GB9507930D0 - Inertial sensor assemblies - Google Patents
Inertial sensor assembliesInfo
- Publication number
- GB9507930D0 GB9507930D0 GBGB9507930.7A GB9507930A GB9507930D0 GB 9507930 D0 GB9507930 D0 GB 9507930D0 GB 9507930 A GB9507930 A GB 9507930A GB 9507930 D0 GB9507930 D0 GB 9507930D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- inertial sensor
- sensor assemblies
- assemblies
- inertial
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000712 assembly Effects 0.000 title 1
- 238000000429 assembly Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0074—3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
- G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
- G01C21/12—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning
- G01C21/16—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration executed aboard the object being navigated; Dead reckoning by integrating acceleration or speed, i.e. inertial navigation
- G01C21/166—Mechanical, construction or arrangement details of inertial navigation systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5628—Manufacturing; Trimming; Mounting; Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
Landscapes
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9507930.7A GB9507930D0 (en) | 1995-04-19 | 1995-04-19 | Inertial sensor assemblies |
GB9604112A GB2300047B (en) | 1995-04-19 | 1996-02-27 | Inertial sensor assemblies |
DE19610554A DE19610554B4 (de) | 1995-04-19 | 1996-03-18 | Beschleunigungssensorbaugruppe |
FR9604294A FR2733321A1 (fr) | 1995-04-19 | 1996-04-02 | Unite de detecteur d'inertie |
JP8096940A JPH08304081A (ja) | 1995-04-19 | 1996-04-18 | 慣性センサアセンブリ |
US08/859,264 US5880368A (en) | 1995-04-19 | 1997-05-20 | Inertial sensors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9507930.7A GB9507930D0 (en) | 1995-04-19 | 1995-04-19 | Inertial sensor assemblies |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9507930D0 true GB9507930D0 (en) | 1995-06-14 |
Family
ID=10773183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9507930.7A Pending GB9507930D0 (en) | 1995-04-19 | 1995-04-19 | Inertial sensor assemblies |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH08304081A (fr) |
DE (1) | DE19610554B4 (fr) |
FR (1) | FR2733321A1 (fr) |
GB (1) | GB9507930D0 (fr) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0829703A4 (fr) * | 1996-03-29 | 2000-04-19 | Ngk Insulators Ltd | Capteur gyroscopique d'oscillations, capteur composite et procede de production d'un capteur gyroscopique |
US6003369A (en) * | 1997-05-19 | 1999-12-21 | Continental Teves, Inc. | Method for manufacturing encapsulated semiconductor devices |
JP2000097707A (ja) | 1998-09-18 | 2000-04-07 | Fujitsu Ltd | 加速度センサ |
FR2861464B1 (fr) | 2003-10-28 | 2006-02-17 | Commissariat Energie Atomique | Detecteur de mouvement a six degres de liberte avec trois capteurs de position et procede de fabrication d'un capteur |
SE528404C2 (sv) | 2004-10-20 | 2006-11-07 | Imego Ab | Sensorarrangemang |
JP5037819B2 (ja) | 2005-03-04 | 2012-10-03 | ソニー株式会社 | 電子機器 |
DE102005023591A1 (de) * | 2005-05-18 | 2006-11-30 | Hl-Planar Technik Gmbh | Feldmesseinrichtung, Messbaugruppe für eine Feldmesseinrichtung und Herstellungsmethode für eine Mehrzahl von Messbaugruppen |
DE102005047873B4 (de) * | 2005-10-06 | 2010-10-14 | Günthner, Wolfgang, Dipl.-Ing. | Miniaturisiertes Inertialmesssystem |
US7237437B1 (en) * | 2005-10-27 | 2007-07-03 | Honeywell International Inc. | MEMS sensor systems and methods |
FR2903812B1 (fr) * | 2006-07-13 | 2008-10-31 | Commissariat Energie Atomique | Circuit integre reparti sur au moins deux plans non paralleles et son procede de realisation |
DE102009001247A1 (de) | 2009-02-27 | 2010-09-09 | Sensordynamics Ag | Mikro-elektro-mechanischer Sensor |
DE102014207766A1 (de) * | 2014-04-24 | 2015-10-29 | Continental Teves Ag & Co. Ohg | 3-Achsen-Inertialsensor mit 2-Achsen-Inertialsensor überwachen |
JP6519122B2 (ja) * | 2014-08-25 | 2019-05-29 | セイコーエプソン株式会社 | センサーデバイス、電子機器および移動体 |
DE102016122042B4 (de) | 2015-11-20 | 2022-02-17 | Jena Optronik Gmbh | Sensorbaugruppe zur Lageermittlung eines Objekts |
KR101724332B1 (ko) * | 2015-12-16 | 2017-04-07 | 국방과학연구소 | 관성 측정 장치 |
US10473464B2 (en) | 2018-01-17 | 2019-11-12 | Cubic Corporation | Cuboid inertial measurement unit |
GB2571916A (en) * | 2018-02-23 | 2019-09-18 | Atlantic Inertial Systems Ltd | Inertial measurement units |
WO2020208670A1 (fr) * | 2019-04-08 | 2020-10-15 | 三菱電機株式会社 | Unité d'extérieur pour climatiseur |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5012316A (en) * | 1989-03-28 | 1991-04-30 | Cardiac Pacemakers, Inc. | Multiaxial transducer interconnection apparatus |
DE9113744U1 (de) * | 1991-11-05 | 1992-01-16 | SMT & Hybrid GmbH, O-8012 Dresden | Dreidimensionaler mikromechanischer Beschleunigungssensor mit integrierter Elektronik |
-
1995
- 1995-04-19 GB GBGB9507930.7A patent/GB9507930D0/en active Pending
-
1996
- 1996-03-18 DE DE19610554A patent/DE19610554B4/de not_active Expired - Fee Related
- 1996-04-02 FR FR9604294A patent/FR2733321A1/fr not_active Withdrawn
- 1996-04-18 JP JP8096940A patent/JPH08304081A/ja not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
FR2733321A1 (fr) | 1996-10-25 |
DE19610554B4 (de) | 2006-09-21 |
JPH08304081A (ja) | 1996-11-22 |
DE19610554A1 (de) | 1996-10-24 |
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