HK1014036A1 - Method for evaporating metal using a resistance heated pyrolytic boron nitrided coated graphite boat - Google Patents

Method for evaporating metal using a resistance heated pyrolytic boron nitrided coated graphite boat

Info

Publication number
HK1014036A1
HK1014036A1 HK98115251A HK98115251A HK1014036A1 HK 1014036 A1 HK1014036 A1 HK 1014036A1 HK 98115251 A HK98115251 A HK 98115251A HK 98115251 A HK98115251 A HK 98115251A HK 1014036 A1 HK1014036 A1 HK 1014036A1
Authority
HK
Hong Kong
Prior art keywords
nitrided
graphite boat
coated graphite
pyrolytic boron
resistance heated
Prior art date
Application number
HK98115251A
Other languages
English (en)
Inventor
Joseph Michael Morris
Original Assignee
Advanced Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Ceramics Corp filed Critical Advanced Ceramics Corp
Publication of HK1014036A1 publication Critical patent/HK1014036A1/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0017—Use of electrical or wave energy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C04B41/5064—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
HK98115251A 1991-12-20 1998-12-23 Method for evaporating metal using a resistance heated pyrolytic boron nitrided coated graphite boat HK1014036A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US07/810,910 US5239612A (en) 1991-12-20 1991-12-20 Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat
EP93303212A EP0621351B1 (en) 1991-12-20 1993-04-23 Method for evaporating metal using a resistance heated, pyrolytic boron nitrided coated graphite boat
JP5119228A JP2665873B2 (ja) 1991-12-20 1993-04-23 熱分解窒化硼素被覆ボートを使用する金属の抵抗加熱方法
CN93107926A CN1044010C (zh) 1991-12-20 1993-07-03 使用涂敷热解氮化硼的石墨舟的金属电阻加热法

Publications (1)

Publication Number Publication Date
HK1014036A1 true HK1014036A1 (en) 1999-09-17

Family

ID=36829843

Family Applications (1)

Application Number Title Priority Date Filing Date
HK98115251A HK1014036A1 (en) 1991-12-20 1998-12-23 Method for evaporating metal using a resistance heated pyrolytic boron nitrided coated graphite boat

Country Status (6)

Country Link
US (1) US5239612A (zh)
EP (1) EP0621351B1 (zh)
JP (1) JP2665873B2 (zh)
CN (1) CN1044010C (zh)
DE (1) DE69325571T2 (zh)
HK (1) HK1014036A1 (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350720A (en) * 1991-03-18 1994-09-27 Shin-Etsu Chemical Co., Ltd. Triple-layered ceramic heater
US5537507A (en) * 1994-09-28 1996-07-16 Advanced Ceramics Corporation Coated flash evaporator heater
US5495550A (en) * 1994-09-28 1996-02-27 Advanced Ceramics Corporation Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating
US5493630A (en) * 1994-09-28 1996-02-20 Advanced Ceramics Corporation Pyrolytic boron nitride coated flash evaporator
JP3415626B2 (ja) 1994-09-28 2003-06-09 アドヴァンスト・セラミックス・コーポレイション 高密度フラッシュエバポレーター
US5671322A (en) * 1996-01-17 1997-09-23 Advanced Ceramics Corporation Lateral flash evaporator
JP3758755B2 (ja) * 1996-08-13 2006-03-22 信越化学工業株式会社 熱分解窒化ホウ素容器およびその製造方法
US5850073A (en) * 1997-02-18 1998-12-15 Eckert; C. Edward Electric heating element and heater assembly
DE19735814A1 (de) * 1997-08-18 1999-02-25 Kempten Elektroschmelz Gmbh Keramische Flash-TV-Verdampfer
DE19956811A1 (de) * 1999-11-25 2001-06-13 Kempten Elektroschmelz Gmbh Keramischer Flash-TV-Verdampfer
US6229956B1 (en) * 2000-03-22 2001-05-08 Advanced Ceramics Corporation Flash evaporator vessel
CN1332061C (zh) * 2000-12-14 2007-08-15 通用电气公司 闪蒸器皿
KR100489304B1 (ko) * 2002-12-23 2005-05-17 재단법인 포항산업과학연구원 저항가열 보트 및 그 제조방법
US20050000447A1 (en) * 2003-07-04 2005-01-06 Jan Koninckx Crucible for evaporation of raw materials
US20060013966A1 (en) * 2003-09-08 2006-01-19 Jan Koninckx Crucible for evaporation of raw materials
EP2566998A4 (en) * 2010-05-03 2016-01-13 Univ Delaware HEAT EVAPORATION SOURCES WITH SEPARATE LUBRICANTS FOR HOLDING THE EVAPORATIVE MATERIAL
JP5854206B2 (ja) * 2011-11-24 2016-02-09 株式会社昭和真空 蒸着装置
JP2014002931A (ja) * 2012-06-19 2014-01-09 Shin Etsu Chem Co Ltd グラファイトヒーター
CN103088302B (zh) * 2013-02-04 2015-05-13 福州赛瑞特新材料技术开发有限公司 一种氮化硼-石墨组合蒸发舟
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177844A (en) * 1961-06-30 1965-04-13 Sperry Rand Corp Interlocked automatic sequential firing unit
US3537886A (en) * 1964-09-22 1970-11-03 Westinghouse Electric Corp Flash evaporation of corrosive media
GB1246594A (en) * 1970-04-28 1971-09-15 Standard Telephones Cables Ltd Evaporation control
DE2216959A1 (de) * 1972-04-08 1973-10-11 Leybold Heraeus Gmbh & Co Kg Verfahren zum betrieb eines verdampfers in aufdampfanlagen
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
US4183975A (en) * 1978-03-16 1980-01-15 Dare Pafco, Inc. Vacuum metallizing process
US4327122A (en) * 1980-08-13 1982-04-27 General Motors Corporation Evaporated electrodes for zirconia exhaust gas oxygen sensors
JPS5842054A (ja) * 1981-09-08 1983-03-11 Ricoh Co Ltd 電子写真感光体の蒸着方法
JPS59104472A (ja) * 1982-12-03 1984-06-16 Nippon Telegr & Teleph Corp <Ntt> フラツシユ蒸着方法
US4846834A (en) * 1986-05-27 1989-07-11 Clemson University Method for promoting tissue adhesion to soft tissue implants

Also Published As

Publication number Publication date
DE69325571D1 (de) 1999-08-12
US5239612A (en) 1993-08-24
EP0621351A1 (en) 1994-10-26
JPH06306585A (ja) 1994-11-01
DE69325571T2 (de) 1999-11-18
JP2665873B2 (ja) 1997-10-22
CN1044010C (zh) 1999-07-07
EP0621351B1 (en) 1999-07-07
CN1097222A (zh) 1995-01-11

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20040423

PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)