HK1006739A1 - Manufacturing process for a micropump - Google Patents
Manufacturing process for a micropumpInfo
- Publication number
- HK1006739A1 HK1006739A1 HK98106084A HK98106084A HK1006739A1 HK 1006739 A1 HK1006739 A1 HK 1006739A1 HK 98106084 A HK98106084 A HK 98106084A HK 98106084 A HK98106084 A HK 98106084A HK 1006739 A1 HK1006739 A1 HK 1006739A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- piece
- closing plates
- cavity
- completed
- machining
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000003754 machining Methods 0.000 abstract 3
- 239000012530 fluid Substances 0.000 abstract 2
- 238000012216 screening Methods 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000000206 photolithography Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
- External Artificial Organs (AREA)
- Weting (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Lubricants (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9306281A FR2705693B1 (fr) | 1993-05-24 | 1993-05-24 | Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide. |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1006739A1 true HK1006739A1 (en) | 1999-03-12 |
Family
ID=9447460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK98106084A HK1006739A1 (en) | 1993-05-24 | 1998-06-23 | Manufacturing process for a micropump |
Country Status (10)
Country | Link |
---|---|
US (1) | US5462839A (xx) |
EP (1) | EP0641934B1 (xx) |
JP (1) | JP3651809B2 (xx) |
AT (1) | ATE146853T1 (xx) |
DE (1) | DE69401250T2 (xx) |
DK (1) | DK0641934T3 (xx) |
ES (1) | ES2099991T3 (xx) |
FR (1) | FR2705693B1 (xx) |
HK (1) | HK1006739A1 (xx) |
SG (1) | SG47036A1 (xx) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6377155B1 (en) | 1995-10-10 | 2002-04-23 | Georgia Tech Research Corp. | Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices |
US5847631A (en) * | 1995-10-10 | 1998-12-08 | Georgia Tech Research Corporation | Magnetic relay system and method capable of microfabrication production |
US6281560B1 (en) | 1995-10-10 | 2001-08-28 | Georgia Tech Research Corp. | Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices |
US5879632A (en) * | 1996-04-09 | 1999-03-09 | Sarnoff Corporation | Apportioning system |
US6331275B1 (en) | 1996-07-08 | 2001-12-18 | Burstein Technologies, Inc. | Spatially addressable, cleavable reflective signal elements, assay device and method |
US20050214827A1 (en) * | 1996-07-08 | 2005-09-29 | Burstein Technologies, Inc. | Assay device and method |
IL127938A (en) | 1996-07-08 | 2002-09-12 | Burstein Lab Inc | A device with a main signal fixed for diagnostic applications and a test method |
US6342349B1 (en) | 1996-07-08 | 2002-01-29 | Burstein Technologies, Inc. | Optical disk-based assay devices and methods |
DE19705910C1 (de) * | 1997-02-15 | 1998-06-18 | Inst Physikalische Hochtech Ev | Mikrokammerarray mit hoher Kammerdichte |
DE19719862A1 (de) | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
DE1129741T1 (de) | 1997-11-19 | 2002-02-21 | Microflow Engineering S.A., Neuenburg/Neuchatel | Sprühvorrichtung für einen Inhalator |
JP2002521666A (ja) * | 1998-07-21 | 2002-07-16 | バースタイン テクノロジーズ,インコーポレイティド | 光ディスクをベースとするアッセイ装置および方法 |
ES2149748T3 (es) | 1998-12-01 | 2007-06-16 | Microflow Engineering Sa | Inhalador con nebulizador de ondas ultrasonicas que presenta unas aberturas de boquilla superpuestas sobre las crestas de un patron de onda estacionaria. |
US6410360B1 (en) | 1999-01-26 | 2002-06-25 | Teledyne Industries, Inc. | Laminate-based apparatus and method of fabrication |
US6827866B1 (en) * | 2000-05-24 | 2004-12-07 | Active Optical Networks, Inc. | Deep-well lithography process for forming micro-electro-mechanical structures |
US6905614B1 (en) | 2000-05-24 | 2005-06-14 | Active Optical Networks, Inc. | Pattern-transfer process for forming micro-electro-mechanical structures |
AU2002241602A1 (en) * | 2000-11-16 | 2002-06-11 | Burstein Technologies, Inc. | Methods and apparatus for detecting and quantifying lymphocytes with optical biodiscs |
US6965433B2 (en) * | 2000-11-16 | 2005-11-15 | Nagaoka & Co., Ltd. | Optical biodiscs with reflective layers |
US7087203B2 (en) * | 2000-11-17 | 2006-08-08 | Nagaoka & Co., Ltd. | Methods and apparatus for blood typing with optical bio-disc |
US7026131B2 (en) * | 2000-11-17 | 2006-04-11 | Nagaoka & Co., Ltd. | Methods and apparatus for blood typing with optical bio-discs |
EP1236517A1 (en) * | 2001-02-23 | 2002-09-04 | Microflow Engineering SA | Method of manufacturing a liquid droplet spray device and such spray device |
US7141416B2 (en) * | 2001-07-12 | 2006-11-28 | Burstein Technologies, Inc. | Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith |
US20030143637A1 (en) * | 2001-08-31 | 2003-07-31 | Selvan Gowri Pyapali | Capture layer assemblies for cellular assays including related optical analysis discs and methods |
JP2005502872A (ja) * | 2001-09-07 | 2005-01-27 | バースタイン テクノロジーズ,インコーポレイティド | 光バイオディスクシステムを使用した、核の形態に基づく白血球の型の識別および定量 |
US20050003459A1 (en) * | 2002-01-30 | 2005-01-06 | Krutzik Siegfried Richard | Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents |
US20050023765A1 (en) * | 2002-01-31 | 2005-02-03 | Coombs James Howard | Bio-safety features for optical analysis disc and disc system including same |
US20040241381A1 (en) * | 2002-01-31 | 2004-12-02 | Chen Yihfar | Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs |
WO2005011830A2 (en) * | 2003-07-25 | 2005-02-10 | Nagaoka & Co., Ltd. | Fluidic circuits for sample preparation including bio-discs and methods relating thereto |
US7538473B2 (en) * | 2004-02-03 | 2009-05-26 | S.C. Johnson & Son, Inc. | Drive circuits and methods for ultrasonic piezoelectric actuators |
US7723899B2 (en) | 2004-02-03 | 2010-05-25 | S.C. Johnson & Son, Inc. | Active material and light emitting device |
EP1792662A1 (en) | 2005-11-30 | 2007-06-06 | Microflow Engineering SA | Volatile liquid droplet dispenser device |
TWI580878B (zh) * | 2016-07-19 | 2017-05-01 | 科際精密股份有限公司 | 單向閥組件 |
CN112016805B (zh) * | 2020-07-23 | 2023-06-06 | 上海工程技术大学 | 一种磁流变液性能评价方法及系统 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4938742A (en) * | 1988-02-04 | 1990-07-03 | Smits Johannes G | Piezoelectric micropump with microvalves |
US5224843A (en) * | 1989-06-14 | 1993-07-06 | Westonbridge International Ltd. | Two valve micropump with improved outlet |
CH681168A5 (en) * | 1989-11-10 | 1993-01-29 | Westonbridge Int Ltd | Micro-pump for medicinal dosing |
US5171132A (en) * | 1989-12-27 | 1992-12-15 | Seiko Epson Corporation | Two-valve thin plate micropump |
US5259737A (en) * | 1990-07-02 | 1993-11-09 | Seiko Epson Corporation | Micropump with valve structure |
-
1993
- 1993-05-24 FR FR9306281A patent/FR2705693B1/fr not_active Expired - Fee Related
-
1994
- 1994-05-13 AT AT94107419T patent/ATE146853T1/de not_active IP Right Cessation
- 1994-05-13 ES ES94107419T patent/ES2099991T3/es not_active Expired - Lifetime
- 1994-05-13 DK DK94107419.7T patent/DK0641934T3/da active
- 1994-05-13 SG SG1996003690A patent/SG47036A1/en unknown
- 1994-05-13 JP JP12333394A patent/JP3651809B2/ja not_active Expired - Fee Related
- 1994-05-13 EP EP94107419A patent/EP0641934B1/fr not_active Expired - Lifetime
- 1994-05-13 DE DE69401250T patent/DE69401250T2/de not_active Expired - Fee Related
- 1994-05-23 US US08/247,550 patent/US5462839A/en not_active Expired - Lifetime
-
1998
- 1998-06-23 HK HK98106084A patent/HK1006739A1/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE69401250T2 (de) | 1997-07-10 |
DK0641934T3 (da) | 1997-10-13 |
FR2705693B1 (fr) | 1995-07-28 |
EP0641934A1 (fr) | 1995-03-08 |
JPH0719170A (ja) | 1995-01-20 |
ATE146853T1 (de) | 1997-01-15 |
US5462839A (en) | 1995-10-31 |
DE69401250D1 (de) | 1997-02-06 |
FR2705693A1 (fr) | 1994-12-02 |
EP0641934B1 (fr) | 1996-12-27 |
JP3651809B2 (ja) | 2005-05-25 |
SG47036A1 (en) | 1998-03-20 |
ES2099991T3 (es) | 1997-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PF | Patent in force | ||
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20100513 |