GB9920640D0 - Deposition of thin films - Google Patents

Deposition of thin films

Info

Publication number
GB9920640D0
GB9920640D0 GBGB9920640.1A GB9920640A GB9920640D0 GB 9920640 D0 GB9920640 D0 GB 9920640D0 GB 9920640 A GB9920640 A GB 9920640A GB 9920640 D0 GB9920640 D0 GB 9920640D0
Authority
GB
United Kingdom
Prior art keywords
deposition
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9920640.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GBGB9920640.1A priority Critical patent/GB9920640D0/en
Publication of GB9920640D0 publication Critical patent/GB9920640D0/en
Priority to PCT/GB2000/003315 priority patent/WO2001016393A1/en
Ceased legal-status Critical Current

Links

GBGB9920640.1A 1999-09-02 1999-09-02 Deposition of thin films Ceased GB9920640D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB9920640.1A GB9920640D0 (en) 1999-09-02 1999-09-02 Deposition of thin films
PCT/GB2000/003315 WO2001016393A1 (en) 1999-09-02 2000-08-29 Method and apparatus for deposition of thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9920640.1A GB9920640D0 (en) 1999-09-02 1999-09-02 Deposition of thin films

Publications (1)

Publication Number Publication Date
GB9920640D0 true GB9920640D0 (en) 1999-11-03

Family

ID=10860146

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9920640.1A Ceased GB9920640D0 (en) 1999-09-02 1999-09-02 Deposition of thin films

Country Status (2)

Country Link
GB (1) GB9920640D0 (en)
WO (1) WO2001016393A1 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0432051A (en) * 1990-05-29 1992-02-04 Oki Electric Ind Co Ltd Apparatus for producing thermomagnetic recording medium
JPH0455395A (en) * 1990-06-25 1992-02-24 Nippon Telegr & Teleph Corp <Ntt> Formation of crystalline multicomponent thin film
US5196101A (en) * 1991-02-05 1993-03-23 Califoria Institute Of Technology Deposition of thin films of multicomponent materials
US6217720B1 (en) * 1997-06-03 2001-04-17 National Research Council Of Canada Multi-layer reactive sputtering method with reduced stabilization time

Also Published As

Publication number Publication date
WO2001016393A1 (en) 2001-03-08

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)