GB9004980D0 - Electrode assembly and apparatus - Google Patents

Electrode assembly and apparatus

Info

Publication number
GB9004980D0
GB9004980D0 GB909004980A GB9004980A GB9004980D0 GB 9004980 D0 GB9004980 D0 GB 9004980D0 GB 909004980 A GB909004980 A GB 909004980A GB 9004980 A GB9004980 A GB 9004980A GB 9004980 D0 GB9004980 D0 GB 9004980D0
Authority
GB
United Kingdom
Prior art keywords
electrode assembly
electrode
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB909004980A
Other versions
GB2231197A (en
GB2231197B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordiko Ltd
UK Atomic Energy Authority
Original Assignee
Nordiko Ltd
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordiko Ltd, UK Atomic Energy Authority filed Critical Nordiko Ltd
Publication of GB9004980D0 publication Critical patent/GB9004980D0/en
Publication of GB2231197A publication Critical patent/GB2231197A/en
Application granted granted Critical
Publication of GB2231197B publication Critical patent/GB2231197B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means
    • H01J37/32688—Multi-cusp fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/334—Etching
    • H01J2237/3343—Problems associated with etching
    • H01J2237/3345—Problems associated with etching anisotropy
GB9004980A 1989-03-06 1990-03-06 Electrode assembly and apparatus Expired - Lifetime GB2231197B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB898905075A GB8905075D0 (en) 1989-03-06 1989-03-06 Electrode assembly and apparatus

Publications (3)

Publication Number Publication Date
GB9004980D0 true GB9004980D0 (en) 1990-05-02
GB2231197A GB2231197A (en) 1990-11-07
GB2231197B GB2231197B (en) 1994-03-30

Family

ID=10652818

Family Applications (2)

Application Number Title Priority Date Filing Date
GB898905075A Pending GB8905075D0 (en) 1989-03-06 1989-03-06 Electrode assembly and apparatus
GB9004980A Expired - Lifetime GB2231197B (en) 1989-03-06 1990-03-06 Electrode assembly and apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB898905075A Pending GB8905075D0 (en) 1989-03-06 1989-03-06 Electrode assembly and apparatus

Country Status (1)

Country Link
GB (2) GB8905075D0 (en)

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Also Published As

Publication number Publication date
GB2231197A (en) 1990-11-07
GB8905075D0 (en) 1989-04-19
GB2231197B (en) 1994-03-30

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PE20 Patent expired after termination of 20 years

Expiry date: 20100305