GB901468A - Improvements in or relating to evaporating ion pumps - Google Patents

Improvements in or relating to evaporating ion pumps

Info

Publication number
GB901468A
GB901468A GB11421/59A GB1142159A GB901468A GB 901468 A GB901468 A GB 901468A GB 11421/59 A GB11421/59 A GB 11421/59A GB 1142159 A GB1142159 A GB 1142159A GB 901468 A GB901468 A GB 901468A
Authority
GB
United Kingdom
Prior art keywords
wire
filament
getter
electrode
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB11421/59A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Publication of GB901468A publication Critical patent/GB901468A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

901,468. Discharge apparatus. HERAEUS G.m.b.H., W. C. April 3, 1959 [May 30, 1958], No. 11421/59. Class 39 (1). A focused electron beam is used to evaporate the end of a wire of gettering material in an ion-getter pump. The pump shown comprises an electron-emitting filament 6 and a cylindrical wire-mesh electrode 5 which is maintained at a positive potential to drive gas ions into a layer of getter material which is deposited on the wall of the casing 3. An electron beam 10 from a filament 8 is focused at a point 11 by a solenoid 9. A wire 12, which may be a composite wire consisting of a wire or wires of one or more gettering materials such as titanium interwound with a support wire of tantalum, is fed through a tube 13 from a reel 16 by a feed device 14 operated by a driving device 15 which may be inside or, as shown, outside the casing 3. The getter wire enters the electron beam 10 at or near the point 11 on the side remote from the electrode system 5, 6 and at an angle α which is preferably less than 30 degrees so that the beam engages a significant length of the wire. Evaporation may be continuous or intermittent. In the latter case, during the intervals, the filament 8 is switched off or the heating reduced, and the getter wire is advanced to maintain the end near the point 11. The voltage applied to the electrode 5 may be switched off during evaporation periods to prevent a gas discharge between the electrode 5 and the casing 3 or filament 6.
GB11421/59A 1958-05-30 1959-04-03 Improvements in or relating to evaporating ion pumps Expired GB901468A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH33442A DE1083485B (en) 1958-05-30 1958-05-30 Evaporator ion pump

Publications (1)

Publication Number Publication Date
GB901468A true GB901468A (en) 1962-07-18

Family

ID=7152149

Family Applications (1)

Application Number Title Priority Date Filing Date
GB11421/59A Expired GB901468A (en) 1958-05-30 1959-04-03 Improvements in or relating to evaporating ion pumps

Country Status (5)

Country Link
US (1) US3074621A (en)
CH (1) CH371212A (en)
DE (1) DE1083485B (en)
FR (1) FR1221434A (en)
GB (1) GB901468A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3181775A (en) * 1962-03-20 1965-05-04 Wisconsin Alumni Res Found Pumping apparatus
US3251536A (en) * 1963-10-08 1966-05-17 Cons Vacuum Corp Getter-ion pumps
US3313474A (en) * 1964-08-04 1967-04-11 Cons Vacuum Corp Vaporized material source
US3352482A (en) * 1965-09-13 1967-11-14 Electro Optical Systems Inc Ion sputter pumping collector
US3377499A (en) * 1966-05-16 1968-04-09 Varian Associates Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps
US3383032A (en) * 1967-01-31 1968-05-14 Atomic Energy Commission Usa Vacuum pumping method and apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
GB795551A (en) * 1955-09-27 1958-05-28 Ass Elect Ind Improvements relating to electron vacuum pumping systems
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Also Published As

Publication number Publication date
US3074621A (en) 1963-01-22
CH371212A (en) 1963-08-15
FR1221434A (en) 1960-06-01
DE1083485B (en) 1960-06-15

Similar Documents

Publication Publication Date Title
US2796555A (en) High-vacuum pump
US3121155A (en) Apparatus for evaporating a material within an ion pump
GB1237028A (en) Ion source
US3460745A (en) Magnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
US2798181A (en) Pumping ion source
US2856532A (en) Pulsed ion source
GB901468A (en) Improvements in or relating to evaporating ion pumps
US4157471A (en) High temperature ion source for an on-line isotope separator
US3024965A (en) Apparatus for vacuum deposition of metals
GB1257015A (en)
US2967012A (en) Getter-ion pump
CH379046A (en) Ion pump and use of the same
GB957197A (en) Improvements in or relating to evaporators for evaporating materials used in coating, gettering, ionic pumping of gas and the like
GB768003A (en) Improvements in high vacuum pumps
US2888189A (en) Vacuum pump
US2403745A (en) Apparatus and method for making tubes
US3784858A (en) Ion sources
US2677771A (en) Ion source
US3327931A (en) Ion-getter vacuum pump and gauge
US3118077A (en) Ionic vacuum pumps
US3510712A (en) Electron orbiting getter vacuum pump employing a time varying magnetic field
US2882408A (en) Ion source for a calutron
US3377499A (en) Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps
GB1003212A (en) Improvements in vacuum pumps of the ionization and evaporation type
Feidt et al. Conditions of electronic injection into a radial electrostatic field pump