GB9509207D0 - Method for the fabrication of a semiconductor device - Google Patents

Method for the fabrication of a semiconductor device

Info

Publication number
GB9509207D0
GB9509207D0 GBGB9509207.8A GB9509207A GB9509207D0 GB 9509207 D0 GB9509207 D0 GB 9509207D0 GB 9509207 A GB9509207 A GB 9509207A GB 9509207 D0 GB9509207 D0 GB 9509207D0
Authority
GB
United Kingdom
Prior art keywords
fabrication
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9509207.8A
Other versions
GB2289984A8 (en
GB2289984B (en
GB2289984A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Hyundai Electronics Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Industries Co Ltd filed Critical Hyundai Electronics Industries Co Ltd
Publication of GB9509207D0 publication Critical patent/GB9509207D0/en
Publication of GB2289984A publication Critical patent/GB2289984A/en
Publication of GB2289984A8 publication Critical patent/GB2289984A8/en
Application granted granted Critical
Publication of GB2289984B publication Critical patent/GB2289984B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • H10B12/02Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03Making the capacitor or connections thereto
    • H10B12/033Making the capacitor or connections thereto the capacitor extending over the transistor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Memories (AREA)
GB9509207A 1994-05-07 1995-05-05 Method for the fabrication of a semiconductor device Expired - Fee Related GB2289984B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940009963A KR0126640B1 (en) 1994-05-07 1994-05-07 Semiconductor device & manufacturing method

Publications (4)

Publication Number Publication Date
GB9509207D0 true GB9509207D0 (en) 1995-06-28
GB2289984A GB2289984A (en) 1995-12-06
GB2289984A8 GB2289984A8 (en) 1997-07-14
GB2289984B GB2289984B (en) 1998-03-11

Family

ID=19382624

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9509207A Expired - Fee Related GB2289984B (en) 1994-05-07 1995-05-05 Method for the fabrication of a semiconductor device

Country Status (3)

Country Link
KR (1) KR0126640B1 (en)
CN (1) CN1049300C (en)
GB (1) GB2289984B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100213209B1 (en) * 1996-07-29 1999-08-02 윤종용 Manufacturing method of semiconductor devices
GB2324408A (en) * 1997-01-21 1998-10-21 United Microelectronics Corporation Forming DRAM cells
CN1059983C (en) * 1997-07-04 2000-12-27 联华电子股份有限公司 Method for forming dynamic random access storage
JP2000012687A (en) 1998-06-23 2000-01-14 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
GB2341427A (en) * 1998-09-08 2000-03-15 Gerard Francis Robinson Sealing member
JP3241020B2 (en) * 1999-03-26 2001-12-25 日本電気株式会社 Method for manufacturing semiconductor device
US7266798B2 (en) * 2005-10-12 2007-09-04 International Business Machines Corporation Designer's intent tolerance bands for proximity correction and checking
KR100751663B1 (en) * 2006-09-06 2007-08-23 주식회사 하이닉스반도체 Manufacturing method for semiconductor device
US9254998B2 (en) * 2013-03-11 2016-02-09 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS device with a capping substrate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD299990A5 (en) * 1990-02-23 1992-05-14 Dresden Forschzentr Mikroelek One-transistor memory cell arrangement and method for its production
EP0449422B1 (en) * 1990-02-26 1997-06-18 Nec Corporation Semiconductor memory device
US5128549A (en) * 1990-03-30 1992-07-07 Beckman Instruments, Inc. Stray radiation compensation
JP3123073B2 (en) * 1990-11-08 2001-01-09 日本電気株式会社 Method for manufacturing semiconductor memory device

Also Published As

Publication number Publication date
GB2289984A8 (en) 1997-07-14
CN1049300C (en) 2000-02-09
GB2289984B (en) 1998-03-11
CN1116771A (en) 1996-02-14
KR950034516A (en) 1995-12-28
KR0126640B1 (en) 1998-04-02
GB2289984A (en) 1995-12-06

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20130505