GB955505A - Improvements in or relating to electron microscopes - Google Patents

Improvements in or relating to electron microscopes

Info

Publication number
GB955505A
GB955505A GB2916860A GB2916860A GB955505A GB 955505 A GB955505 A GB 955505A GB 2916860 A GB2916860 A GB 2916860A GB 2916860 A GB2916860 A GB 2916860A GB 955505 A GB955505 A GB 955505A
Authority
GB
United Kingdom
Prior art keywords
deflection
periodically
electron microscopes
relating
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2916860A
Inventor
Ernst Guyenot
Eberhard Hahn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL104889D priority Critical patent/NL104889C/xx
Priority to DEI17080A priority patent/DE1125565B/en
Priority to FR822356A priority patent/FR1256195A/en
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to GB2916860A priority patent/GB955505A/en
Priority to US154385A priority patent/US3134899A/en
Publication of GB955505A publication Critical patent/GB955505A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Abstract

955,505. Electron microscopes. CARL ZEISS JENA VEB. Aug. 23, 1960, No. 29168/60. Heading H1D. [Also in Division G1] In an electron microscope the target 8, a luminescent screen which may be tilted out of the way of a photographic plate (not shown) disposed behind it, is connected by cable 7 to one of a pair of deflection electrodes 3, 10 which may form part of a stigmator system for correcting axial astigmatism. The other deflection electrode 10 is connected to a voltage supplying circuit, the compensating voltage it is necessary to apply to nullify the deflection of the beam providing a measure of the charge and hence of the brightness of the beam spot. The deflecting system may be periodically and automatically earthed to return the beam periodically to its original position for checking purposes.
GB2916860A 1959-10-06 1960-08-23 Improvements in or relating to electron microscopes Expired GB955505A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL104889D NL104889C (en) 1960-08-23
DEI17080A DE1125565B (en) 1959-10-06 1959-10-06 Device for intensity measurement for corpuscular beam apparatus, especially electron microscopes
FR822356A FR1256195A (en) 1960-03-24 1960-03-24 Device for measuring and indicating the intensity applicable to particle radiation devices, in particular electron microscopes
GB2916860A GB955505A (en) 1960-08-23 1960-08-23 Improvements in or relating to electron microscopes
US154385A US3134899A (en) 1960-08-23 1961-11-13 Intensity measuring and/or recording devices for corpuscular radiation apparatus, particularly electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2916860A GB955505A (en) 1960-08-23 1960-08-23 Improvements in or relating to electron microscopes

Publications (1)

Publication Number Publication Date
GB955505A true GB955505A (en) 1964-04-15

Family

ID=10287214

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2916860A Expired GB955505A (en) 1959-10-06 1960-08-23 Improvements in or relating to electron microscopes

Country Status (2)

Country Link
GB (1) GB955505A (en)
NL (1) NL104889C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1925330B1 (en) * 1969-05-16 1970-10-22 Siemens Ag Corpuscular beam device with information storage

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1925330B1 (en) * 1969-05-16 1970-10-22 Siemens Ag Corpuscular beam device with information storage

Also Published As

Publication number Publication date
NL104889C (en)

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