HK1142682A1 - Integrated circuit probe card analyzer - Google Patents

Integrated circuit probe card analyzer

Info

Publication number
HK1142682A1
HK1142682A1 HK10109053.3A HK10109053A HK1142682A1 HK 1142682 A1 HK1142682 A1 HK 1142682A1 HK 10109053 A HK10109053 A HK 10109053A HK 1142682 A1 HK1142682 A1 HK 1142682A1
Authority
HK
Hong Kong
Prior art keywords
integrated circuit
probe card
circuit probe
card analyzer
analyzer
Prior art date
Application number
HK10109053.3A
Other languages
English (en)
Inventor
Oscar Beijert
Original Assignee
Wafom Holding B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wafom Holding B V filed Critical Wafom Holding B V
Publication of HK1142682A1 publication Critical patent/HK1142682A1/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
    • G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
HK10109053.3A 2006-05-01 2010-09-22 Integrated circuit probe card analyzer HK1142682A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US74611706P 2006-05-01 2006-05-01
US88912507P 2007-02-09 2007-02-09
PCT/IB2007/003561 WO2008068567A2 (en) 2006-05-01 2007-05-01 Integrated circuit probe card analyzer
US11/743,020 US20070257686A1 (en) 2006-05-01 2007-05-01 Integrated circuit probe card analyzer

Publications (1)

Publication Number Publication Date
HK1142682A1 true HK1142682A1 (en) 2010-12-10

Family

ID=38660639

Family Applications (1)

Application Number Title Priority Date Filing Date
HK10109053.3A HK1142682A1 (en) 2006-05-01 2010-09-22 Integrated circuit probe card analyzer

Country Status (5)

Country Link
US (1) US20070257686A1 (xx)
KR (1) KR101477683B1 (xx)
CN (1) CN101680929B (xx)
HK (1) HK1142682A1 (xx)
WO (1) WO2008068567A2 (xx)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8531202B2 (en) * 2007-10-11 2013-09-10 Veraconnex, Llc Probe card test apparatus and method
WO2013182895A1 (en) * 2012-06-08 2013-12-12 Oscar Beijert Probe apparatus
US20140084956A1 (en) * 2012-09-21 2014-03-27 Dennis Glenn L. Surell Probe head test fixture and method of using the same
WO2015001417A1 (en) * 2013-07-03 2015-01-08 Stichting Continuïteit Beijert Engineering Apparatus and method for inspecting pins on a probe card
US10732202B2 (en) * 2016-03-29 2020-08-04 Globalfoundries Inc. Repairable rigid test probe card assembly

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3205043A (en) * 1962-04-04 1965-09-07 Carborundum Co Cold molded dense silicon carbide articles and method of making the same
US4692418A (en) * 1984-08-29 1987-09-08 Stemcor Corporation Sintered silicon carbide/carbon composite ceramic body having fine microstructure
US4757255A (en) * 1986-03-03 1988-07-12 National Semiconductor Corporation Environmental box for automated wafer probing
US4733553A (en) * 1986-08-25 1988-03-29 Motorola Inc. Method and apparatus for low pressure testing of a solid state pressure sensor
US4918383A (en) * 1987-01-20 1990-04-17 Huff Richard E Membrane probe with automatic contact scrub action
US5266889A (en) * 1992-05-29 1993-11-30 Cascade Microtech, Inc. Wafer probe station with integrated environment control enclosure
US5345170A (en) * 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
JP2938679B2 (ja) * 1992-06-26 1999-08-23 信越化学工業株式会社 セラミックス製静電チャック
JP3485390B2 (ja) * 1995-07-28 2004-01-13 京セラ株式会社 静電チャック
US6108189A (en) * 1996-04-26 2000-08-22 Applied Materials, Inc. Electrostatic chuck having improved gas conduits
JPH11312729A (ja) * 1998-04-28 1999-11-09 Kyocera Corp 静電チャック
WO2002037541A2 (en) * 2000-11-01 2002-05-10 Applied Materials, Inc. Etch chamber for etching dielectric layer with expanded process window

Also Published As

Publication number Publication date
CN101680929B (zh) 2012-10-10
WO2008068567A3 (en) 2008-11-20
US20070257686A1 (en) 2007-11-08
KR20090033836A (ko) 2009-04-06
KR101477683B1 (ko) 2014-12-30
CN101680929A (zh) 2010-03-24
WO2008068567A2 (en) 2008-06-12

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20180501