GB9310013D0 - Method and apparatus for fabricating microlenses - Google Patents

Method and apparatus for fabricating microlenses

Info

Publication number
GB9310013D0
GB9310013D0 GB9310013A GB9310013A GB9310013D0 GB 9310013 D0 GB9310013 D0 GB 9310013D0 GB 9310013 A GB9310013 A GB 9310013A GB 9310013 A GB9310013 A GB 9310013A GB 9310013 D0 GB9310013 D0 GB 9310013D0
Authority
GB
Grant status
Grant
Patent type
Prior art keywords
microlenses
mask
exposure
apparatus
method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB9310013A
Other versions
GB2277998A (en )
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems Electronics Ltd
Original Assignee
BAE Systems Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/02Simple or compound lenses with non-spherical faces
    • G02B3/08Simple or compound lenses with non-spherical faces with discontinuous faces, e.g. Fresnel lens
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001Phase modulating patterns, e.g. refractive index patterns

Abstract

A mask for producing microlenses comprising an opaque layer which has a plurality of openings of different sizes and at different locations which conform to the microlenses to be produced, the mask preferably being formed of an array of subpixels 55 of various grey scale elements 57 (see also Fig 12), the array preferably being 40 x 40. This mask 51 is used to produce microlenses in a single exposure via shutter and lens a silicon chip which is coated with a photoresist which is developed after exposure. The exposure can be repeated by moving the XY stage in either the X or Y directions. <IMAGE>
GB9310013A 1993-05-13 1993-05-13 Method and apparatus for fabricating microlenses Withdrawn GB9310013D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9310013A GB9310013D0 (en) 1993-05-13 1993-05-13 Method and apparatus for fabricating microlenses

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9310013A GB9310013D0 (en) 1993-05-13 1993-05-13 Method and apparatus for fabricating microlenses
PCT/GB1994/000974 WO1994027187A1 (en) 1993-05-13 1994-05-05 Fabrication of microcomponents

Publications (2)

Publication Number Publication Date
GB9310013D0 true GB9310013D0 (en) 1993-06-30
GB2277998A true GB2277998A (en) 1994-11-16

Family

ID=10735520

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9310013A Withdrawn GB9310013D0 (en) 1993-05-13 1993-05-13 Method and apparatus for fabricating microlenses

Country Status (2)

Country Link
GB (1) GB9310013D0 (en)
WO (1) WO1994027187A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100209752B1 (en) * 1996-05-16 1999-07-15 구본준 Patterning mask for micro-lens
GB2344899B (en) 1999-05-29 2000-11-22 Bookham Technology Ltd Production of an integrated optical device
DE10120703A1 (en) 2001-04-27 2002-10-31 Osram Opto Semiconductors Gmbh Semiconductor chip for optoelectronics
DE10146619C2 (en) * 2001-09-21 2003-11-20 Max Planck Gesellschaft A process for the generation of a two-dimensional photo-mask

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3044257A1 (en) * 1979-12-27 1981-07-02 Sacher Rudolf Gmbh Self-supporting mask, methods for making and using same
US4343877A (en) * 1981-01-02 1982-08-10 Amdahl Corporation System for design and production of integrated circuit photomasks and integrated circuit devices
US4613981A (en) * 1984-01-24 1986-09-23 Varian Associates, Inc. Method and apparatus for lithographic rotate and repeat processing
FR2590376A1 (en) * 1985-11-21 1987-05-22 Dumant Jean Marc Process for masking and mask uses
GB2190215B (en) * 1986-05-01 1989-12-13 Smiths Industries Plc Integrated circuit substrates and masks
DE3623637C2 (en) * 1986-07-12 1988-08-25 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De
JPH0746681B2 (en) * 1986-10-28 1995-05-17 富士通株式会社 Method of manufacturing a mask for X-ray stepper
US5004673A (en) * 1987-04-20 1991-04-02 Environmental Research Institute Of Michigan Method of manufacturing surface relief patterns of variable cross-sectional geometry
US4902899A (en) * 1987-06-01 1990-02-20 International Business Machines Corporation Lithographic process having improved image quality
US5604081A (en) * 1992-08-14 1997-02-18 Siemens Aktiengesellschaft Method for producing a surface structure with reliefs

Also Published As

Publication number Publication date Type
WO1994027187A1 (en) 1994-11-24 application
GB2277998A (en) 1994-11-16 application

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)