HK84494A - Pellicle - Google Patents

Pellicle

Info

Publication number
HK84494A
HK84494A HK84494A HK84494A HK84494A HK 84494 A HK84494 A HK 84494A HK 84494 A HK84494 A HK 84494A HK 84494 A HK84494 A HK 84494A HK 84494 A HK84494 A HK 84494A
Authority
HK
Hong Kong
Prior art keywords
pellicle
Prior art date
Application number
HK84494A
Other languages
English (en)
Inventor
Hiroaki Nakagawa
Hitomi Matsuzaki
Original Assignee
Mitsui Petrochemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Petrochemical Ind filed Critical Mitsui Petrochemical Ind
Publication of HK84494A publication Critical patent/HK84494A/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544—Addition polymer is perhalogenated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31855—Of addition polymer from unsaturated monomers
    • Y10T428/3188—Next to cellulosic
    • Y10T428/31884—Regenerated or modified cellulose
    • Y10T428/31888—Addition polymer of hydrocarbon[s] only

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
HK84494A 1987-11-05 1994-08-18 Pellicle HK84494A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27962787A JP2535971B2 (ja) 1987-11-05 1987-11-05 ペリクル
SG48394A SG48394G (en) 1987-11-05 1994-04-09 Pellicle

Publications (1)

Publication Number Publication Date
HK84494A true HK84494A (en) 1994-08-26

Family

ID=26553411

Family Applications (1)

Application Number Title Priority Date Filing Date
HK84494A HK84494A (en) 1987-11-05 1994-08-18 Pellicle

Country Status (6)

Country Link
US (1) US4996106A (xx)
EP (1) EP0315450B1 (xx)
JP (1) JP2535971B2 (xx)
DE (1) DE3883707T2 (xx)
HK (1) HK84494A (xx)
SG (1) SG48394G (xx)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6156300A (en) * 1985-02-05 2000-12-05 Chiron Corporation Point mutants of N∇2 CSF-1 and carboxy truncated fragments thereof
US5573930A (en) * 1985-02-05 1996-11-12 Cetus Oncology Corporation DNA encoding various forms of colony stimulating factor-1
US6117422A (en) * 1985-02-05 2000-09-12 Chiron Corporation N∇2-CSF-1(long form) and carboxy truncated fragments thereof
US5339197A (en) * 1989-03-31 1994-08-16 Yen Yung Tsai Optical pellicle with controlled transmission peaking
US4970099A (en) * 1989-05-19 1990-11-13 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicles
JP2714450B2 (ja) * 1989-08-10 1998-02-16 ダイセル化学工業株式会社 防塵膜
CA2053518A1 (en) * 1990-10-16 1992-04-17 Tetsuya Miyazaki Highly light-transmitting dust protective film, process for preparation thereof and dust protective member
JP3037745B2 (ja) * 1990-11-29 2000-05-08 三井化学株式会社 ペリクル構造体
WO1992021066A1 (en) * 1991-05-17 1992-11-26 E.I. Du Pont De Nemours And Company Pressure relieving pellicle
JP2938636B2 (ja) * 1991-09-26 1999-08-23 信越化学工業株式会社 リソグラフィ−用ペリクル
JP2945201B2 (ja) * 1992-01-31 1999-09-06 信越化学工業株式会社 ペリクル
US5422704A (en) * 1992-07-13 1995-06-06 Intel Corporation Pellicle frame
KR970003593B1 (en) * 1992-09-03 1997-03-20 Samsung Electronics Co Ltd Projection exposure method and device using mask
JP3027073B2 (ja) * 1993-07-28 2000-03-27 信越化学工業株式会社 ペリクル
US5741576A (en) * 1995-09-06 1998-04-21 Inko Industrial Corporation Optical pellicle with controlled transmission peaks and anti-reflective coatings
TW337002B (en) * 1996-11-19 1998-07-21 Mitsui Kagaku Kk Pellicle
JP4011687B2 (ja) * 1997-10-01 2007-11-21 キヤノン株式会社 マスク構造体、該マスク構造体を用いた露光装置、該マスク構造体を用いた半導体デバイス製造方法
JP3434731B2 (ja) * 1999-06-09 2003-08-11 Ｎｅｃエレクトロニクス株式会社 ペリクル及びそのケース
US7351503B2 (en) * 2001-01-22 2008-04-01 Photronics, Inc. Fused silica pellicle in intimate contact with the surface of a photomask
US6524754B2 (en) 2001-01-22 2003-02-25 Photronics, Inc. Fused silica pellicle
KR20100049445A (ko) * 2008-11-03 2010-05-12 (주)엠에스티테크놀로지 리소그래피용 펠리클
EP2881792B1 (en) 2012-08-02 2017-04-26 Mitsui Chemicals, Inc. Pellicle
US11530306B2 (en) * 2016-06-20 2022-12-20 Solvay Sa Fluoropolymer film

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4470508A (en) * 1983-08-19 1984-09-11 Micro Lithography, Inc. Dustfree packaging container and method
JPS6057841A (ja) * 1983-09-09 1985-04-03 Hitachi Ltd 異物固定方法及び装置
JPS60237450A (ja) * 1984-05-11 1985-11-26 Asahi Chem Ind Co Ltd 非反射性フオトマスク・レチクル用防塵カバ−体及びその製造方法
US4833051A (en) * 1984-08-20 1989-05-23 Nippon Kogaku K.K. Protective device for photographic masks
EP0252574A2 (en) * 1986-07-07 1988-01-13 YEN, Yung-Tsai Method and apparatus for reducing particulates on photomasks
JP2642637B2 (ja) * 1987-08-18 1997-08-20 三井石油化学工業 株式会社 防塵膜

Also Published As

Publication number Publication date
EP0315450A3 (en) 1989-11-15
US4996106A (en) 1991-02-26
JPH01120555A (ja) 1989-05-12
SG48394G (en) 1995-03-17
JP2535971B2 (ja) 1996-09-18
DE3883707D1 (de) 1993-10-07
EP0315450B1 (en) 1993-09-01
EP0315450A2 (en) 1989-05-10
DE3883707T2 (de) 1993-12-16

Similar Documents

Publication Publication Date Title
HK84494A (en) Pellicle
GB8809967D0 (en) Property development
CS437687A1 (en) Pouzdro civky rotacniho chapace s vertikalni osou otaceni
IE870054L (en) Modified ß2-microglobulin
CS392487A1 (en) Zapojeni prijimace digitalniho signalu s kvantovanou zpetnou vazbou
CS228387A1 (en) Polypropylenova kompozicia s vysokou izotropiou zmrastenia
CS569787A1 (en) Zpusob pripravy kvasnicne biomasy s vysokym obsahem biologicky aktivnich komplexu chromu
CS647187A1 (en) Sklucovadlo s plynulym prestavenim celusti
CS553487A1 (en) Prostredek s protikvasinkovym ucinkom
CS701287A1 (en) Mikroskop s dvojitym radkovanim
CS155187A1 (en) Vibracni budic s predvolbou vystrednikoveho momentu
CS734287A1 (en) Kliestinovy upinac s automatickou vymenou kliestiny
CS53587A1 (en) Venkovni hodiny s vnitrnim osvetlenim
CS343287A1 (en) Servomechanizmus s polohovou spaetnou vaezbou
CS193787A1 (en) Magneticky drzak s regulovatelnou pridrznou silou
CS515486A1 (en) Sposob pripravy monoaduktu acetylenu s izopropylalkoholom fotochemickou syntezou
CS510887A1 (en) Prostriedok s antialgalnym ucinkom
CS50187A1 (en) Vzduchovod s odsavacimi sterbinami
CS677287A1 (en) Rezacia hlava s hydraulickym pohonom
CS49987A1 (en) Zapojeni radkoveho rozkladu zobrazovaci jednotky s pozvolnym nabehem vysokeho napeti
CS95387A1 (en) Zapojeni obrazoveho modulatoru s dvema zvukovymi kanaly
CS194887A1 (en) Ohrievac uzitkovej vody s nutenym vnutornym obehom
CS481587A1 (en) Mikroskop s dvojitym radkovanim
CS333087A1 (en) Sklenene vlakna s polymernym povlakom
CS635487A1 (en) Zhasedlo spinace vysokeho napeti s plynnym mediem

Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)