AU4262201A - Method of depositing metal films - Google Patents

Method of depositing metal films

Info

Publication number
AU4262201A
AU4262201A AU42622/01A AU4262201A AU4262201A AU 4262201 A AU4262201 A AU 4262201A AU 42622/01 A AU42622/01 A AU 42622/01A AU 4262201 A AU4262201 A AU 4262201A AU 4262201 A AU4262201 A AU 4262201A
Authority
AU
Australia
Prior art keywords
metal films
depositing metal
depositing
films
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU42622/01A
Inventor
Mark Graeme Martin Harris
Paul Rich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aviza Europe Ltd
Original Assignee
Aviza Europe Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0007559A external-priority patent/GB0007559D0/en
Priority claimed from GB0010246A external-priority patent/GB0010246D0/en
Priority claimed from GB0030465A external-priority patent/GB0030465D0/en
Application filed by Aviza Europe Ltd filed Critical Aviza Europe Ltd
Publication of AU4262201A publication Critical patent/AU4262201A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
AU42622/01A 2000-03-29 2001-03-27 Method of depositing metal films Abandoned AU4262201A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB0007559 2000-03-29
GB0007559A GB0007559D0 (en) 2000-03-29 2000-03-29 Method of depositing metal films
GB0010246 2000-04-28
GB0010246A GB0010246D0 (en) 2000-04-28 2000-04-28 Method of depositing metal films
GB0030465A GB0030465D0 (en) 2000-12-14 2000-12-14 Method of depositioning metallic films
GB0030465 2000-12-14
PCT/GB2001/001407 WO2001073153A1 (en) 2000-03-29 2001-03-27 Method of depositing metal films

Publications (1)

Publication Number Publication Date
AU4262201A true AU4262201A (en) 2001-10-08

Family

ID=27255629

Family Applications (1)

Application Number Title Priority Date Filing Date
AU42622/01A Abandoned AU4262201A (en) 2000-03-29 2001-03-27 Method of depositing metal films

Country Status (2)

Country Link
AU (1) AU4262201A (en)
WO (1) WO2001073153A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2399350B (en) * 2003-03-11 2006-06-21 Trikon Technologies Ltd Methods of forming tungsten or tungsten containing films
US7291251B2 (en) * 2004-10-19 2007-11-06 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Method of making coated article with IR reflecting layer(s) using krypton gas
US7267748B2 (en) 2004-10-19 2007-09-11 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. Method of making coated article having IR reflecting layer with predetermined target-substrate distance
WO2016191690A1 (en) * 2015-05-27 2016-12-01 Saint-Gobain Performance Plastics Corporation Conductive thin film composite
US11152325B2 (en) 2019-08-22 2021-10-19 Cree, Inc. Contact and die attach metallization for silicon carbide based devices and related methods of sputtering eutectic alloys

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774151A (en) * 1986-05-23 1988-09-27 International Business Machines Corporation Low contact electrical resistant composition, substrates coated therewith, and process for preparing such
US5068022A (en) * 1989-11-27 1991-11-26 E. I. Du Pont De Nemours And Company Process for sputtering multilayers for magneto-optical recording
JPH04251453A (en) * 1990-12-29 1992-09-07 Taiyo Yuden Co Ltd Production of optical information recording medium
DE4215664C1 (en) * 1992-05-13 1993-11-25 Mtu Muenchen Gmbh Process for the application of metallic intermediate layers and its application

Also Published As

Publication number Publication date
WO2001073153A1 (en) 2001-10-04

Similar Documents

Publication Publication Date Title
AU7926800A (en) Method of depositing transition metal nitride thin films
AU2002343062A1 (en) Method for depositing items of value
GB2351680B (en) Method of forming coating films
AU2001261061A1 (en) Method for depositing metal and metal oxide films and patterned films
EP1148539A3 (en) Method of depositing low K films using an oxidizing plasma
AU2001236602A1 (en) Apparatus and method for deposition of thin films
AU2001241479A1 (en) Method and apparatus for depositing films
AU2002245050A1 (en) Method for deposit copper on metal films
AU2001231076A1 (en) Polymeric coated metal strip and method for producing same
AU2002360993A1 (en) Method for coating objects
AU1571401A (en) Deposition of fluorosilsesquioxane films
AU2000276782A1 (en) Spray-spin coating method
AU2001279897A1 (en) Plasma coating method
AU2001236102A1 (en) Chromium-containing metal and method for producing the same
AU4262201A (en) Method of depositing metal films
AU2002357919A1 (en) Coating composition for metal conductors and coating process
GB2366751B (en) Coating film-forming method
AU2002302775A1 (en) Autocatalytic coating method
AU2001289846A1 (en) Method for producing an adhesive metal coating
GB2360716B (en) Method of forming metallic coating films
AU2001294906A1 (en) Process for coating metal surfaces
AU2001248930A1 (en) Method for coating articles made of aluminium silicon-containing alloys
AU2002352120A1 (en) Coating method
GB0010246D0 (en) Method of depositing metal films
GB0007559D0 (en) Method of depositing metal films

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase