GB971276A - Optical comparison apparatus - Google Patents

Optical comparison apparatus

Info

Publication number
GB971276A
GB971276A GB2587862A GB2587862A GB971276A GB 971276 A GB971276 A GB 971276A GB 2587862 A GB2587862 A GB 2587862A GB 2587862 A GB2587862 A GB 2587862A GB 971276 A GB971276 A GB 971276A
Authority
GB
United Kingdom
Prior art keywords
mirror
screen
light
lens
comparison apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2587862A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB971276A publication Critical patent/GB971276A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes

Abstract

971,276. Optical comparators. E.SICK. July 5, 1962 [Aug. 9, 1961], No. 25878/62. Heading G2J. A device for visually compairing a test object 1 with a master object 2 comprises means for illuminating them through an apertured support 11 and passing light from object 1 via mirrors 14, 4, lens 6, and mirror 10 to a viewing screen and light from object 2 via mirrors 15, 16, lens 6 and mirror 10 to said screen, the two light paths being equal. The images formed on the screen appear to be superimposed but are formed alternately by a semicircular mirror 4 being rotated at a speed greater than 16 cycles per second.
GB2587862A 1961-08-09 1962-07-05 Optical comparison apparatus Expired GB971276A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0075240 1961-08-09

Publications (1)

Publication Number Publication Date
GB971276A true GB971276A (en) 1964-09-30

Family

ID=7505228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2587862A Expired GB971276A (en) 1961-08-09 1962-07-05 Optical comparison apparatus

Country Status (4)

Country Link
BE (1) BE620524A (en)
CH (1) CH406655A (en)
FR (1) FR1329272A (en)
GB (1) GB971276A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582215A (en) * 1968-02-16 1971-06-01 Int Standard Electric Corp Optical comparison device
US3744917A (en) * 1971-05-14 1973-07-10 Symbionics Inc Optical comparison device using an optical diffuser

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3582215A (en) * 1968-02-16 1971-06-01 Int Standard Electric Corp Optical comparison device
US3744917A (en) * 1971-05-14 1973-07-10 Symbionics Inc Optical comparison device using an optical diffuser

Also Published As

Publication number Publication date
BE620524A (en)
DE1423598A1 (en) 1969-01-30
DE1423598B2 (en) 1971-08-12
FR1329272A (en) 1963-06-07
CH406655A (en) 1966-01-31

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