HUE043926T2 - Optikai mérõrendszer minta spektrális leképezésére - Google Patents

Optikai mérõrendszer minta spektrális leképezésére

Info

Publication number
HUE043926T2
HUE043926T2 HUE16197419A HUE16197419A HUE043926T2 HU E043926 T2 HUE043926 T2 HU E043926T2 HU E16197419 A HUE16197419 A HU E16197419A HU E16197419 A HUE16197419 A HU E16197419A HU E043926 T2 HUE043926 T2 HU E043926T2
Authority
HU
Hungary
Prior art keywords
sample
metrology system
spectral imaging
optical metrology
optical
Prior art date
Application number
HUE16197419A
Other languages
English (en)
Inventor
Andrzej Buczkowski
Mikhail Sluch
Original Assignee
Nanometrics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/936,635 external-priority patent/US20160116411A1/en
Priority claimed from US15/178,484 external-priority patent/US9846122B2/en
Application filed by Nanometrics Inc filed Critical Nanometrics Inc
Publication of HUE043926T2 publication Critical patent/HUE043926T2/hu

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6489—Photoluminescence of semiconductors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N2021/556—Measuring separately scattering and specular
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N2021/646—Detecting fluorescent inhomogeneities at a position, e.g. for detecting defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6463—Optics
    • G01N2021/6478—Special lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N2021/6484—Optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides
    • G01N2201/0833—Fibre array at detector, resolving
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
HUE16197419A 2015-11-09 2016-11-04 Optikai mérõrendszer minta spektrális leképezésére HUE043926T2 (hu)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/936,635 US20160116411A1 (en) 2013-11-26 2015-11-09 Optical metrology system for spectral imaging of a sample
US15/178,484 US9846122B2 (en) 2013-11-26 2016-06-09 Optical metrology system for spectral imaging of a sample

Publications (1)

Publication Number Publication Date
HUE043926T2 true HUE043926T2 (hu) 2019-09-30

Family

ID=57226920

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE16197419A HUE043926T2 (hu) 2015-11-09 2016-11-04 Optikai mérõrendszer minta spektrális leképezésére

Country Status (2)

Country Link
EP (1) EP3165903B1 (hu)
HU (1) HUE043926T2 (hu)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11153499B2 (en) 2017-07-19 2021-10-19 Perkinelmer Health Sciences, Inc. Rapid, high dynamic range image acquisition with a charge-coupled device (CCD) camera
US11141064B2 (en) 2017-07-19 2021-10-12 Perkinelmer Health Sciences, Inc. Systems and methods for rapid wide field illumination scanning for in vivo small animal fluorescence tomographic imaging
NL2023275B1 (en) * 2019-06-07 2021-01-11 Delta Diagnostics B V Alignment and readout of optical chips
CN113359288B (zh) * 2021-05-31 2023-03-21 四川大学 一种暗场散射显微成像和光谱测试系统

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH079406B2 (ja) * 1987-05-28 1995-02-01 東京エレクトロン東北株式会社 半導体ウエハの表面検査装置
GB9618897D0 (en) 1996-09-10 1996-10-23 Bio Rad Micromeasurements Ltd Micro defects in silicon wafers
US7280261B2 (en) * 2004-12-20 2007-10-09 Palo Alto Research Center Incorporated Method of scanning and light collection for a rare cell detector
US20100220316A1 (en) * 2008-07-14 2010-09-02 Moshe Finarov Method and apparatus for thin film quality control
US9182351B2 (en) * 2013-11-26 2015-11-10 Nanometrics Incorporated Optical metrology system for spectral imaging of a sample

Also Published As

Publication number Publication date
EP3165903A1 (en) 2017-05-10
EP3165903B1 (en) 2018-12-26

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