HK1163262A1 - Pellicle container - Google Patents

Pellicle container

Info

Publication number
HK1163262A1
HK1163262A1 HK12103709.2A HK12103709A HK1163262A1 HK 1163262 A1 HK1163262 A1 HK 1163262A1 HK 12103709 A HK12103709 A HK 12103709A HK 1163262 A1 HK1163262 A1 HK 1163262A1
Authority
HK
Hong Kong
Prior art keywords
pellicle container
pellicle
container
Prior art date
Application number
HK12103709.2A
Inventor
Kazutoshi Sekihara
Original Assignee
Shinetsu Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Chemical Co filed Critical Shinetsu Chemical Co
Publication of HK1163262A1 publication Critical patent/HK1163262A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B65D43/08—Removable lids or covers having a peripheral flange fitting over the rim of the container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • B65D85/40—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus for watches or clocks; for components thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
    • G01N2223/6116—Specific applications or type of materials patterned objects; electronic devices semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packages (AREA)
HK12103709.2A 2010-04-23 2012-04-16 Pellicle container HK1163262A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010099895A JP5528190B2 (en) 2010-04-23 2010-04-23 Pellicle storage container

Publications (1)

Publication Number Publication Date
HK1163262A1 true HK1163262A1 (en) 2012-09-07

Family

ID=44887033

Family Applications (1)

Application Number Title Priority Date Filing Date
HK12103709.2A HK1163262A1 (en) 2010-04-23 2012-04-16 Pellicle container

Country Status (5)

Country Link
JP (1) JP5528190B2 (en)
KR (1) KR101754835B1 (en)
CN (1) CN102236249B (en)
HK (1) HK1163262A1 (en)
TW (1) TWI423907B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5822401B2 (en) * 2012-12-25 2015-11-24 信越化学工業株式会社 Pellicle for lithography
JP6308676B2 (en) * 2014-12-18 2018-04-11 信越化学工業株式会社 Pellicle container for lithography.
JP6320309B2 (en) * 2015-01-19 2018-05-09 信越化学工業株式会社 Pellicle storage container
JP2016151633A (en) * 2015-02-17 2016-08-22 信越化学工業株式会社 Pellicle-housing container
JP6275067B2 (en) * 2015-02-24 2018-02-07 信越化学工業株式会社 Pellicle storage container
JP6376601B2 (en) * 2015-05-18 2018-08-22 信越化学工業株式会社 Pellicle support means, pellicle support apparatus and pellicle mounting method using the same
JP6351178B2 (en) * 2015-07-13 2018-07-04 信越化学工業株式会社 Pellicle storage container and pellicle removal method
JP6494111B2 (en) * 2015-11-09 2019-04-03 信越化学工業株式会社 Pellicle storage container packaging structure and packaging method thereof
US10416575B2 (en) * 2016-11-16 2019-09-17 Suss Microtec Photomask Equipment Gmbh & Co. Kg Apparatus and method for cleaning a partial area of a substrate
JP2020033060A (en) 2018-08-30 2020-03-05 株式会社吉野工業所 Tube container

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3157664B2 (en) * 1993-11-22 2001-04-16 信越化学工業株式会社 Pellicle storage container
JP3356897B2 (en) * 1994-12-16 2002-12-16 信越化学工業株式会社 Pellicle storage container
JP2001201847A (en) * 2000-01-19 2001-07-27 Shin Etsu Chem Co Ltd Pellicle container
JP2005107085A (en) * 2003-09-30 2005-04-21 Asahi Kasei Electronics Co Ltd Opening method for large pellicle storage container, lid opening/closing tool, and large pellicle storage container
JP4391435B2 (en) * 2005-03-22 2009-12-24 信越化学工業株式会社 Pellicle storage container
JP2007057624A (en) * 2005-08-23 2007-03-08 Matsushita Electric Ind Co Ltd Reticle housing case
JP2007128030A (en) * 2005-10-07 2007-05-24 Shin Etsu Polymer Co Ltd Pellicle storing container
JP4796946B2 (en) * 2006-11-30 2011-10-19 信越化学工業株式会社 Pellicle storage container
JP2008216846A (en) * 2007-03-07 2008-09-18 Asahi Kasei Electronics Co Ltd Pellicle storage container
JP5269438B2 (en) * 2007-03-13 2013-08-21 旭化成イーマテリアルズ株式会社 Protective film for large pellicle and storage method for large pellicle
JP4955449B2 (en) * 2007-05-10 2012-06-20 信越化学工業株式会社 Pellicle storage container
JP5051840B2 (en) * 2007-11-22 2012-10-17 信越化学工業株式会社 Method for storing a pellicle in a pellicle storage container
JP2010060992A (en) * 2008-09-05 2010-03-18 Asahi Kasei E-Materials Corp Large pellicle structure and large pellicle housing structure
JP4493711B2 (en) * 2008-11-20 2010-06-30 旭化成イーマテリアルズ株式会社 Large pellicle storage container and manufacturing method thereof
JP4776721B2 (en) * 2009-09-18 2011-09-21 旭化成イーマテリアルズ株式会社 Large pellicle storage container and manufacturing method thereof

Also Published As

Publication number Publication date
CN102236249A (en) 2011-11-09
TWI423907B (en) 2014-01-21
KR101754835B1 (en) 2017-07-06
JP2011232388A (en) 2011-11-17
CN102236249B (en) 2013-03-13
KR20110118558A (en) 2011-10-31
JP5528190B2 (en) 2014-06-25
TW201139233A (en) 2011-11-16

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20220425