアクチュエータ |
| JPH07254836A (ja) * | 1994-03-15 | 1995-10-03 | Matsushita Electric Ind Co Ltd | 圧電振動子 |
| US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
| JPH118111A (ja) | 1997-06-17 | 1999-01-12 | Tdk Corp | バルントランス用コア材料、バルントランス用コアおよびバルントランス |
| JP3531522B2 (ja) | 1999-04-19 | 2004-05-31 | 株式会社村田製作所 | 圧電共振子 |
| JP3514224B2 (ja) | 1999-11-11 | 2004-03-31 | 株式会社村田製作所 | 圧電共振子、フィルタ及び電子機器 |
| US6452310B1 (en) | 2000-01-18 | 2002-09-17 | Texas Instruments Incorporated | Thin film resonator and method |
| JP3741027B2 (ja) * | 2001-01-10 | 2006-02-01 | 株式会社村田製作所 | 振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置 |
| JP2003051732A (ja) | 2001-08-08 | 2003-02-21 | Murata Mfg Co Ltd | 圧電共振子、フィルタおよび電子通信機器 |
| DE10149542A1 (de) | 2001-10-08 | 2003-04-17 | Infineon Technologies Ag | BAW-Resonator |
| US6987348B2 (en) * | 2002-12-13 | 2006-01-17 | Palo Alto Research Center Inc. | Piezoelectric transducers |
| DE102004049498A1 (de) | 2004-10-11 | 2006-04-13 | Epcos Ag | Mit akustischen Wellen arbeitendes Bauelement und Verfahren zu dessen Herstellung |
| JP4691395B2 (ja) | 2005-05-30 | 2011-06-01 | 株式会社日立メディアエレクトロニクス | バルク弾性波共振器、バルク弾性波共振器を用いたフィルタ、それを用いた高周波モジュール、並びにバルク弾性波共振器を用いた発振器 |
| JP4910390B2 (ja) | 2005-12-26 | 2012-04-04 | 株式会社村田製作所 | 圧電セラミックおよびその製造方法ならびに圧電共振子およびその製造方法 |
| JP2007312164A (ja) | 2006-05-19 | 2007-11-29 | Hitachi Ltd | 圧電薄膜共振器並びにそれを用いた高周波フィルタ及び高周波モジュール |
| JP4691163B2 (ja) | 2006-08-03 | 2011-06-01 | パナソニック株式会社 | 周波数可変音響薄膜共振器、フィルタ、及びそれを用いた通信装置 |
| US7687971B2 (en) | 2006-08-15 | 2010-03-30 | Northrop Grumman Corporation | Electric field control of surface acoustic wave velocity |
| US7999442B2 (en) * | 2006-12-22 | 2011-08-16 | Seiko Instruments Inc. | Piezoelectric actuator and electronics device using the same |
| JP2008172711A (ja) | 2007-01-15 | 2008-07-24 | Hitachi Media Electoronics Co Ltd | 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール |
| JP2008211392A (ja) * | 2007-02-23 | 2008-09-11 | Matsushita Electric Works Ltd | 共振器及びその製造方法 |
| JP2008210895A (ja) | 2007-02-23 | 2008-09-11 | Matsushita Electric Works Ltd | 圧電体薄膜の製造方法、共振装置およびそれを用いたｕｗｂ用フィルタ |
| US7834526B2 (en) | 2007-04-10 | 2010-11-16 | Seiko Epson Corporation | Contour resonator |
| EP2387152A1 (en) * | 2009-01-09 | 2011-11-16 | Taiyo Yuden Co., Ltd. | Filter element, branching filter, and electronic apparatus |
| US8513863B2 (en) * | 2009-06-11 | 2013-08-20 | Qualcomm Mems Technologies, Inc. | Piezoelectric resonator with two layers |
| US20110304412A1 (en) | 2010-06-10 | 2011-12-15 | Hao Zhang | Acoustic Wave Resonators and Methods of Manufacturing Same |
-
2012
- 2012-08-16 US US13/587,618 patent/US9406865B2/en active Active
- 2012-08-20 WO PCT/US2012/051626 patent/WO2013028638A2/en active Application Filing
- 2012-08-20 ES ES12753636T patent/ES2744447T3/es active Active
- 2012-08-20 JP JP2014527228A patent/JP5951774B2/ja active Active
- 2012-08-20 KR KR1020147007166A patent/KR101736446B1/ko active IP Right Grant
- 2012-08-20 EP EP12753636.5A patent/EP2745399B1/en active Active
- 2012-08-20 HU HUE12753636 patent/HUE044983T2/hu unknown
- 2012-08-20 CN CN201280040247.5A patent/CN104040886B/zh active Active
-
2015
- 2015-09-14 JP JP2015181009A patent/JP6189386B2/ja active Active
-
2016
- 2016-04-01 JP JP2016074392A patent/JP2016158268A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN104040886B (zh) | 2016-10-26 |
| CN104040886A (zh) | 2014-09-10 |
| WO2013028638A3 (en) | 2013-04-18 |
| ES2744447T3 (es) | 2020-02-25 |
| EP2745399A2 (en) | 2014-06-25 |
| JP2016158268A (ja) | 2016-09-01 |
| JP5951774B2 (ja) | 2016-07-13 |
| KR20140049076A (ko) | 2014-04-24 |
| JP6189386B2 (ja) | 2017-08-30 |
| US20130214643A1 (en) | 2013-08-22 |
| WO2013028638A2 (en) | 2013-02-28 |
| JP2014529241A (ja) | 2014-10-30 |
| KR101736446B1 (ko) | 2017-05-16 |
| EP2745399B1 (en) | 2019-07-10 |
| JP2016028487A (ja) | 2016-02-25 |
| US9406865B2 (en) | 2016-08-02 |
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