HK1137979A1 - A method and system for mem switching in ic package mems - Google Patents

A method and system for mem switching in ic package mems

Info

Publication number
HK1137979A1
HK1137979A1 HK09111245.1A HK09111245A HK1137979A1 HK 1137979 A1 HK1137979 A1 HK 1137979A1 HK 09111245 A HK09111245 A HK 09111245A HK 1137979 A1 HK1137979 A1 HK 1137979A1
Authority
HK
Hong Kong
Prior art keywords
package mems
mem switching
mem
switching
mems
Prior art date
Application number
HK09111245.1A
Other languages
English (en)
Chinese (zh)
Inventor
阿瑪德雷茲‧羅弗戈蘭
瑪雅姆‧羅弗戈蘭
Original Assignee
美國博通公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美國博通公司 filed Critical 美國博通公司
Publication of HK1137979A1 publication Critical patent/HK1137979A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/10Auxiliary devices for switching or interrupting
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/10Auxiliary devices for switching or interrupting
    • H01P1/12Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127Strip line switches
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00Waveguides; Transmission lines of the waveguide type
    • H01P3/003Coplanar lines
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B1/00Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/38Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
    • H04B1/40Circuits
    • H04B1/44Transmit/receive switching
    • H04B1/48Transmit/receive switching in circuits for connecting transmitter and receiver to a common transmission path, e.g. by energy of transmitter

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Transceivers (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
HK09111245.1A 2007-12-13 2009-12-01 A method and system for mem switching in ic package mems HK1137979A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/956,106 US8384500B2 (en) 2007-12-13 2007-12-13 Method and system for MEMS switches fabricated in an integrated circuit package

Publications (1)

Publication Number Publication Date
HK1137979A1 true HK1137979A1 (en) 2010-08-13

Family

ID=40459776

Family Applications (1)

Application Number Title Priority Date Filing Date
HK09111245.1A HK1137979A1 (en) 2007-12-13 2009-12-01 A method and system for mem switching in ic package mems

Country Status (6)

Country Link
US (2) US8384500B2 (de)
EP (1) EP2071733B1 (de)
KR (1) KR101041896B1 (de)
CN (1) CN101456530B (de)
HK (1) HK1137979A1 (de)
TW (1) TWI391315B (de)

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US8704408B2 (en) 2011-04-14 2014-04-22 National Instruments Corporation Switch matrix modeling system and method
US9097757B2 (en) 2011-04-14 2015-08-04 National Instruments Corporation Switching element system and method
US9558903B2 (en) 2012-05-02 2017-01-31 National Instruments Corporation MEMS-based switching system
US9287062B2 (en) 2012-05-02 2016-03-15 National Instruments Corporation Magnetic switching system
US9112586B2 (en) * 2012-09-10 2015-08-18 Broadcom Corporation Radio circuits and components thereof including temperature responsive liquid MEMS
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US11493566B2 (en) 2016-09-07 2022-11-08 Texas Tech University System Electric current imaging system
CN108195893B (zh) * 2017-12-25 2020-09-15 北京中凯达自动化工程有限公司 一种集成有气体传感器的集成电路板
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Also Published As

Publication number Publication date
EP2071733A3 (de) 2012-07-25
EP2071733B1 (de) 2019-08-21
EP2071733A2 (de) 2009-06-17
CN101456530B (zh) 2014-06-04
US20130154762A1 (en) 2013-06-20
US20120313723A1 (en) 2012-12-13
KR20090063168A (ko) 2009-06-17
KR101041896B1 (ko) 2011-06-16
US8659366B2 (en) 2014-02-25
TWI391315B (zh) 2013-04-01
TW200944469A (en) 2009-11-01
CN101456530A (zh) 2009-06-17
US8384500B2 (en) 2013-02-26

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20171212