GB8816094D0 - Silicon integrated circuit - Google Patents

Silicon integrated circuit

Info

Publication number
GB8816094D0
GB8816094D0 GB888816094A GB8816094A GB8816094D0 GB 8816094 D0 GB8816094 D0 GB 8816094D0 GB 888816094 A GB888816094 A GB 888816094A GB 8816094 A GB8816094 A GB 8816094A GB 8816094 D0 GB8816094 D0 GB 8816094D0
Authority
GB
United Kingdom
Prior art keywords
integrated circuit
silicon integrated
silicon
circuit
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB888816094A
Other versions
GB2226445A (en
GB2226445B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Co Ltd
Original Assignee
Plessey Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Co Ltd filed Critical Plessey Co Ltd
Priority to GB8816094A priority Critical patent/GB2226445B/en
Publication of GB8816094D0 publication Critical patent/GB8816094D0/en
Publication of GB2226445A publication Critical patent/GB2226445A/en
Application granted granted Critical
Publication of GB2226445B publication Critical patent/GB2226445B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Integrated Circuits (AREA)
GB8816094A 1988-07-06 1988-07-06 Silicon integrated circuit Expired - Fee Related GB2226445B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8816094A GB2226445B (en) 1988-07-06 1988-07-06 Silicon integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8816094A GB2226445B (en) 1988-07-06 1988-07-06 Silicon integrated circuit

Publications (3)

Publication Number Publication Date
GB8816094D0 true GB8816094D0 (en) 1988-12-14
GB2226445A GB2226445A (en) 1990-06-27
GB2226445B GB2226445B (en) 1992-07-15

Family

ID=10639966

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8816094A Expired - Fee Related GB2226445B (en) 1988-07-06 1988-07-06 Silicon integrated circuit

Country Status (1)

Country Link
GB (1) GB2226445B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE511826C2 (en) * 1997-03-26 1999-12-06 Ericsson Telefon Ab L M trench Isolation
DE10041691A1 (en) * 2000-08-24 2002-03-14 Infineon Technologies Ag A semiconductor device
EP1213762A1 (en) * 2000-12-05 2002-06-12 Koninklijke Philips Electronics N.V. Electrical device isolation structure

Also Published As

Publication number Publication date
GB2226445A (en) 1990-06-27
GB2226445B (en) 1992-07-15

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20030706