DE69325571D1 - Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung - Google Patents

Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung

Info

Publication number
DE69325571D1
DE69325571D1 DE69325571T DE69325571T DE69325571D1 DE 69325571 D1 DE69325571 D1 DE 69325571D1 DE 69325571 T DE69325571 T DE 69325571T DE 69325571 T DE69325571 T DE 69325571T DE 69325571 D1 DE69325571 D1 DE 69325571D1
Authority
DE
Germany
Prior art keywords
pytolytic
evaporation
metal
boron nitride
resistance heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69325571T
Other languages
English (en)
Other versions
DE69325571T2 (de
Inventor
Joseph Michael Morris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
Advanced Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Ceramics Corp filed Critical Advanced Ceramics Corp
Application granted granted Critical
Publication of DE69325571D1 publication Critical patent/DE69325571D1/de
Publication of DE69325571T2 publication Critical patent/DE69325571T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/0011—Heating features
    • B01D1/0017—Use of electrical or wave energy
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • C04B41/5062—Borides, Nitrides or Silicides
    • C04B41/5064—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE69325571T 1991-12-20 1993-04-23 Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung Expired - Fee Related DE69325571T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US07/810,910 US5239612A (en) 1991-12-20 1991-12-20 Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat
EP93303212A EP0621351B1 (de) 1991-12-20 1993-04-23 Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung
JP5119228A JP2665873B2 (ja) 1991-12-20 1993-04-23 熱分解窒化硼素被覆ボートを使用する金属の抵抗加熱方法
CN93107926A CN1044010C (zh) 1991-12-20 1993-07-03 使用涂敷热解氮化硼的石墨舟的金属电阻加热法

Publications (2)

Publication Number Publication Date
DE69325571D1 true DE69325571D1 (de) 1999-08-12
DE69325571T2 DE69325571T2 (de) 1999-11-18

Family

ID=36829843

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69325571T Expired - Fee Related DE69325571T2 (de) 1991-12-20 1993-04-23 Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung

Country Status (6)

Country Link
US (1) US5239612A (de)
EP (1) EP0621351B1 (de)
JP (1) JP2665873B2 (de)
CN (1) CN1044010C (de)
DE (1) DE69325571T2 (de)
HK (1) HK1014036A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5350720A (en) * 1991-03-18 1994-09-27 Shin-Etsu Chemical Co., Ltd. Triple-layered ceramic heater
GB2313846B (en) * 1994-09-28 1999-05-26 Advanced Ceramics Corp High density flash evaporator
US5493630A (en) * 1994-09-28 1996-02-20 Advanced Ceramics Corporation Pyrolytic boron nitride coated flash evaporator
US5495550A (en) * 1994-09-28 1996-02-27 Advanced Ceramics Corporation Graphite flash evaporator having at least one intermediate layer and a pyrolytic boron nitride coating
US5537507A (en) * 1994-09-28 1996-07-16 Advanced Ceramics Corporation Coated flash evaporator heater
US5671322A (en) * 1996-01-17 1997-09-23 Advanced Ceramics Corporation Lateral flash evaporator
JP3758755B2 (ja) * 1996-08-13 2006-03-22 信越化学工業株式会社 熱分解窒化ホウ素容器およびその製造方法
US5850073A (en) * 1997-02-18 1998-12-15 Eckert; C. Edward Electric heating element and heater assembly
DE19735814A1 (de) * 1997-08-18 1999-02-25 Kempten Elektroschmelz Gmbh Keramische Flash-TV-Verdampfer
DE19956811A1 (de) * 1999-11-25 2001-06-13 Kempten Elektroschmelz Gmbh Keramischer Flash-TV-Verdampfer
US6229956B1 (en) * 2000-03-22 2001-05-08 Advanced Ceramics Corporation Flash evaporator vessel
CN1332061C (zh) * 2000-12-14 2007-08-15 通用电气公司 闪蒸器皿
KR100489304B1 (ko) * 2002-12-23 2005-05-17 재단법인 포항산업과학연구원 저항가열 보트 및 그 제조방법
US20050000447A1 (en) * 2003-07-04 2005-01-06 Jan Koninckx Crucible for evaporation of raw materials
US20060013966A1 (en) * 2003-09-08 2006-01-19 Jan Koninckx Crucible for evaporation of raw materials
US20110275196A1 (en) * 2010-05-03 2011-11-10 University Of Delaware Thermal Evaporation Sources with Separate Crucible for Holding the Evaporant Material
JP5854206B2 (ja) * 2011-11-24 2016-02-09 株式会社昭和真空 蒸着装置
JP2014002931A (ja) * 2012-06-19 2014-01-09 Shin Etsu Chem Co Ltd グラファイトヒーター
CN103088302B (zh) * 2013-02-04 2015-05-13 福州赛瑞特新材料技术开发有限公司 一种氮化硼-石墨组合蒸发舟
US10184168B2 (en) 2015-01-20 2019-01-22 Kennametal Inc. IMC evaporator boat-thermal insulation cartridge assembly
US20160208373A1 (en) 2015-01-20 2016-07-21 Kennametal Inc. Imc evaporator boat assembly
DE102019110950A1 (de) 2019-04-29 2020-10-29 Kennametal Inc. Hartmetallzusammensetzungen und deren Anwendungen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177844A (en) * 1961-06-30 1965-04-13 Sperry Rand Corp Interlocked automatic sequential firing unit
US3537886A (en) * 1964-09-22 1970-11-03 Westinghouse Electric Corp Flash evaporation of corrosive media
GB1246594A (en) * 1970-04-28 1971-09-15 Standard Telephones Cables Ltd Evaporation control
DE2216959A1 (de) * 1972-04-08 1973-10-11 Leybold Heraeus Gmbh & Co Kg Verfahren zum betrieb eines verdampfers in aufdampfanlagen
US4264803A (en) * 1978-01-10 1981-04-28 Union Carbide Corporation Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization
US4183975A (en) * 1978-03-16 1980-01-15 Dare Pafco, Inc. Vacuum metallizing process
US4327122A (en) * 1980-08-13 1982-04-27 General Motors Corporation Evaporated electrodes for zirconia exhaust gas oxygen sensors
JPS5842054A (ja) * 1981-09-08 1983-03-11 Ricoh Co Ltd 電子写真感光体の蒸着方法
JPS59104472A (ja) * 1982-12-03 1984-06-16 Nippon Telegr & Teleph Corp <Ntt> フラツシユ蒸着方法
US4846834A (en) * 1986-05-27 1989-07-11 Clemson University Method for promoting tissue adhesion to soft tissue implants

Also Published As

Publication number Publication date
EP0621351B1 (de) 1999-07-07
US5239612A (en) 1993-08-24
JP2665873B2 (ja) 1997-10-22
DE69325571T2 (de) 1999-11-18
JPH06306585A (ja) 1994-11-01
HK1014036A1 (en) 1999-09-17
EP0621351A1 (de) 1994-10-26
CN1044010C (zh) 1999-07-07
CN1097222A (zh) 1995-01-11

Similar Documents

Publication Publication Date Title
DE69325571T2 (de) Verfahren zur Verdampfung von Metall mittels eines mit pytolytischem Bornitrid überzogenen Graphit-Schiffchens mit Widerstandsheizung
DE69100634D1 (de) Verfahren zur thermischen Regulierung eines Kochgefässes und Vorrichtung zur Durchführung dieses Verfahrens.
DE68912243T2 (de) Verfahren zur kontinuierlichen Heisstauchbeschichtung eines Stahlbandes mit Aluminium.
ATE8276T1 (de) Verfahren zur verbesserung der dehnbarkeit der beschichtung aus einer aluminium-zink-legierung eines gegenstandes aus eisen.
DE69129527T2 (de) Stahlblech mit verbesserter Korrosionbeständigkeit mit Silan-behandelter Silicatbeschichtung
DE69126017T2 (de) Vorrichtung zur Regelung der Fahrbahnbelagsdicke
DE69115494D1 (de) Vorrichtung zur oberflächenplasmonen-resonanz
GB2012251A (en) Pyrolytic boron nitride coated boat for metal vaporization
DE59004730D1 (de) Vorrichtung zur Probenentnahme und zur Bestimmung der Liquiduskurve einer Metallschmelze.
DE69116931T2 (de) Vorrichtung zum optischen Bestimmen der Lage und Stellung eines Gegenstands und Gerät zur Flächenabtasung mit einer derartigen Vorrichtung
DE68909434T2 (de) Verfahren zur Feststellung des Magnesiumgehaltes eines mit Magnesium behandelten Gusseisens.
DE69206316D1 (de) Verfahren zur Metalloberflächenbehandlung mit Zinkphosphat.
DE68917588T2 (de) Verfahren und Vorrichtung zum kontinuierlichen Ätzen und Beschichten von rostfreien Stahlbändern mit Aluminium.
DE69200351T2 (de) Verfahren zur Direktnitridierung von Metallen mit niedrigem Schmelzpunkt.
AT375044B (de) Vorrichtung zur sicherung eines wasserfahrzeugrumpfes mit einer durchtritts
DE69303118T2 (de) Verfahren zur kontinuierlichen Herstellung von mit Metall plattierten Stahlrohren durch Plattierungsbehandlung mittels Schmelze
JPS542944A (en) Corrosion preventing method
ATA46185A (de) Verfahren zur herstellung eines gusseisens mit vermiculargraphit
DE69119497D1 (de) Verfahren zur Beschichtung eines Gegenstandes mit einer Substanz
DE69219022T2 (de) Kontinuierverfahren zur Carbonylierung von Acetylenen
ATA278385A (de) Verfahren zur nutzung der abwaerme eines backofens mit vorzugsweise kontinuierlicher beschickung
DE59004280D1 (de) Verfahren zum Erzielen einer Temparatur einer Metallschmelze.
DE3883993T2 (de) Vorrichtung und verfahren zur vorbehandlung von geschmolzenem metall.
ATE250749T1 (de) Verfahren zur herstellung eines innenseitig mit einer hartchromschicht versehenen waffenrohres
DE3580549D1 (de) Verfahren zur herstellung eines gusseisens mit vermiculargraphit.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: GENERAL ELECTRIC CO., SCHENECTADY, N.Y., US

8339 Ceased/non-payment of the annual fee