GB902233A - Method and apparatus for making film resistors - Google Patents
Method and apparatus for making film resistorsInfo
- Publication number
- GB902233A GB902233A GB109059A GB109059A GB902233A GB 902233 A GB902233 A GB 902233A GB 109059 A GB109059 A GB 109059A GB 109059 A GB109059 A GB 109059A GB 902233 A GB902233 A GB 902233A
- Authority
- GB
- United Kingdom
- Prior art keywords
- flask
- reaction
- tube
- temperature
- crcl3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 2
- 239000000460 chlorine Substances 0.000 abstract 2
- 229910052801 chlorine Inorganic materials 0.000 abstract 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 abstract 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- 229910021556 Chromium(III) chloride Inorganic materials 0.000 abstract 1
- 229910021380 Manganese Chloride Inorganic materials 0.000 abstract 1
- GLFNIEUTAYBVOC-UHFFFAOYSA-L Manganese chloride Chemical compound Cl[Mn]Cl GLFNIEUTAYBVOC-UHFFFAOYSA-L 0.000 abstract 1
- 229910015221 MoCl5 Inorganic materials 0.000 abstract 1
- 229910004537 TaCl5 Inorganic materials 0.000 abstract 1
- 229910003074 TiCl4 Inorganic materials 0.000 abstract 1
- 229910021552 Vanadium(IV) chloride Inorganic materials 0.000 abstract 1
- 229910003091 WCl6 Inorganic materials 0.000 abstract 1
- 229910007932 ZrCl4 Inorganic materials 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000001110 calcium chloride Substances 0.000 abstract 1
- 235000011148 calcium chloride Nutrition 0.000 abstract 1
- 229910001628 calcium chloride Inorganic materials 0.000 abstract 1
- QSWDMMVNRMROPK-UHFFFAOYSA-K chromium(3+) trichloride Chemical compound [Cl-].[Cl-].[Cl-].[Cr+3] QSWDMMVNRMROPK-UHFFFAOYSA-K 0.000 abstract 1
- 239000011636 chromium(III) chloride Substances 0.000 abstract 1
- 235000007831 chromium(III) chloride Nutrition 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 239000011565 manganese chloride Substances 0.000 abstract 1
- 235000002867 manganese chloride Nutrition 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910001510 metal chloride Inorganic materials 0.000 abstract 1
- GICWIDZXWJGTCI-UHFFFAOYSA-I molybdenum pentachloride Chemical compound Cl[Mo](Cl)(Cl)(Cl)Cl GICWIDZXWJGTCI-UHFFFAOYSA-I 0.000 abstract 1
- 238000010992 reflux Methods 0.000 abstract 1
- 238000003786 synthesis reaction Methods 0.000 abstract 1
- OEIMLTQPLAGXMX-UHFFFAOYSA-I tantalum(v) chloride Chemical compound Cl[Ta](Cl)(Cl)(Cl)Cl OEIMLTQPLAGXMX-UHFFFAOYSA-I 0.000 abstract 1
- 150000004685 tetrahydrates Chemical class 0.000 abstract 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 abstract 1
- KPGXUAIFQMJJFB-UHFFFAOYSA-H tungsten hexachloride Chemical compound Cl[W](Cl)(Cl)(Cl)(Cl)Cl KPGXUAIFQMJJFB-UHFFFAOYSA-H 0.000 abstract 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract 1
- JTJFQBNJBPPZRI-UHFFFAOYSA-J vanadium tetrachloride Chemical compound Cl[V](Cl)(Cl)Cl JTJFQBNJBPPZRI-UHFFFAOYSA-J 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- DUNKXUFBGCUVQW-UHFFFAOYSA-J zirconium tetrachloride Chemical compound Cl[Zr](Cl)(Cl)Cl DUNKXUFBGCUVQW-UHFFFAOYSA-J 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/14—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by chemical deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Vapour Deposition (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
<FORM:0902233/III/1> ZrCl4, TaCl5, MoCl5 and WCl6 are made by direct synthesis from their elements using the apparatus shown in Fig. 5. A quantity of metal is placed in reaction tube 150 and argon introduced through conduit 156 while the tube is being brought to reaction temperature by furnace 152. When such temperature is reached, chlorine is introduced through conduit 158 and the resulting metal chloride collected in cooled flask 160. VCl4 is made by reaction in an electrically-heated flask between vanadium and chlorine, the resulting chloride being distilled off into a cooled receiving flask which is open to the atmosphere through a CaCl2 drying tube. TiCl4 is purified by refluxing with Cu gauze and then distilling through a Vigreaux column. Anhydrous CrCl3 is made by dehydrating CrCl3,6H2O with CCl4 at a temperature increasing from 150 DEG to 650 DEG C. Anhydrous MnCl2 is made by vacuum dehydrating the tetrahydrate in an electrically heated evacuated flask, the water being collected in an ice trap.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB109059A GB902233A (en) | 1959-01-12 | 1959-01-12 | Method and apparatus for making film resistors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB109059A GB902233A (en) | 1959-01-12 | 1959-01-12 | Method and apparatus for making film resistors |
Publications (1)
Publication Number | Publication Date |
---|---|
GB902233A true GB902233A (en) | 1962-08-01 |
Family
ID=9715989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB109059A Expired GB902233A (en) | 1959-01-12 | 1959-01-12 | Method and apparatus for making film resistors |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB902233A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2204696A (en) * | 1987-05-12 | 1988-11-16 | Smith Ind Plc | Temperature sensor |
-
1959
- 1959-01-12 GB GB109059A patent/GB902233A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2204696A (en) * | 1987-05-12 | 1988-11-16 | Smith Ind Plc | Temperature sensor |
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