HK1137979A1 - A method and system for mem switching in ic package mems - Google Patents
A method and system for mem switching in ic package memsInfo
- Publication number
- HK1137979A1 HK1137979A1 HK09111245.1A HK09111245A HK1137979A1 HK 1137979 A1 HK1137979 A1 HK 1137979A1 HK 09111245 A HK09111245 A HK 09111245A HK 1137979 A1 HK1137979 A1 HK 1137979A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- package mems
- mem switching
- mem
- switching
- mems
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
- H01P1/127—Strip line switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P3/00—Waveguides; Transmission lines of the waveguide type
- H01P3/003—Coplanar lines
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04B—TRANSMISSION
- H04B1/00—Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
- H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
- H04B1/40—Circuits
- H04B1/44—Transmit/receive switching
- H04B1/48—Transmit/receive switching in circuits for connecting transmitter and receiver to a common transmission path, e.g. by energy of transmitter
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Networks & Wireless Communication (AREA)
- Signal Processing (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Transceivers (AREA)
- Micromachines (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/956,106 US8384500B2 (en) | 2007-12-13 | 2007-12-13 | Method and system for MEMS switches fabricated in an integrated circuit package |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1137979A1 true HK1137979A1 (en) | 2010-08-13 |
Family
ID=40459776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK09111245.1A HK1137979A1 (en) | 2007-12-13 | 2009-12-01 | A method and system for mem switching in ic package mems |
Country Status (6)
Country | Link |
---|---|
US (2) | US8384500B2 (de) |
EP (1) | EP2071733B1 (de) |
KR (1) | KR101041896B1 (de) |
CN (1) | CN101456530B (de) |
HK (1) | HK1137979A1 (de) |
TW (1) | TWI391315B (de) |
Families Citing this family (12)
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US8270912B2 (en) * | 2007-12-12 | 2012-09-18 | Broadcom Corporation | Method and system for a transformer in an integrated circuit package |
US8384500B2 (en) * | 2007-12-13 | 2013-02-26 | Broadcom Corporation | Method and system for MEMS switches fabricated in an integrated circuit package |
US9157952B2 (en) | 2011-04-14 | 2015-10-13 | National Instruments Corporation | Switch matrix system and method |
US8704408B2 (en) | 2011-04-14 | 2014-04-22 | National Instruments Corporation | Switch matrix modeling system and method |
US9097757B2 (en) | 2011-04-14 | 2015-08-04 | National Instruments Corporation | Switching element system and method |
US9558903B2 (en) | 2012-05-02 | 2017-01-31 | National Instruments Corporation | MEMS-based switching system |
US9287062B2 (en) | 2012-05-02 | 2016-03-15 | National Instruments Corporation | Magnetic switching system |
US9112586B2 (en) * | 2012-09-10 | 2015-08-18 | Broadcom Corporation | Radio circuits and components thereof including temperature responsive liquid MEMS |
CN103367269B (zh) * | 2013-07-15 | 2016-03-02 | 香港应用科技研究院有限公司 | 用于射频应用的隔离混合基板 |
US11493566B2 (en) | 2016-09-07 | 2022-11-08 | Texas Tech University System | Electric current imaging system |
CN108195893B (zh) * | 2017-12-25 | 2020-09-15 | 北京中凯达自动化工程有限公司 | 一种集成有气体传感器的集成电路板 |
US10628855B2 (en) * | 2018-09-25 | 2020-04-21 | Microsoft Technology Licensing, Llc | Automatically merging multiple content item queues |
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US5914873A (en) | 1997-06-30 | 1999-06-22 | Advanced Micro Devices | Distributed voltage converter apparatus and method for high power microprocessor with array connections |
US6496612B1 (en) * | 1999-09-23 | 2002-12-17 | Arizona State University | Electronically latching micro-magnetic switches and method of operating same |
US6493861B1 (en) | 1999-12-28 | 2002-12-10 | Intel Corporation | Interconnected series of plated through hole vias and method of fabrication therefor |
US6590468B2 (en) | 2000-07-20 | 2003-07-08 | Paratek Microwave, Inc. | Tunable microwave devices with auto-adjusting matching circuit |
JP4240780B2 (ja) | 2000-08-08 | 2009-03-18 | Tdk株式会社 | パワーアンプ内蔵型アイソレータ装置 |
US6512300B2 (en) | 2001-01-10 | 2003-01-28 | Raytheon Company | Water level interconnection |
US7183633B2 (en) | 2001-03-01 | 2007-02-27 | Analog Devices Inc. | Optical cross-connect system |
US6573122B2 (en) * | 2001-03-28 | 2003-06-03 | International Rectifier Corporation | Wafer level insulation underfill for die attach |
US6815739B2 (en) * | 2001-05-18 | 2004-11-09 | Corporation For National Research Initiatives | Radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates |
AU2002318143A1 (en) * | 2001-05-18 | 2002-12-03 | Microlab, Inc. | Apparatus utilizing latching micromagnetic switches |
US7385286B2 (en) | 2001-06-05 | 2008-06-10 | Matsushita Electric Industrial Co., Ltd. | Semiconductor module |
US6501427B1 (en) * | 2001-07-31 | 2002-12-31 | E-Tenna Corporation | Tunable patch antenna |
US6624003B1 (en) * | 2002-02-06 | 2003-09-23 | Teravicta Technologies, Inc. | Integrated MEMS device and package |
JP3969192B2 (ja) | 2002-05-30 | 2007-09-05 | 株式会社デンソー | 多層配線基板の製造方法 |
US20040016995A1 (en) | 2002-07-25 | 2004-01-29 | Kuo Shun Meen | MEMS control chip integration |
US7402897B2 (en) | 2002-08-08 | 2008-07-22 | Elm Technology Corporation | Vertical system integration |
US7138884B2 (en) | 2002-08-19 | 2006-11-21 | Dsp Group Inc. | Circuit package integrating passive radio frequency structure |
US6784766B2 (en) * | 2002-08-21 | 2004-08-31 | Raytheon Company | MEMS tunable filters |
AU2002331725A1 (en) * | 2002-08-26 | 2004-03-11 | International Business Machines Corporation | Diaphragm activated micro-electromechanical switch |
US7141883B2 (en) | 2002-10-15 | 2006-11-28 | Silicon Laboratories Inc. | Integrated circuit package configuration incorporating shielded circuit element structure |
JP4066928B2 (ja) * | 2002-12-12 | 2008-03-26 | 株式会社村田製作所 | Rfmemsスイッチ |
JP2004214726A (ja) | 2002-12-26 | 2004-07-29 | Sony Corp | 無線通信アンテナ及び無線通信装置 |
CN1536687A (zh) | 2003-04-04 | 2004-10-13 | ����ŵά�� | 采用微电-机系统制造技术的射频元件及其制造方法 |
US7239024B2 (en) * | 2003-04-04 | 2007-07-03 | Thomas Joel Massingill | Semiconductor package with recess for die |
TWI236763B (en) | 2003-05-27 | 2005-07-21 | Megic Corp | High performance system-on-chip inductor using post passivation process |
US7170155B2 (en) | 2003-06-25 | 2007-01-30 | Intel Corporation | MEMS RF switch module including a vertical via |
US6940365B2 (en) * | 2003-07-18 | 2005-09-06 | Rfstream Corporation | Methods and apparatus for an improved discrete LC filter |
SE0302437D0 (sv) * | 2003-09-09 | 2003-09-09 | Joachim Oberhammer | Film actuator based RF MEMS switching circuits |
US7068220B2 (en) * | 2003-09-29 | 2006-06-27 | Rockwell Scientific Licensing, Llc | Low loss RF phase shifter with flip-chip mounted MEMS interconnection |
KR100530010B1 (ko) | 2003-11-13 | 2005-11-22 | 한국과학기술원 | 전자기력과 정전기력을 이용하여 구동하는 토글방식의저전압, 저전력 초고주파 spdt 마이크로 스위치 |
JP4418250B2 (ja) | 2004-02-05 | 2010-02-17 | 株式会社ルネサステクノロジ | 高周波回路モジュール |
US7196607B2 (en) | 2004-03-26 | 2007-03-27 | Harris Corporation | Embedded toroidal transformers in ceramic substrates |
JP4188373B2 (ja) | 2004-06-28 | 2008-11-26 | 三菱電機株式会社 | 多層誘電体基板および半導体パッケージ |
US7042308B2 (en) | 2004-06-29 | 2006-05-09 | Intel Corporation | Mechanism to prevent self-actuation in a microelectromechanical switch |
US7668505B2 (en) * | 2004-09-10 | 2010-02-23 | Honeywell International Inc. | Radio having a MEMS preselect filter |
US7469152B2 (en) | 2004-11-30 | 2008-12-23 | The Regents Of The University Of California | Method and apparatus for an adaptive multiple-input multiple-output (MIMO) wireless communications systems |
US7307341B2 (en) | 2005-01-10 | 2007-12-11 | Ixys Corporation | Integrated packaged having magnetic components |
US7348842B2 (en) | 2005-01-19 | 2008-03-25 | Micro-Mobio | Multi-substrate RF module for wireless communication devices |
CN1716492A (zh) * | 2005-06-07 | 2006-01-04 | 北京邮电大学 | 集成方式的rf mems开关 |
EP1763043B1 (de) | 2005-09-09 | 2010-03-17 | STMicroelectronics S.r.l. | Induktive Anordnung |
US7937054B2 (en) | 2005-12-16 | 2011-05-03 | Honeywell International Inc. | MEMS based multiband receiver architecture |
WO2007090065A2 (en) | 2006-01-27 | 2007-08-09 | Airgain, Inc. | U-antenna |
KR100785084B1 (ko) | 2006-03-30 | 2007-12-12 | 삼성전자주식회사 | 압전형 mems 스위치 및 그 제조방법 |
CN1872658A (zh) * | 2006-05-10 | 2006-12-06 | 东南大学 | 薄顶盖射频微电子机械系统开关封装结构及其制造方法 |
US7336232B1 (en) | 2006-08-04 | 2008-02-26 | Raytheon Company | Dual band space-fed array |
US8145142B2 (en) * | 2007-12-12 | 2012-03-27 | Broadcom Corporation | Method and system for increased resolution switching using MEMS and switched capacitors |
US7859360B2 (en) * | 2007-12-13 | 2010-12-28 | Broadcom Corporation | Method and system for controlling MEMS switches in an integrated circuit package |
US8384500B2 (en) * | 2007-12-13 | 2013-02-26 | Broadcom Corporation | Method and system for MEMS switches fabricated in an integrated circuit package |
-
2007
- 2007-12-13 US US11/956,106 patent/US8384500B2/en active Active
-
2008
- 2008-12-02 EP EP08020896.0A patent/EP2071733B1/de active Active
- 2008-12-12 TW TW097148616A patent/TWI391315B/zh active
- 2008-12-12 CN CN200810187038.9A patent/CN101456530B/zh active Active
- 2008-12-12 KR KR1020080126763A patent/KR101041896B1/ko active IP Right Grant
-
2009
- 2009-12-01 HK HK09111245.1A patent/HK1137979A1/xx not_active IP Right Cessation
-
2013
- 2013-02-20 US US13/772,251 patent/US8659366B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2071733A3 (de) | 2012-07-25 |
EP2071733B1 (de) | 2019-08-21 |
EP2071733A2 (de) | 2009-06-17 |
CN101456530B (zh) | 2014-06-04 |
US20130154762A1 (en) | 2013-06-20 |
US20120313723A1 (en) | 2012-12-13 |
KR20090063168A (ko) | 2009-06-17 |
KR101041896B1 (ko) | 2011-06-16 |
US8659366B2 (en) | 2014-02-25 |
TWI391315B (zh) | 2013-04-01 |
TW200944469A (en) | 2009-11-01 |
CN101456530A (zh) | 2009-06-17 |
US8384500B2 (en) | 2013-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20171212 |