HK1014401A1 - Pulse power generating circuit with energy recovery - Google Patents

Pulse power generating circuit with energy recovery

Info

Publication number
HK1014401A1
HK1014401A1 HK98115646A HK98115646A HK1014401A1 HK 1014401 A1 HK1014401 A1 HK 1014401A1 HK 98115646 A HK98115646 A HK 98115646A HK 98115646 A HK98115646 A HK 98115646A HK 1014401 A1 HK1014401 A1 HK 1014401A1
Authority
HK
Hong Kong
Prior art keywords
generating circuit
power generating
energy recovery
pulse power
pulse
Prior art date
Application number
HK98115646A
Other languages
English (en)
Inventor
Daniel L Birx
Palash P Das
Igor V Fomenkov
William N Partlo
Tom A Watson
Original Assignee
Cymer Inc
Advanced Pulse Power Technolog
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23543599&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=HK1014401(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cymer Inc, Advanced Pulse Power Technolog filed Critical Cymer Inc
Publication of HK1014401A1 publication Critical patent/HK1014401A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
    • H05H1/04—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma using magnetic fields substantially generated by the discharge in the plasma
    • H05H1/06—Longitudinal pinch devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
    • H03K17/51—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used
    • H03K17/80—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the components used using non-linear magnetic devices; using non-linear dielectric devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K2217/00—Indexing scheme related to electronic switching or gating, i.e. not by contact-making or -breaking covered by H03K17/00
    • H03K2217/0036—Means reducing energy consumption

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Lasers (AREA)
HK98115646A 1995-02-17 1998-12-24 Pulse power generating circuit with energy recovery HK1014401A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39070995A 1995-02-17 1995-02-17
PCT/US1996/001033 WO1996025778A1 (en) 1995-02-17 1996-01-26 Pulse power generating circuit with energy recovery

Publications (1)

Publication Number Publication Date
HK1014401A1 true HK1014401A1 (en) 1999-09-24

Family

ID=23543599

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98115646A HK1014401A1 (en) 1995-02-17 1998-12-24 Pulse power generating circuit with energy recovery

Country Status (9)

Country Link
US (1) US5729562A (xx)
EP (1) EP0759215B1 (xx)
JP (1) JP3041540B2 (xx)
AU (1) AU4768596A (xx)
CA (1) CA2186899C (xx)
DE (1) DE69628514T2 (xx)
HK (1) HK1014401A1 (xx)
TW (1) TW384568B (xx)
WO (1) WO1996025778A1 (xx)

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Also Published As

Publication number Publication date
AU4768596A (en) 1996-09-04
CA2186899A1 (en) 1996-08-22
JP3041540B2 (ja) 2000-05-15
EP0759215A4 (en) 2000-01-26
WO1996025778A1 (en) 1996-08-22
US5729562A (en) 1998-03-17
DE69628514T2 (de) 2004-04-29
CA2186899C (en) 2010-04-20
EP0759215A1 (en) 1997-02-26
JPH10503078A (ja) 1998-03-17
EP0759215B1 (en) 2003-06-04
DE69628514D1 (de) 2003-07-10
TW384568B (en) 2000-03-11

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