GB910857A - A method of manufacturing a diffusion type semiconductor device - Google Patents

A method of manufacturing a diffusion type semiconductor device

Info

Publication number
GB910857A
GB910857A GB37000/60A GB3700060A GB910857A GB 910857 A GB910857 A GB 910857A GB 37000/60 A GB37000/60 A GB 37000/60A GB 3700060 A GB3700060 A GB 3700060A GB 910857 A GB910857 A GB 910857A
Authority
GB
United Kingdom
Prior art keywords
impurity
type layer
oxide
oct
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB37000/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of GB910857A publication Critical patent/GB910857A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302Non-deposition formation processes
    • H10P14/6304Formation by oxidation, e.g. oxidation of the substrate
    • H10P14/6306Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials
    • H10P14/6308Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors
    • H10P14/6309Formation by oxidation, e.g. oxidation of the substrate of the semiconductor materials of Group IV semiconductors of silicon in uncombined form, i.e. pure silicon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6302Non-deposition formation processes
    • H10P14/6322Formation by thermal treatments

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
GB37000/60A 1959-10-29 1960-10-27 A method of manufacturing a diffusion type semiconductor device Expired GB910857A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3415559 1959-10-29

Publications (1)

Publication Number Publication Date
GB910857A true GB910857A (en) 1962-11-21

Family

ID=12406298

Family Applications (1)

Application Number Title Priority Date Filing Date
GB37000/60A Expired GB910857A (en) 1959-10-29 1960-10-27 A method of manufacturing a diffusion type semiconductor device

Country Status (3)

Country Link
DE (1) DE1158181B (https=)
GB (1) GB910857A (https=)
NL (1) NL256928A (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL210216A (https=) * 1955-12-02
BE531769A (https=) * 1957-08-07 1900-01-01
FR1211756A (fr) * 1958-10-07 1960-03-18 Lignes Telegraph Telephon Procédé de diffusion de bore dans du silicium

Also Published As

Publication number Publication date
NL256928A (https=)
DE1158181B (de) 1963-11-28

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