HK27191A - Planetary substrate carrier - Google Patents

Planetary substrate carrier

Info

Publication number
HK27191A
HK27191A HK27191A HK27191A HK27191A HK 27191 A HK27191 A HK 27191A HK 27191 A HK27191 A HK 27191A HK 27191 A HK27191 A HK 27191A HK 27191 A HK27191 A HK 27191A
Authority
HK
Hong Kong
Prior art keywords
substrate carrier
planetary substrate
planetary
carrier
substrate
Prior art date
Application number
HK27191A
Other languages
English (en)
Inventor
Darrel R Bloomquist
George A Drennan
James E Opfer
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of HK27191A publication Critical patent/HK27191A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Chemical Vapour Deposition (AREA)
HK27191A 1984-10-12 1991-04-11 Planetary substrate carrier HK27191A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US65998884A 1984-10-12 1984-10-12

Publications (1)

Publication Number Publication Date
HK27191A true HK27191A (en) 1991-04-19

Family

ID=24647654

Family Applications (1)

Application Number Title Priority Date Filing Date
HK27191A HK27191A (en) 1984-10-12 1991-04-11 Planetary substrate carrier

Country Status (4)

Country Link
EP (1) EP0178186B1 (ja)
JP (1) JPS61125170U (ja)
DE (1) DE3579659D1 (ja)
HK (1) HK27191A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343232Y2 (ja) * 1987-09-30 1991-09-10

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2053802A1 (en) * 1970-11-02 1972-05-10 Licentia Gmbh Uniform evaporated coatings prodn - esp metal layers for integrated semiconductor circuits etc
DE2813180C2 (de) * 1978-03-25 1985-12-19 Leybold-Heraeus GmbH, 5000 Köln Vakuumbeschichtungsanlage zum allseitigen Beschichten von Substraten durch Rotation der Substrate im Materialstrom
US4284033A (en) * 1979-10-31 1981-08-18 Rca Corporation Means to orbit and rotate target wafers supported on planet member
JPS5679435A (en) * 1979-11-30 1981-06-30 Fujitsu Ltd Rotary evaporation device
JPS5767163A (en) * 1980-10-09 1982-04-23 Tonan Kinzoku Kogyo Kk Formation of film for wrist watch band
GB2119236A (en) * 1982-03-26 1983-11-16 Philips Electronic Associated Magazine and disc holders for supporting discs in the magazine

Also Published As

Publication number Publication date
JPS61125170U (ja) 1986-08-06
DE3579659D1 (de) 1990-10-18
EP0178186B1 (en) 1990-09-12
EP0178186A3 (en) 1987-08-26
EP0178186A2 (en) 1986-04-16

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