GB8807261D0 - Improvements in & relating to ionisation assisted chemical vapour deposition - Google Patents

Improvements in & relating to ionisation assisted chemical vapour deposition

Info

Publication number
GB8807261D0
GB8807261D0 GB888807261A GB8807261A GB8807261D0 GB 8807261 D0 GB8807261 D0 GB 8807261D0 GB 888807261 A GB888807261 A GB 888807261A GB 8807261 A GB8807261 A GB 8807261A GB 8807261 D0 GB8807261 D0 GB 8807261D0
Authority
GB
United Kingdom
Prior art keywords
ionisation
relating
vapour deposition
chemical vapour
assisted chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB888807261A
Other versions
GB2215739A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Hull
Original Assignee
University of Hull
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Hull filed Critical University of Hull
Priority to GB8807261A priority Critical patent/GB2215739A/en
Publication of GB8807261D0 publication Critical patent/GB8807261D0/en
Publication of GB2215739A publication Critical patent/GB2215739A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
GB8807261A 1988-03-26 1988-03-26 Ionisation assisted chemical vapour deposition Withdrawn GB2215739A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB8807261A GB2215739A (en) 1988-03-26 1988-03-26 Ionisation assisted chemical vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8807261A GB2215739A (en) 1988-03-26 1988-03-26 Ionisation assisted chemical vapour deposition

Publications (2)

Publication Number Publication Date
GB8807261D0 true GB8807261D0 (en) 1988-04-27
GB2215739A GB2215739A (en) 1989-09-27

Family

ID=10634175

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8807261A Withdrawn GB2215739A (en) 1988-03-26 1988-03-26 Ionisation assisted chemical vapour deposition

Country Status (1)

Country Link
GB (1) GB2215739A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112680700A (en) * 2020-12-04 2021-04-20 安徽工业大学 Device and method for preparing electron beam-assisted carbon-based super-lubricating solid film
CN114032513A (en) * 2021-12-14 2022-02-11 湘潭大学 Method for preparing welding wire coating based on magnetic filtration cathode vacuum arc method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2401116A (en) * 2003-04-28 2004-11-03 Hauzer Techno Coating Bv Plasma Assisted Chemical Vapour Deposition
US8747631B2 (en) * 2010-03-15 2014-06-10 Southwest Research Institute Apparatus and method utilizing a double glow discharge plasma for sputter cleaning

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
CH664768A5 (en) * 1985-06-20 1988-03-31 Balzers Hochvakuum METHOD FOR COATING SUBSTRATES IN A VACUUM CHAMBER.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112680700A (en) * 2020-12-04 2021-04-20 安徽工业大学 Device and method for preparing electron beam-assisted carbon-based super-lubricating solid film
CN114032513A (en) * 2021-12-14 2022-02-11 湘潭大学 Method for preparing welding wire coating based on magnetic filtration cathode vacuum arc method

Also Published As

Publication number Publication date
GB2215739A (en) 1989-09-27

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)