GB972774A - Improvements in and relating to strata decomposition of solid substances - Google Patents
Improvements in and relating to strata decomposition of solid substancesInfo
- Publication number
- GB972774A GB972774A GB3707860A GB3707860A GB972774A GB 972774 A GB972774 A GB 972774A GB 3707860 A GB3707860 A GB 3707860A GB 3707860 A GB3707860 A GB 3707860A GB 972774 A GB972774 A GB 972774A
- Authority
- GB
- United Kingdom
- Prior art keywords
- gas
- decomposition
- oct
- cooled
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000354 decomposition reaction Methods 0.000 title abstract 3
- 239000007787 solid Substances 0.000 title abstract 2
- 239000000126 substance Substances 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 8
- 239000000463 material Substances 0.000 abstract 3
- 239000011368 organic material Substances 0.000 abstract 2
- 238000001994 activation Methods 0.000 abstract 1
- 230000004913 activation Effects 0.000 abstract 1
- 125000004429 atom Chemical group 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 238000007725 thermal activation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- ing And Chemical Polishing (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT777159A AT222385B (de) | 1959-10-28 | 1959-10-28 | Verfahren zum Schichtabbau fester Stoffe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB972774A true GB972774A (en) | 1964-10-14 |
Family
ID=3599312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3707860A Expired GB972774A (en) | 1959-10-28 | 1960-10-28 | Improvements in and relating to strata decomposition of solid substances |
Country Status (5)
| Country | Link |
|---|---|
| AT (1) | AT222385B (esLanguage) |
| CH (1) | CH416158A (esLanguage) |
| DE (1) | DE1293479B (esLanguage) |
| GB (1) | GB972774A (esLanguage) |
| SE (1) | SE303203B (esLanguage) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE524671A (esLanguage) * | 1952-11-29 | 1900-01-01 | ||
| US2829070A (en) * | 1955-04-27 | 1958-04-01 | Du Pont | Treatment of synthetic linear polyester structures and product |
-
1959
- 1959-10-28 AT AT777159A patent/AT222385B/de active
-
1960
- 1960-10-26 SE SE1029060A patent/SE303203B/xx unknown
- 1960-10-27 DE DE1960G0030804 patent/DE1293479B/de active Pending
- 1960-10-27 CH CH1242560A patent/CH416158A/de unknown
- 1960-10-28 GB GB3707860A patent/GB972774A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1293479B (de) | 1969-04-24 |
| SE303203B (esLanguage) | 1968-08-19 |
| AT222385B (de) | 1962-07-25 |
| CH416158A (de) | 1966-06-30 |
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